G01B9/02001

OPTICAL FIBER TEMPERATURE CONTROL SYSTEM AND METHOD
20170371117 · 2017-12-28 ·

A method for monitoring optical fiber temperature includes heating an optical fiber using a heat source, and measuring an infrared radiation level emitted by an optical fiber during heating of the optical fiber. The method further includes comparing the infrared radiation level to a radiation level setpoint for the optical fiber to determine a radiation level error value. The method further includes adjusting a power level setpoint of the heat source based on the radiation level error value.

APPARATUS AND METHOD FOR MEASURING THICKNESS

Disclosed are apparatuses and methods for measuring a thickness. The apparatus for measuring a thickness including a light source that emits a femto-second laser, an optical coupler through which a portion of the femto-second laser is incident onto a target and other portion of the femto-second laser is incident onto a reference mirror, a detector configured to receive a reflection signal reflected on the reference mirror and a sample signal generated from the target and configured to measure a thickness of the target based on an interference signal between the reflection signal and the sample signal, and a plurality of optical fiber lines configured to connect the light source, the optical coupler, and the detector to each other may be provided.

Interferometry with pulse broadened diode laser

Various optical systems equipped with diode laser light sources are discussed in the present application. One example system includes a diode laser light source for providing a beam of radiation. The diode laser has a spectral output bandwidth when driven under equilibrium conditions. The system further includes a driver circuit to apply a pulse of drive current to the diode laser. The pulse causes a variation in the output wavelength of the diode laser during the pulse such that the spectral output bandwidth is at least two times larger than the spectral output bandwidth under the equilibrium conditions.

OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

METHOD FOR CALIBRATION OF AN OPTICAL MEASUREMENT SYSTEM AND OPTICAL MEASUREMENT SYSTEM
20230168077 · 2023-06-01 · ·

The invention provides a method for calibration of an optical measurement system, which may be a heterodyne interferometer system, wherein a first optical axis and a second optical axis have a different optical path length, the method comprises: .sup.∘measuring a first measurement value along the first optical axis using a first measurement beam, .sup.∘measuring a second measurement value along the second optical axis using a second measurement beam, .sup.∘changing a wavelength of the first measurement beam and the second measurement beam, .sup.∘measuring a further first measurement value along the first optical axis using the first measurement beam with changed wavelength, measuring a further second measurement value along the second optical axis using the second measurement beam with changed wavelength, .sup.∘determining a cyclic error of the optical measurement system on the basis of the measured values, and .sup.∘storing a corrective value based on the cyclic error.

Optical coherence tomography (OCT) system for producing profilometry measurements of a specimen

An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements is provided. The OCT system includes a line-field generator, an interferometer, and a spectrometer. The line-field generator includes a filter arranged in a focal plane of a lens for spatially filtering extended line-field light into a line-field light of a width equal to the lateral resolution. The interferometer is configured to interfere the line-field light reflected from the specimen illuminated with a line-shaped focus with a reference signal of the line-field light to produce an interference pattern. The spectrometer configured to analyze spectral components of the interference pattern in a digital domain to produce the profilometry measurements of the specimen.

Optical coherence tomography (OCT) system for producing profilometry measurements of a specimen

An optical coherence tomography (OCT) system for profilometry measurements of a specimen with a lateral resolution across the profilometry measurements is provided. The OCT system includes a line-field generator, an interferometer, and a spectrometer. The line-field generator includes a filter arranged in a focal plane of a lens for spatially filtering extended line-field light into a line-field light of a width equal to the lateral resolution. The interferometer is configured to interfere the line-field light reflected from the specimen illuminated with a line-shaped focus with a reference signal of the line-field light to produce an interference pattern. The spectrometer configured to analyze spectral components of the interference pattern in a digital domain to produce the profilometry measurements of the specimen.

Laser interferometer
11668555 · 2023-06-06 · ·

A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and a signal generator that outputs the reference signal input to the demodulation circuit and outputs a drive signal input to the optical modulator, in which Vd/Vr<10, where Vr is a voltage of the reference signal and Vd is a voltage of the drive signal.

SWEPT FREQUENCY PHOTONIC INTEGRATED CIRCUIT FOR ABSOLUTE METROLOGY
20220049945 · 2022-02-17 ·

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a tunable laser source implemented on the photonic integrated circuit configured to sweep over a frequency range to provide multi-wavelength light, a first waveguide structure implemented on the photonic integrated circuit configured to direct a first portion of light from the laser source at a moving object and receive light reflected from the moving object, a second waveguide structure implemented on the photonic integrated circuit configured to combine a second portion of light from the laser source with the light reflected from the moving object to produce a measurement beam, and a first detector implemented on the photonic integrated circuit configured to detect intensity values of the measurement beam to measure a distance between the digital measuring device and the moving object.

Polarization enhanced interferometric imaging

An imaging system uses polarized light to illuminate the target and then uses a polarization filter to remove the light that is reflected from the target without modification. The target can include one or more anisotropic objects that scatter the light and alter the polarization state of the reflected light and causing it to be selectively transmitted to the imaging device which can record the transmitted light through the filter. The illuminating light can be circularly polarized and the filter can remove the circularly polarized light. The target can include asymmetric nanoparticles, such as nanorods that alter the amplitude or phase of the scattered light enabling pass through the filter to be detected by the imaging device.