A positioning system for positioning an object includes a stacked stage system movable on a reference surface. The stacked stage system includes a driving system for driving the stacked stage system; a first stage driven along a driving plane parallel to the plane of the reference surface; and a main stage for supporting the object, the main stage arranged on the driven first stage for moving the main stage along the driving plane. The main stage includes a rotary drive system for rotating the main stage with respect to the first stage around an axis parallel to an out-of-plane direction perpendicular to the driving plane. The main stage is movable with respect to the first stage in the out-of-plane direction and further includes a support bearing to movably support the main stage on the reference surface in said out-of-plane direction.

In an inspection master, an upper-surface oblique reference portion opened obliquely upward is provided on an upper surface of a master main body including the upper surface and a peripheral surface. In an inspection master, a peripheral-surface oblique reference portion opened obliquely upward is provided on a peripheral surface of a master main body including an upper surface and the peripheral surface. In either of those cases, an upper-surface vertical reference portion opened vertically can be provided on the upper surface, and a peripheral-surface lateral reference portion opened laterally can be provided on the peripheral surface. Further, a reference ball for use in obtaining an inclination angle of the master main body inclined during accuracy inspection for a five-axis processing machine is provided at a center portion of the upper surface.

In an inspection master, an upper-surface oblique reference portion opened obliquely upward is provided on an upper surface of a master main body including the upper surface and a peripheral surface. In an inspection master, a peripheral-surface oblique reference portion opened obliquely upward is provided on a peripheral surface of a master main body including an upper surface and the peripheral surface. In either of those cases, an upper-surface vertical reference portion opened vertically can be provided on the upper surface, and a peripheral-surface lateral reference portion opened laterally can be provided on the peripheral surface. Further, a reference ball for use in obtaining an inclination angle of the master main body inclined during accuracy inspection for a five-axis processing machine is provided at a center portion of the upper surface.

A coordinate measuring machine and a method for operating a coordinate measuring machine, and a rotary table module for a coordinate measuring machine with a rotary table for receiving a workpiece and a rotary table block are provided. The rotary table is supported on a rotary table side rotatably about a rotary table axis. The rotary table block has, opposite the rotary table side of the rotary table block, a bottom side with which the rotary table module can be supported on a measurement table of the coordinate measuring machine. The rotary table block has a further supporting side with which the rotary table block is supportable on the measurement table of the coordinate measuring machine and which differs from the bottom side in its alignment. The rotary table module includes a pose capturing device for the determination of whether the rotary table block is supported on the bottom side.

An XYZ flexural mechanism comprising an X-axis flexural mechanism comprising a first voice coil actuator, a motion stage platform, a plurality of flexural bearings, and a plurality of guide rods, a Y-axis flexural mechanism comprising a second voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, and a Z-axis flexural mechanism comprising a third voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, the frame supporting the XYZ flexural mechanism.

An XYZ flexural mechanism comprising an X-axis flexural mechanism comprising a first voice coil actuator, a motion stage platform, a plurality of flexural bearings, and a plurality of guide rods, a Y-axis flexural mechanism comprising a second voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, and a Z-axis flexural mechanism comprising a third voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, the frame supporting the XYZ flexural mechanism.

An articulating probe for a measurement device includes a base platform, a rotor platform that is movable relative to the base platform, and a sensor element coupled to the rotor platform. The rotor platform is coupled to the base platform via a spherical parallel kinematic system.

An articulating probe for a measurement device includes a base platform, a rotor platform that is movable relative to the base platform, and a sensor element coupled to the rotor platform. The rotor platform is coupled to the base platform via a spherical parallel kinematic system.

In an embodiment, a method comprises: obtaining, by a sensing device on a ferromagnetic surface, a first magnetometer reading of magnetic flux density modified by the ferromagnetic surface in a first direction; obtaining, by the sensing device, a second magnetometer reading of magnetic flux density modified by the ferromagnetic surface in a second direction; obtaining, by the sensing device, sensitivity terms based on the first and second magnetometer readings; and storing, by the sensing device, the sensitivity terms and a location of the sensing device on the ferromagnetic surface.

In an embodiment, a method comprises: obtaining, by a sensing device on a ferromagnetic surface, a first magnetometer reading of magnetic flux density modified by the ferromagnetic surface in a first direction; obtaining, by the sensing device, a second magnetometer reading of magnetic flux density modified by the ferromagnetic surface in a second direction; obtaining, by the sensing device, sensitivity terms based on the first and second magnetometer readings; and storing, by the sensing device, the sensitivity terms and a location of the sensing device on the ferromagnetic surface.