The present invention relates to systems and methods for measuring misalignment between layers of a semiconductor device. In one embodiment, a method includes applying an input voltage to respective ones of one or more first electrodes associated with a first conductive layer of a semiconductor device; sensing an electrical property of one or more second electrodes associated with a second conductive layer of the semiconductor device in response to applying the input voltage to the respective ones of the one or more first electrodes; and calculating a misalignment between the first conductive layer of the semiconductor device and the second conductive layer of the semiconductor device in an in-plane direction as a function of the electrical property of the one or more second electrodes.

A rotation angle detection system comprises a magnet arranged to rotate around a rotation axis. A first magnetic detection circuit defines a first surface provided with a first and second pairs of magnetic detection elements. A signal processing unit is configured to output a signal representative of a rotation angle of the magnet based on outputs of the first and second pair of magnetic detection elements. A second magnetic detection circuit is provided with another first and second pairs of magnetic detection elements. The signal processing unit is configured to output a redundant signal corresponding to a rotation angle of the magnet based on outputs of the other first pair of magnetic detection elements and the other second pair of magnetic detection elements.

A rotation angle detection system comprises a magnet arranged to rotate around a rotation axis. A first magnetic detection circuit defines a first surface provided with a first and second pairs of magnetic detection elements. A signal processing unit is configured to output a signal representative of a rotation angle of the magnet based on outputs of the first and second pair of magnetic detection elements. A second magnetic detection circuit is provided with another first and second pairs of magnetic detection elements. The signal processing unit is configured to output a redundant signal corresponding to a rotation angle of the magnet based on outputs of the other first pair of magnetic detection elements and the other second pair of magnetic detection elements.

A rotation position detection device includes a change drum, a magnetic field generator, and a magnetic field detector. The magnetic field generator is fixed to the change drum and rotates along with the change drum to differentiate an ambient magnetic field. The magnetic field detector is formed separately from the magnetic field generator and fixed to a position at which a magnetic field changes in response to rotation of the magnetic field generator so as to detect the magnetic field and output a signal that depends on the rotational position of the change drum on the basis of the detection result.

A rotation position detection device includes a change drum, a magnetic field generator, and a magnetic field detector. The magnetic field generator is fixed to the change drum and rotates along with the change drum to differentiate an ambient magnetic field. The magnetic field detector is formed separately from the magnetic field generator and fixed to a position at which a magnetic field changes in response to rotation of the magnetic field generator so as to detect the magnetic field and output a signal that depends on the rotational position of the change drum on the basis of the detection result.

A magnetic field measuring method includes: a first radial-magnetic-field measuring using a magnetic field measuring element placed at an offset position apart from the coil axis, to thereby measure, at the offset position, first radial magnetic fields along an offset axis parallel to the coil axis; a second radial-magnetic-field measuring using the magnetic field measuring element after being rotated by a set angle, to thereby measure, at the offset position, second radial magnetic fields along the offset axis; and a center-position determining determining the inter-coil center position, based on a first radial-magnetic-field characteristic that is a characteristic in a direction of the offset axis of the first radial magnetic fields, and a second radial-magnetic-field characteristic that is a characteristic in the direction of the offset axis of the second radial magnetic fields.

A magnetic field measuring method includes: a first radial-magnetic-field measuring using a magnetic field measuring element placed at an offset position apart from the coil axis, to thereby measure, at the offset position, first radial magnetic fields along an offset axis parallel to the coil axis; a second radial-magnetic-field measuring using the magnetic field measuring element after being rotated by a set angle, to thereby measure, at the offset position, second radial magnetic fields along the offset axis; and a center-position determining determining the inter-coil center position, based on a first radial-magnetic-field characteristic that is a characteristic in a direction of the offset axis of the first radial magnetic fields, and a second radial-magnetic-field characteristic that is a characteristic in the direction of the offset axis of the second radial magnetic fields.

A method is provided for determining the diameter of a rotor of a turbomachine, rotor being equipped with rotor blades. The method involves setting the rotor with the rotor blade ring in rotation, arranging a clearance measuring device assigned to the rotor blade ring outside the region of the latter, measuring the distance to the rotor blades of the rotor blade ring which are rotating past the clearance measuring device, and using the measured distance for determining the diameter of the rotor. During measuring, the rotational speed is identical to, almost identical to or higher than the setpoint rotational speed of the rotor.

A method is provided for determining the diameter of a rotor of a turbomachine, rotor being equipped with rotor blades. The method involves setting the rotor with the rotor blade ring in rotation, arranging a clearance measuring device assigned to the rotor blade ring outside the region of the latter, measuring the distance to the rotor blades of the rotor blade ring which are rotating past the clearance measuring device, and using the measured distance for determining the diameter of the rotor. During measuring, the rotational speed is identical to, almost identical to or higher than the setpoint rotational speed of the rotor.

Method and device for determining the squareness of an ice skate blade. According to one embodiment, the device may include an electrode stator and a reading unit. The reading unit may be mechanically coupled to a carriage. The carriage, in turn, may be slidably mounted on a pair of posts for translational movement. A master roller may be disposed at one end of the carriage, and the carriage may be biased in the direction of the master roller. The electrode stator may be mechanically coupled to a plunger. The plunger, in turn, may be slidably mounted on the carriage for translational movement along the same axis as the carriage; however, the plunger may be capable of moving independently of the carriage. A slave roller may be disposed at one end of the plunger, and the plunger may be biased in the direction of the slave roller.