A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.

An interferometric measurement system includes ports configured to receive an optical signal from an optical source and an optical signal from a target. A photonic integrated circuit includes a variable delay configured to select between at least two optical paths from the input to an output such that the optical signal from the optical source passes to the output while experiencing an optical delay based on a selected one of the at least two optical paths where a loss of the optical signal from the optical source provided to the input that passes to the output is nominally the same for each of the at least two optical paths. An optical receiver is configured to receive the optical signal from the target and to receive the optical signal from the optical source that experiences the optical delay based on the selected one of the at least two optical paths and generates a corresponding electrical receive signal at an electrical output. A processor is configured to generate an interferometric measurement signal based on the receive signal.

A system for precision displacement measurement based on a self-traceable grating interference includes a coherent light source, a photoelectric detection module, a self-traceable grating and a signal processing module. The self-traceable grating is arranged on a to-be-measured displacement motion platform. The coherent light source, the photoelectric detection module and the signal processing module are sequentially connected. Laser generated by the coherent light source propagates through the photoelectric detection module and is incident on the self-traceable grating, diffracts with the self-traceable grating, returns to the photoelectric detection module to continue propagating and enters the signal processing module. The signal processing module collects an interference signal to obtain a motion displacement and a motion direction.

Present disclosure relates to a heterodyne grating interferometric method and system for two-degree-of-freedom with high tolerance. The system comprises a separately modulated heterodyne laser (1), an optical prism (23) and a photoelectric detection and signal processing unit (4). The separately modulated heterodyne laser (1) simultaneously outputs two laser beams at different frequencies, which are incident in parallel to a first beamsplitting surface so as to be split, and then a part thereof is incident to a retro-reflector (233) to produce reference beams (53a, 53b), which are incident to a third beamsplitting surface, and the other part traverses a double-diffraction structure formed by a measured grating (3) and retro-reflectors (234a, 234b) to obtain two measured beams (59a, 59b), which are incident to a second beamsplitting surface and then are divided into two parts. Wherein one part is converged to form a first interference beam (61), and the other part is incident to the third beamsplitting surface and is converged with the corresponding reference beams (53a, 53b) to form second and third interference beams (62, 63). Photoelectric detection and signal processing is performed on the interference signals of the three interference beams (61, 62, 63), so as to calculate horizontal and vertical displacement of the grating (3). The present measurement method and system improve the angular tolerance of tip and tilt of the optical grating (3) while increasing the fold factors.

Systems, methods, and media for multiple beam optical coherence tomography are provided which, in some embodiments, include: a light source; a splitter that outputs a fraction of light to various waveguides; optical components that receive light from the waveguides and direct the light as beams that simultaneously impinge a sample at different lateral positions, and collect backscattered light from the lateral positons; another splitter that outputs a fraction of light to waveguides of a reference arm as reference light samples; a mixer that receives the backscattered light samples and the reference light samples, and combines each backscattered sample with a corresponding reference sample such that the mixer outputs fringes; and a detector that receives the fringes, and outputs OCT signals, each indicative of a structure of the sample at a respective lateral position.

A method for identifying three entangled photons includes generating a set of first, second, and third entangled photons correlated in time and interfering the first and second entangled photons based on a difference between a first optical path from an output of an optical source that generates the first entangled photon to a first optical input to an interferometric beam splitter and a second optical path from an output of the optical source that generates the second entangled photon to a second input of the interferometric beam splitter. A first electrical signal is generated in response to detection of a first photon generated by the interfering of the first and second entangled photons. A second electrical signal is generated in response to detection of a second photon generated by the interfering of the first and second entangled photons. A third electrical signal is generated in response to detection of the third entangled photon. The first photon coincidence is determined from the first, second and their electrical signals, thereby identifying three entangled photons.

An interferometric overlay tool may include an interferometer and a controller. The interferometer may include one or more beamsplitters to split illumination including one or more wavelengths into a probe beam along a probe path and a reference beam along a reference path, one or more illumination optics to illuminate a grating-over-grating structure with the probe beam, one or more collection optics to collect a measurement beam from the grating-over-grating structure, one or more beam combiners to combine the measurement beam and the reference beam as an interference beam, and a variable phase delay configured to vary an optical path difference (OPD) in the interferometer. The controller may receive one or more interference signals representative of interferometric phase data associated with a plurality of OPD values and the one or more wavelengths from a detector and determine an overlay error of the grating-over-grating structure based on the interferometric phase data.

A calibration method includes the steps of placing a structure to be measured at a first position, measuring a first distance from a laser interferometer to a reflector, and measuring first coordinates of a body to be measured, moving the structure to be measured to a second position, measuring a second distance from the laser interferometer to the reflector and measuring second coordinates of the structure to be measured with the coordinate measuring apparats, while the structure to be measured is at the second position, determining a scale error of the reference instrument, mounting the reference instrument, measuring the interval between objects to be measured, and calculating a calibration value of the interval between the objects to be measured.

A calibration method includes the steps of placing a structure to be measured at a first position, measuring a first distance from a laser interferometer to a reflector, and measuring first coordinates of a body to be measured, moving the structure to be measured to a second position, measuring a second distance from the laser interferometer to the reflector and measuring second coordinates of the structure to be measured with the coordinate measuring apparats, while the structure to be measured is at the second position, determining a scale error of the reference instrument, mounting the reference instrument, measuring the interval between objects to be measured, and calculating a calibration value of the interval between the objects to be measured.

A microstructured optical fiber for generating supercontinuum light. The optical fiber includes a core and a cladding region surrounding the core. The optical fiber includes a first fiber length section, a second fiber length section as well as an intermediate fiber length section between said first and second fiber length sections. The first fiber length section has a core with a first characteristic core diameter larger than about 7 μm. The second fiber length section has a core with a second characteristic core diameter, smaller than said first characteristic core diameter. The intermediate length section of the optical fiber includes a core which is tapered from said first characteristic core diameter to the second characteristic core diameter over a tapered length. Also, a supercontinuum light source including an optical fiber and a pump light source.