G01B9/02055

Photonic integrated receiver
11397075 · 2022-07-26 · ·

A wavelength tunable laser device includes a gain element positioned in an optical cavity that provides optical gain to an optical signal. A frequency shifter that generates a frequency shift as a function of time is positioned in the optical cavity. The optical cavity is configured so that a magnitude of the frequency shift as a function of time generated by the frequency shifter is substantially equal to a frequency separation of a cavity mode of the cavity such that an output of the cavity generates laser light having a wavelength that tunes as a function of time.

Digitizer for an optical coherence tomography imager

A digitizer and processor device for a swept-source optical coherence tomography (SS-OCT) imaging system, comprising: an input configured to receive an OCT signal; a control input configured to receive a k-clock signal; a combiner unit (130) receiving the OCT signal and the k-clock signal configured to output a composite signal; a digitizing unit (60) arranged to convert the composite signal into a digital composite signal (69); a data processing unit (70) arranged to determine a profile of optical density in a sample that generated the OCT signal based on the digital composite signal (69).

INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS

An interferometer system including: an optical system arranged to split a radiation beam from a laser source into a first beam along a first optical path and a second beam along a second optical path, and recombine the first beam and the second beam to a recombined beam, a detector to receive the recombined beam and to provide a detector signal based on the received recombined beam, and a processing unit, wherein a first optical path length of the first optical path and a second optical path length of the second optical path have an optical path length difference, and wherein the processing unit is arranged to determine a mode hop of the laser source on the basis of a phase shift in the detector signal.

Ophthalmic apparatus

An ophthalmic apparatus may include: a wavelength sweeping light source; a reference optical system; a calibration optical system; a light receiving element configured to receive calibration interference light which is a combination of calibration light and reference light; and a signal processor configured to sample a calibration interference signal outputted from the light receiving element when it receives the calibration interference light. The signal processor may sample the calibration interference light in at least first and second frequency bands, which are different and used for measuring a specific region of a subject eye. The ophthalmic apparatus calculates a difference between first and second waveforms, the first waveform being a waveform of the calibration interference signal that is sampled in the first frequency band and Fourier transformed, the second waveform being a waveform of the calibration interference signal that is sampled in the second frequency band and Fourier transformed.

Spatial accuracy correction method and apparatus
11366448 · 2022-06-21 · ·

A method that corrects an error in positioning in a positioning mechanism by using a measurable length value measured by a laser interferometer and a measured value for spatial coordinates measured by the positioning mechanism. The method includes a measurement step in which a retroreflector affixed to a displacer is displaced to a plurality of measurement points, and the measured length value and the measured value at each of the measurement points is acquired; and a parameter calculation step in which a correction parameter is calculated based on the measured value, the measured length value, and the coordinates of a rotation center of the tracking-type laser interferometer. A first correction constant is applied to the measured length value for each measurement line, and a second correction constant different from the first correction constant is applied to the coordinates of the rotation center of the interferometer for each measurement line.

Spatial accuracy correction method and apparatus
11366448 · 2022-06-21 · ·

A method that corrects an error in positioning in a positioning mechanism by using a measurable length value measured by a laser interferometer and a measured value for spatial coordinates measured by the positioning mechanism. The method includes a measurement step in which a retroreflector affixed to a displacer is displaced to a plurality of measurement points, and the measured length value and the measured value at each of the measurement points is acquired; and a parameter calculation step in which a correction parameter is calculated based on the measured value, the measured length value, and the coordinates of a rotation center of the tracking-type laser interferometer. A first correction constant is applied to the measured length value for each measurement line, and a second correction constant different from the first correction constant is applied to the coordinates of the rotation center of the interferometer for each measurement line.

Spatial accuracy correction method and apparatus
11366447 · 2022-06-21 · ·

A spatial accuracy correction apparatus performs a spatial accuracy correction of a positioner displacing a displacer to a predetermined set of spatial coordinates using a measurable length value measured by an interferometer and a measurable value of the set of spatial coordinates of the displacement body that is measured by the positioner. The measured length value and the measured value for each measurement point are acquired by displacing the displacement body to a plurality of measurement points in order, one or more repeated measurements are conducted for at least one of the plurality of measurement points being measured after conducting measurement of the measured length value and the measured value for each of the plurality of measurement points, and the plurality of points are measured again when a repeat error of the measured length value is equal to or greater than a threshold value.

Method for measuring complex degree of coherence of random optical field by using mutual intensity-intensity correlation

The invention discloses a method for measuring a complex degree of coherence of a random optical field by using a mutual intensity-intensity correlation, including the steps of: building a test optical path; rotating a quarter-wave plate to enable the fast axis of the quarter-wave plate to be consistent with a polarization direction of reference light, to obtain light intensity distribution information of a first combined light; rotating the quarter-wave plate to enable the slow axis of the quarter-wave plate to be consistent with the polarization direction of the reference light, to obtain light intensity distribution information of a second combined light; blocking the reference light to obtain light intensity distribution information of to-be-tested light; blocking the to-be-tested light to obtain light intensity distribution information of the reference light; and calculating the amplitude and phase of a complex degree of coherence of the to-be-tested light.

HETERODYNE PHOTONIC INTEGRATED CIRCUIT FOR ABSOLUTE METROLOGY
20220187055 · 2022-06-16 ·

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.

Microscope with rotating beam system

A microscope comprising a coherent light source producing a coherent light beam, a light beam guide system comprising a beam splitter configured to split the coherent light beam into a reference beam and a sample illumination beam, a sample holder configured to hold a sample to be observed, a sample illumination device configured to direct the sample illumination beam through the sample and into a microscope objective, a beam reuniter configured to reunite the reference beam and sample illumination beam after passage of the sample illumination beam through the sample to be observed, and a light sensing system configured to capture at least phase and intensity values of the coherent light beam downstream of the beam reuniter.