Embodiments disclosed herein provide methods of forming bond pad redistribution layers (RDLs) in a fan-out wafer level packaging (FOWLP) scheme using an additive manufacturing process. In one embodiment, a method of forming a redistribution layer includes positioning a carrier substrate on a manufacturing support of an additive manufacturing system, the carrier substrate including a plurality of singulated devices, detecting one or more fiducial features corresponding to each of the plurality of singulated devices, determining actual positions of each of the plurality of singulated devices relative to one or more components of the additive manufacturing system, generating printing instructions for forming a patterned dielectric layer based on the actual positions of each of the plurality of singulated devices, and forming the patterned dielectric layer using the printing instructions.

Apparatus, systems, and methods of operating a fiber laser having polarization-preserving fibers can be applied as a sensor to detect a physical quantity. In various embodiments, polarization-preserving fibers can provide a laser cavity having an interferometer disposed in the laser cavity. In various embodiments, a fiber optical parametric oscillator can include an interferometer disposed in the cavity of the optical parametric oscillator. Additional apparatus, systems, and methods are disclosed.

Disclosed are a testing apparatus and a testing method. When the testing apparatus is used to test a sample (11) to be tested, a first detection apparatus (21) and a second detection apparatus (22) can be switched by means of an objective lens switching apparatus (20), so as to acquire height information and structure information of the sample (11) to be tested. In the process, the sample (11) to be tested does not need to be transferred between testing apparatuses, thus, not only is pollution potentially created in the process of transferring the sample (11) to be tested avoided, and the probability of the sample (11) to be tested being polluted in the testing process reduced, but also a region to be tested of the sample (11) to be tested does not need to be determined repeatedly, improving the testing speed for the sample (11) to be tested.

The present invention provides a Fabry-Perot sensor for measuring inclination. Wherein the present inclinometer is fixed on a static detected object in application use, the mass block is flexibly connected to the top plate, thus the line between the center of gravity of the mass block and the connecting point on the top plate is perpendicular to the horizontal plane; a Fabry-Perot cavity is formed between the reflecting surface disposed at one end of the mass block and the end of the optic fiber. The detected object will be in a static state after tilting, the line between the center of gravity of the mass block and its connecting point on the top plate is still perpendicular to the level plane and the F-P cavity length will have a variation. Then the change of cavity length can be measured in accordance with the Fabry-Perot principle, thereby the tilting angle of the mass block is able to be further measured. Then the tilting angle is also the inclination of the detected object. The sensor provided in present invention has advantages such as simplicity, convenience and high precision and has wide application prospective.

A measurement device (120) includes a light director and a spatial light modulator (130). The light director is disposed to direct light to the spatial light modulator (130) and the spatial light modulator (130) is disposed to receive light from the light director and to modulate it to form an intensity pattern. An optical element is disposed to receive light which formed the intensity pattern and is arranged to magnify the intensity pattern into a measurement space. A detector (142) is disposed to detect light reflected from the measurement space.

A fiber optic sensing system for determining the position of an object requires a light source, an optical fiber, a fiber optic splitter, a fiber tip lens, an optical detector and signal processing circuitry. Light emitted by the light source is conveyed via optical fiber and the splitter to the lens and onto an object, such that at least a portion of the light is reflected by the object and conveyed via fiber and the splitter to the detector. Signal processing circuitry coupled to the detector determines the position of the object with respect to the lens based on a characteristic of the reflected light. The system is suitably employed with a hydraulic accumulator having a piston, the position of which varies with the volume of fluid in the accumulator, with the system arranged to determine the position of the piston, from which the volume can be calculated.

The present invention is directed to the provision of an interferometer and a phase shift amount measuring apparatus that can precisely operate in the EUV region. The interferometer according to the invention comprises an illumination source for generating an illumination beam, an illumination system for projecting the illumination beam emitted from the illumination source onto a sample, and an imaging system for directing the reflected beam by the sample onto a detector. The illumination system includes a first diffraction grating for producing a first and second diffraction beams which respectively illuminate two areas on the sample where are shifted from each other by a given distance, and the imaging system includes a second grating for diffracting the first and second diffraction beams reflected by the sample to produce a third and fourth diffraction beams which are shifted from each other by a given distance.

An electro-optic modulator includes a waveguide of a nonlinear optical material and an electrode line for generating an electrical field in a modulating region of the waveguide when a voltage is applied to the electrode line, thereby modulating light passing through the waveguide. Therein, the forward electro-optic response of the modulating region is the same as the backward electro-optic response; and the electro-optic response has a band-pass or a low-pass characteristic. A distance measuring device includes a light source emitting light, and such an electro-optic modulator arranged such that the emitted light passes through the electro-optic modulator in a first direction before being emitted from the distance measuring device, and after being reflected from a target passes through the electro-optic modulator in a second direction which is opposite to the first direction.

An OCT device includes a light source that outputs light including a plurality of wavelengths; a division unit that divides light output from the light source into reference light and measurement light; a measurement arm that forms a light path of the measurement light with which a measurement target is irradiated and reflected light from the measurement target, which is generated by the measurement light; a reference arm that forms a light path of the reference light; and a measurement unit that measures the measurement target based on interference light between the reflected light and the reference light. At least one of the measurement arm and the reference arm includes a dispersion unit that disperses light into lights of each wavelength and a dispersed light path portion that forms light paths of dispersed lights, the light paths having a light path length different for each wavelength.

An optical module 1 includes: a mirror unit 2 including a base 21, a movable mirror 22, and a fixed mirror 16; a beam splitter unit 3 that is disposed on one side of the mirror unit 2 in a Z-axis direction; a light incident unit 4 that causes measurement light L0 to be incident to the beam splitter unit 3; a first light detector 6 that is disposed on the one side of the beam splitter unit 3 in the Z-axis direction, and detects interference light L1 of measurement light which is emitted from the beam splitter unit 3; a support 9 to which the mirror unit 2 is attached; a first support structure 11 that supports the beam splitter unit 3; and a second support structure 12 that is attached to the support 9 and supports the first light detector 6.