Patent classifications
G01B9/02083
SAMPLE STRUCTURE MEASURING DEVICE AND SAMPLE STRUCTURE MEASURING METHOD
A sample structure measuring device includes a light source, a path splitting portion configured to split light from the light source into light on a measurement path passing through a sample and light on a reference path, an optical path merging portion configured to merge the measurement path and the reference path, a photodetector having pixels and configured to detect incident light from the path merging portion and output phase data of the incident light, and a processor. A first region is a region where the sample is present and a second region is a region where the sample is not present. The processor divides the phase data into the first region and the second region, sets an initial estimated sample structure based on the first region, and optimizes the estimated sample structure using simulated light transmitted through the estimated sample structure and measurement light transmitted through the sample.
AUDIO SYSTEM THAT USES AN OPTICAL MICROPHONE
An audio system including an optical microphone and an audio controller. The optical microphone includes a light source and a detector. In some embodiments, the light source illuminates skin of a user. Alternatively the optical microphone also includes a membrane, and the light source illuminates a portion of the membrane. Sounds from a local area cause vibrations in the skin (or vibrations in the membrane). The detector may be in an interferometric configuration or a non-interferometric configuration with the light source. The audio controller monitors the vibrations of the skin (or membrane) using signal output from the detector, and measures the sounds using the monitored vibrations.
SURFACE SHAPE DETECTION DEVICE AND DETECTION METHOD
A surface shape detection device using differential interference optics achieves restoration error reduction of a surface shape while maintaining resolution. The surface shape detection device includes: a light spot scanning unit such as a wafer rotation direction drive unit that scans a wafer surface with a light spot; an interference light detection mechanism such as a differential interference optical system that detects interference light of light obtained by scanning a surface of an inspection target with a plurality of the light spots separated by a predetermined design distance; and a surface shape restoration processing unit such as a wafer surface shape restoration unit that samples, at a predetermined quantization time interval, and calculates information of the interference light, and performs restoration processing on a surface shape of the wafer, in which the predetermined design distance is larger than a quantization distance interval corresponding to the predetermined quantization time interval.
Optical Coherence Tomography as a rapid, accurate, non-contact method of visualizing the palisades of Vogt
The innovation provides for a system and method available to image and visualize the palisades of Vogt via a non-contact process, analyze the image volumes acquired, evaluate the status of the palisades of Vogt from the data represented therein, and display the data in real-time or as a part of a medical record for ongoing.
Single-beam three-degree-of-freedom homodyne laser interferometer based on array detector
A single-beam three-degree-of-freedom homodyne laser interferometer based on an array detector. A single-frequency laser beam is input to a Michelson interference structure, the measurement beam and the reference beam perform non-coaxial interference and form a single-beam homodyne interference signal by setting the angle of a reference plane mirror, the array detector is selected to effectively receive the single-beam homodyne interference signal, and finally, three-degree-of-freedom signal linear decoupling on the single-beam homodyne interference signal is achieved through a three-degree-of-freedom decoupling method based on Lissajous ellipse fitting. The laser interferometer does is free of angle decoupling nonlinearity, the period nonlinear error is remarkably reduced, compared with other existing three-degree-of-freedom laser interferometers, the laser interferometer has the advantages of being simple in structure, large in angle measurement range and easy to integrate, and the high-precision requirement of the three-degree-of-freedom laser interferometer for displacement and angle measurement is met.
Fast measurement method for micro-nano deep groove structure based on white light interference
A fast measurement method for micro-nano deep groove structure based on white light interference, including: establishing a white light interference system, using the white light interference system to measure the structure of the groove, the CCD camera collects and obtains multiple groups of groove interferograms and the serial number corresponding to each groove interferogram in each group; processing each group of groove interferograms of the groove sample to obtain the maximum contrast of each group of groove interferograms and the 3D reconstruction diagram of the local structure; extracting the interface reconstruction diagram in the 3D reconstruction diagram of the local structure according to each group of the groove interferograms; after splicing the interface reconstruction diagrams corresponding to all groups of groove interferograms, obtaining a 3D structural reconstruction diagram of the groove sample, and measuring the depth and width of the groove sample according to the 3D structural reconstruction diagram.
Laser interferometer
A laser interferometer includes a light source that emits first laser light, an optical modulator that includes a vibrator and modulates the first laser light by using the vibrator to generate second laser light including a modulated signal, a photodetector that receives interference light between third laser light including a sample signal generated by reflecting the first laser light on an object and the second laser light to output a light reception signal, a demodulation circuit that demodulates the sample signal from the light reception signal based on a reference signal, and an oscillation circuit that outputs the reference signal to the demodulation circuit, and the vibrator is a signal source of the oscillation circuit.
Methods and systems for coherent imaging and feedback control for modification of materials
Methods and systems are provided for using optical interferometry in the context of material modification processes such as surgical laser, sintering, and welding applications. An imaging optical source that produces imaging light. A feedback controller controls at least one processing parameter of the material modification process based on an interferometry output generated using the imaging light. A method of processing interferograms is provided based on homodyne filtering. A method of generating a record of a material modification process using an interferometry output is provided.
Reconfigurable Optical Sensing Apparatus and Method Thereof
Systems, apparatuses, and methods for improved reconfigurable optical sensing are provided. For instance, an example optical sensing apparatus can include a photodetector array including a plurality of photodetectors. The optical sensing apparatus can include circuitry or one or more processing devices configured to receive one or more electrical signals representing an optical signal received by a first subset of the plurality of photodetectors; determine, based on the one or more electrical signals, a region of interest in the photodetector array for optical measurements; and deactivate, based on the region of interest, a second subset of the plurality of photodetectors of the photodetector array.
THREE-DIMENSIONAL MEASUREMENT DEVICE
A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.