Patent classifications
G01B9/02015
INTERFEROMETER SYSTEMS AND METHODS THEREOF
An interferometer system includes a measurement arm comprising a measurement dispersive optical system, a reference arm comprising a bulk diffuser object and a reference dispersive optical system, and an output system. The measurement dispersive optical system is positioned to direct measurement chromatic light towards a target, receive diverging chromatic measurement light from the target, and direct detected measurement light from the received diverging chromatic measurement light towards the output system. The reference dispersive optical system is positioned to direct reference chromatic light towards the bulk diffuser object, receive diverging chromatic reference light from the bulk diffuser object, and direct detected reference light from the received diverging chromatic reference light towards the output system. The output system is configured to determine at least one measured property of the target from the detected measurement light and the detected reference light.
OPTICAL COHERENCE TOMOGRAPHY RECEIVER
An Optical Coherence Tomography receiver may include prisms, polarizing beam splitters, reflectors, lenses, and a photodetector array arranged in a compact package. Sample and reference beams are combined into an interference beam and split in two. The two resulting interference beams are then split into two polarization sates each. The optical path lengths for both pairs of interference beams with the same polarization state are equal or nearly equal.
METHODS AND APPARATUS FOR AN ADJUSTABLE BEAM DIRECTING OPTICAL SYSTEM
An adjustable beam directing optical system for a focused laser differential interferometer (FLDI) instrument according to various aspects of the present technology may include optical half waveplate to achieve an incident linear polarization orientation with equal components of laser intensity aligned to the vertical and horizontal axis of the optical system, and an optical prism for splitting these components of an incident laser beam into two orthogonally-polarized beams equally about an optical axis of the FLDI instrument. A series of beam realignment devices positioned downstream of the optical prism are configured to selectively direct each beam to a predetermined location.
METHODS AND APPARATUS FOR AN ADJUSTABLE BEAM DIRECTING OPTICAL SYSTEM
An adjustable beam directing optical system for a focused laser differential interferometer (FLDI) instrument according to various aspects of the present technology may include optical half waveplate to achieve an incident linear polarization orientation with equal components of laser intensity aligned to the vertical and horizontal axis of the optical system, and an optical prism for splitting these components of an incident laser beam into two orthogonally-polarized beams equally about an optical axis of the FLDI instrument. A series of beam realignment devices positioned downstream of the optical prism are configured to selectively direct each beam to a predetermined location.
Dual beam optical coherence tomography with simultaneous orthogonal scanning
Disclosed herein is a simultaneous orthogonal scanning dual beam OCT system. The simultaneous orthogonal scanning dual beam OCT system includes: a light source 10; a light distribution unit 20; a sample arm 40; a reference arm 50; a interference unit 60; and a detection unit 70.
Spectrally-resolved three-dimensional shape measurement device and spectrally-resolved three-dimensional shape measurement method
An apparatus includes: an interferometer configured to produce white light fringes with measuring light reflected or scattered by an object; an image sensor configured to generate an image signal for each pixel; and a controller. The interferometer splits the measuring light into two luminous fluxes and reflects them on reflecting mirrors having different curvatures. A white light fringe signal is obtained by varying the optical path difference between the two luminous fluxes. The controller is configured to perform frequency conversion on the white light fringe signal, with respect to the optical path difference, to determine a cross spectral density representing spectral information of each point on the object. The controller is configured to perform back-propagation computation based on Fresnel diffraction integral on the cross spectral density to determine a wavefront of light from each point on the object.
HIGH-SPEED METROLOGY
A method and an apparatus are directed to characterizing a continuously moving 3D object via interferometry-based scanning. The method includes repeatedly forming several depth characterizations of the 3D object along respective scan lines of a plurality of scan lines on the surface of the 3D object. During this scanning, the 3D object is undergoing its continuous motion. The method further includes combining the determined depth characterization along the scan lines of the plurality of scan lines to form a depth map representing at least a depth of a portion associated with a location on the surface of the 3D object in the third direction on a grid of locations arranged in the first and second directions. Forming the depth characterizations includes scanning a frequency-dispersed pulsed optical signal in a first direction across the continuously moving 3D object, said 3D object moving in a second direction substantially orthogonal to the first direction. The scanned optical signal forming scan lines on a surface of the 3D object in a third direction substantially orthogonal to the first direction and the second direction.
LIGHT INTERFERENCE UNIT AND LIGHT INTERFERENCE MEASUREMENT DEVICE
A light interference unit includes a branching optical element, a multiplexing optical element, and at least one fiber device. The branching optical element branches a laser light with an emission wavelength temporally swept, into a measurement light and a reference light. The multiplexing optical element multiplexes the reference light and the measurement light reflected by a measured object, and causes them to interfere. The fiber device includes a reference light device. A transmission light path length is a light path length of the reference light transmitting the reference light device, from the reference light device to the multiplexing optical element. A reflection light path length is a light path length of the reference light reflected by a separation portion of the reference light device, from the reference light device to the multiplexing optical element. The transmission light path length is equal to or more than the reflection light path length.
HIGH SPEED IMAGING SYSTEM FOR MEASURING TARGET OBJECT WITHIN SAMPLE
The present invention relates to a high-speed imaging system for measuring a target object within a sample, comprising: a light source emitting a plane wave; an angle-adjustment mirror adjusting an angle of the plane wave emitted from the light source; an optical interferometer dividing the plane wave whose angle was adjusted by the angle-adjustment mirror into a reference wave and a sample wave and forming an interference wave between the reference wave reflected from a reference mirror and the sample wave reflected from the target object; a camera module obtaining the interference wave, and an imaging controller controlling the angle-adjustment mirror to adjust the angle of the plane wave sequentially, forming a time-gated reflection matrix by using the interference waves obtained by the camera module in accordance with each angle of the plane wave, and imaging the target object based on the time-gated reflection matrix.
Compact quadrature mach-zehnder interferometer
An interferometer is provided. The interferometer includes a multifaceted beamsplitter. Angles of incidence between beams entering the beamsplitter and a beamsplitting surface of the beamsplitter are less than 45 degrees. The arms of the interferometer feature a refractive compensator or a catseye optical configuration to provide an optical path length difference for rays that is the same at any location along the effective aperture of the interferometer. A detector assembly can be included with at least four detectors that lie in a plane and that receive light along paths that are orthogonal to that plane.