Systems and methods for unwrapping a phase map are disclosed. Such systems and methods may include receiving a wrapped phase map associated with an interferometric measurement of a sample including patterned features; removing a tilt from the wrapped phase map; generating a background; detecting features in the wrapped phase, the features in the wrapped phase map corresponding to least some of the patterned features of the sample; replacing phases of the features with the background at corresponding locations in the wrapped phase map; unwrapping the modified wrapped phase map using a global phase-unwrapping; applying local phase-unwrapping to restore the phases of the features; and reapplying the tilt to generate an output unwrapped phase map.

Systems and methods for measuring a surface topography of a semiconductor chip are disclosed. A disclosed system comprises a light source configured to provide low coherent light to a first beam splitter, a scanner configured to use the low coherent light reflected from the first beam splitter to scan positions on a surface of a semiconductor chip, a second beam splitter configured to receive reflected signals from the positions on the surface of the semiconductor chip, a detector configured to detect interference signals from a first output of the second beam splitter, wherein each of the interference signals corresponds to a respective one of the positions, and a spectrometer configured to detect spectrum signals from a second output of the second beam splitter, wherein each of the spectrum signals corresponds to the respective one of the positions.

The innovation provides for a system and method available to image and visualize the palisades of Vogt via a non-contact process, analyze the image volumes acquired, evaluate the status of the palisades of Vogt from the data represented therein, and display the data in real-time or as a part of a medical record for ongoing consideration and evaluation.

A method for determining thickness of layers of the tear film includes reconstructing a full- or hyper-spectral interference pattern from an imaged multi-spectral pattern. Tear film thickness can then be estimated from the full- or hyper-spectral interference pattern. Using a full- or hyper-spectral interference pattern provides a greater number of frequency sampling points for increased tear film thickness estimation accuracy, without traditional time consuming techniques.

A method performs phase shift interferometry to detect irregularities of a surface of a wafer after the wafer has been placed into an interferometer and while the wafer is vibrating. Additionally, a system and a non-transitory computer-readable storage medium have computer-executable instructions embodied thereon for performing phase shift interferometry to detect irregularities of a surface of a wafer after the wafer has been placed into an interferometer and while the wafer is vibrating.

A method for determining characteristics of a test cavity, the method includes for each of a plurality of optical frequencies within a bandwidth of a tunable laser, measuring interference signals from the test cavity and a reference cavity having a known characteristic. The method includes determining values for the plurality of optical frequencies from the measured interference signals from the reference cavity and the known characteristic of the reference cavity, and determining the characteristic of the test cavity using the determined values of the plurality of optical frequencies.

An optical interrogation system, e.g., an OFDR-based system, measures local changes, of index of refraction of a sensing light guide subjected to a time-varying disturbance. Interferometric measurement signals detected for a length of the sensing light guide are transformed into the spectral domain. A time varying signal is determined from the transformed interferometric measurement data set. A compensating signal is determined from the time varying signal which is used to compensate the interferometric measurement data set for the time-varying disturbance. Further robustness is achieved using averaging and strain compensation. The compensation technique may be applied along the length of the light guide.

A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

A system (1) for generating a signal from a surface (22) having a speed V in a direction U, comprising: a light source (2) emitting a Gaussian light beam along a first optical path (11); a sensor (3) able to evaluate the effects of the electromagnetic interference of the first beam; a means (2′, 4) for generating a second Gaussian light beam along a second optical path (12); a second sensor (3′) able to evaluate the effects of electromagnetic interference of the second beam; a focusing lens (5, 6) located on the first and/or the second optical path (11, 12), focusing the light beam at a distance f and defining an upstream optical path (11′, 12′); and a means (4′, 7) for routing the second beam able to redirect the second path (12′) in the direction of the first path (11′).

A method for obtaining the profile of the outer surface (22) of a medium (21) having a median plane (23) comprising the following steps: obtaining two time signals A and B (1002), for, at each instant, a same geometrical target on a readout line of the outer surface (22); determining at least one Doppler frequency (2001) associated with each time signal A and B; sampling each time signal A and B (2002) at a frequency greater than 2 times the Doppler frequency to obtain a payload signal; determining an envelope (2004) of the payload signal of each signal A and B; performing a relative combination between the envelopes of each signal A and B (3001) to obtain a monotonic and bijective function F; and determining the profile of the outer surface (3002) using a calibration of the function F.