Disclosed is a non-contact optical measurement device for detecting or measuring different geometric workpiece features based on configurable light-propagation paths of light emitted from a light source and reflected by a workpiece surface for incidence upon a spectral sensor. The light-propagation paths are configurable based on which optical probe is attached to a rotation stage that rotates the probe about an optical axis and in a collimated region.

Disclosed is a non-contact optical measurement device for detecting or measuring different geometric workpiece features based on configurable light-propagation paths of light emitted from a light source and reflected by a workpiece surface for incidence upon a spectral sensor. The light-propagation paths are configurable based on which optical probe is attached to a rotation stage that rotates the probe about an optical axis and in a collimated region.

By arranging light source, optical chip, interferometer, photoelectric detection module, sample acquisition module and data processing module, wherein light source is connected to interferometer by optical chip, while both reference path and sample path of optical chip have optical delay line arranged respectively, and optical delay lines are continuously adjustable; optical chip is configured to divide detection light into reference path signal light and sample path signal light, and transmitting reference path signal light and sample path signal light to interferometer by optical delay line continuously adjustable respectively. Comparing with traditional mechanical style TD-OCT system having problem of scanning rate slow, present solution replaces a mechanical movement of reference path in prior art by optical delay lines continuously adjustable, which not only improves scanning rate, but also has smaller volume.

An acquiring apparatus includes a first light source, a measurement optical system, an image sensor, an adjusting unit, an interferometer, and a calculating unit configured to calculate a distance between adjacent target surfaces among the plurality of target surfaces based on an interference signal. The index surface, a surface containing the first point, a surface containing the second point, and the light receiving surface have a conjugate relationship with each other with respect to the measurement optical system.

An audio system including an optical microphone and an audio controller. The optical microphone includes a light source and a detector. In some embodiments, the light source illuminates skin of a user. Alternatively the optical microphone also includes a membrane, and the light source illuminates a portion of the membrane. Sounds from a local area cause vibrations in the skin (or vibrations in the membrane). The detector may be in an interferometric configuration or a non-interferometric configuration with the light source. The audio controller monitors the vibrations of the skin (or membrane) using signal output from the detector, and measures the sounds using the monitored vibrations.

A method for determining a velocity of objects in a medium comprises inputting a wave into a wave interference network, generating a first and at least one second point spread function (PSF), outputting at least one propagation mode of the wave to the medium for illuminating the medium therewith, collecting a scattered signal from the medium, acquiring a first signal having the first PSF associated therewith and at least one second signal having the at least one second PSF associated therewith, determining a first correlation of at least one of the first signal and the at least one second signal, and a second correlation of at least one of the first signal and the at least one second signal, determining a ratio between the first correlation and the second correlation, and determining the velocity of the one or more objects in the medium based on the ratio.

Provided is a snapshot spectral domain optical coherence tomographer comprising a light source providing a plurality of beamlets; a beam splitter, splitting the plurality of beamlets into a reference arm and a sample arm; a first optical system that projects the sample arm onto multiple locations of a sample; a second optical system for collection of a plurality of reflected sample beamlets; a third optical system projecting the reference arm to a reflecting surface and receiving a plurality of reflected reference beamlets; a parallel interferometer that provides a plurality of interferograms from each of the plurality of sample beamlets with each of the plurality of reference beamlets; an optical image mapper configured to spatially separate the plurality of interferograms; a spectrometer configured to disperse each of the interferograms into its respective spectral components and project each interferogram in parallel; and a photodetector providing photon quantification.

Shearography systems provide independent setting of fringe frequency and shear magnitude by situating an interferometer with a tiltable reflector proximate a pupil plane of an imaging optical system. Fringe frequency can be selected based on a modified Savart plate. In other examples, a Wollaston prism or a polarization grating is translated with respect to an image sensor to vary shear magnitude while maintaining a substantially fixed fringe frequency.

Disclosed herein is an endpoint detection having an optical bundle configured to emit light through a ceiling of a processing chamber. The optical bundle has a plurality of fibers configured to transmit the light from a light source towards a substrate and is configured to receive light reflected from the substrate. The plurality of fibers include a first emitting fiber and a first receiving fiber. The first receiving fiber is radially disposed at a pairing angle from the first emitting fiber, and is configured to receive light emitted from the first emitting fiber. The plurality of fibers further include a second emitting fiber and a second receiving fiber. The second receiving fiber is radially disposed at the pairing angle from the second emitting fiber. The second receiving fiber is configured to receive light originating from the second emitting fiber. The pairing angle is between about 175 degrees and 185 degrees.

Disclosed herein is an endpoint detection having an optical bundle configured to emit light through a ceiling of a processing chamber. The optical bundle has a plurality of fibers configured to transmit the light from a light source towards a substrate and is configured to receive light reflected from the substrate. The plurality of fibers include a first emitting fiber and a first receiving fiber. The first receiving fiber is radially disposed at a pairing angle from the first emitting fiber, and is configured to receive light emitted from the first emitting fiber. The plurality of fibers further include a second emitting fiber and a second receiving fiber. The second receiving fiber is radially disposed at the pairing angle from the second emitting fiber. The second receiving fiber is configured to receive light originating from the second emitting fiber. The pairing angle is between about 175 degrees and 185 degrees.