A method and apparatus for quantitatively characterizing performance of a laser steering galvanometer mirror directs a laser beam from a calibration sensor onto a side region of the mirror to directly determine rotational positioning, velocity, and/or acceleration thereof using interferometry, time-of-flight measurements, and Doppler measurements. Measured positioning errors can be compared with a database to predict required calibration adjustments. Embodiments automatically adjust digital calibrations. Mirrors, splitters, and/or a plurality of sensors can apply measurement beams simultaneously or sequentially to both sides of a mirror, and/or to more than one mirror. Large rotation ranges, for example larger than +/15 degrees, can be accommodated by applying measurement beams from a plurality of directions. The calibration apparatus can be distinct, or integral with the galvanometer, and can be used to monitor and/or to control the mirror positioning.

Around a crankshaft (S) supported by a support device (10), a first shape measuring device (31) to a fourth shape measuring device (34) are disposed, and the crankshaft (S) and the first shape measuring device (31) to the fourth shape measuring device (34) are relatively movable in an axial direction (X direction) of the crankshaft (S). The first shape measuring device (31) and the third shape measuring device (33) are disposed so as to face to one X direction and acquire partial shape information (including the other side surfaces in the X direction of counterweights (S2)) of the crankshaft S, and further, the second shape measuring device (32) and the fourth shape measuring device (34) are disposed so as to face to the other X direction and acquire partial shape information (including one side surfaces in the X direction of the counterweights (S2)) of the crankshaft S. This makes it possible to accurately inspect a shape of the crankshaft (S) in a short time.

A measurement method for interferometrically measuring the shape of a surface (112) of a test object (114). A test wave (125-1, 125-2) directed at the test object has a wavefront that is at least partially adapted to the desired shape of the surface, and a reference wave (128-1, 128-2) directed at a reflective optical element (130-1, 130 2) has a propagation direction that deviates from the propagation direction of the test wave (125-1, 125-2) for each of two input waves by diffraction at a diffractive element (124). For each wavelength, the test wave is superimposed after interaction with the test object with the associated reference wave after the back-reflection at the first reflective optical element. The test and reference waves are diffracted again at the diffractive element for superposition. An interferogram produced by the superposition is captured in a capture plane (148-1, 148-2). The interferograms are jointly evaluated.

Various optical systems equipped with diode laser light sources are discussed in the present application. One example system includes a diode laser light source for providing, a beam of radiation. The diode laser has a spectral output bandwidth when driven under equilibrium conditions. The system further includes a driver circuit to apply a pulse of drive current to the diode laser. The pulse causes a variation in the output wavelength of the diode laser during the pulse such that the spectral output bandwidth is at least two times larger the spectral output bandwidth under the equilibrium conditions.

An interferometer is provided. The interferometer includes a multifaceted beamsplitter. Angles of incidence between beams entering the beamsplitter and a beamsplitting surface of the beamsplitter are less than 45 degrees. The arms of the interferometer feature a refractive compensator or a catseye optical configuration to provide an optical path length difference for rays that is the same at any location along the effective aperture of the interferometer. A detector assembly can be included with at least four detectors that lie in a plane and that receive light along paths that are orthogonal to that plane.

An optical system comprising an optical coherence tomography (OCT) measuring device and a beam deflection unit for laterally deflecting the position or angle of a beam path of the OCT measuring device.

There is an optical component in the beam path, said optical component being embodied in such a way that a back-reflection of the optical component has a different configuration in terms of its longitudinal location along the beam path depending on the lateral position of the deflected beam path on the optical component.

The optical system comprises an evaluation unit which is embodied in such a way that a value of the lateral position or angle deflection of the beam deflection unit is determinable on the basis of a longitudinal location of the back-reflection at the optical component determined by the OCT measuring device.

Provided is a position detection method including splitting detection light into first and second light, the first light being incident on a returning optical path, a portion of the first light being transmitted through a beam splitter and a remaining portion of the first light being reflected by the beam splitter to reach the beam splitter through a movable mirror every time the first light reaches the beam splitter through the movable mirror, combining the first light transmitted though the beam splitter and the second light to generate multiple interference light, extracting a second interference light signal having a wavelength of 1/p (p is a natural number) of a wavelength of detection light from a first interference light signal of the multiple interference light, and calculating a position of the movable portion in a predetermined direction based on the second interference light signal.

An optical measurement system measuring optical parameters of an object is provided. The object includes at least two light-transmitting layers. The optical measurement system includes a light source module, an image capture module, and a controller. The light source module emits at least two measurement light beams toward the object. The measurement light beams are respectively incident on the object at different angles. The image capture module receives light spots formed on a sensing surface of the image capture module by at least two first light beams after the measurement light beams are reflected by the object and at least two second light beams after the measurement light beams are refracted and reflected between the object. The controller is electrically connected to the image capture module to obtain positions of the light spots. The controller calculates the optical parameters of the object according to the positions of the light spots.

An inertial point-source matter-wave atom interferometer gyroscope includes an analyzer that receives fringe images of gyroscope atoms and includes: a first fringe image that includes a first fringe phase, a second fringe image that includes a second fringe phase; and a third fringe image that includes a third fringe phase, wherein the first fringe phase, the second fringe phase, and the third fringe phase are different; a phase mapper of the analyzer that produces a interferometric phase map for the gyroscope atoms from the fringe images of the gyroscope atoms; and a fitter of the analyzer in communication with the phase mapper and that receives the interferometric phase map from the analyzer and determines inertial parameters of the gyroscope atoms from the interferometric phase map, the inertial parameters including an acceleration and a rotation rate of the inertial point-source matter-wave atom interferometer gyroscope relative to the gyroscope atoms.

An optical coherence tomography scanning system traverses its respective scan pattern quickly, typically completing an entire two-dimensional frame faster than a conventional raster scanner completes one raster line segment. To traverse the scan pattern quickly, the system takes fewer A-scans per length of scan pattern than a conventional OCT scanner. To compensate for the sparsity of the sample points along the respective scan line segments, and for gaps between respective line segments of the trajectory, the system acquires and combines several partially overlapping frames for each study.