Disclosed is a non-contact optical measurement device for detecting or measuring different geometric workpiece features based on configurable light-propagation paths of light emitted from a light source and reflected by a workpiece surface for incidence upon a spectral sensor. The light-propagation paths are configurable based on which optical probe is attached to a rotation stage that rotates the probe about an optical axis and in a collimated region.

An inspection system is provided for the inspection of a lateral surface of a three-dimensional test object. The inspection system includes a conveying structure; (ii) a facet mirror; and (iii) an optical inspection device. In this context, the inspection system is arranged to rotate the conveying structure and the facet mirror in a coordinated manner and in opposite directions of rotation in such a way that each of a plurality of object carriers, as they pass through an inspection area, is imaged onto the inspection device by exactly one of the facets of the facet mirror. A corresponding method for inspection is also provided.

An inspection system is provided for the inspection of a lateral surface of a three-dimensional test object. The inspection system includes a conveying structure; (ii) a facet mirror; and (iii) an optical inspection device. In this context, the inspection system is arranged to rotate the conveying structure and the facet mirror in a coordinated manner and in opposite directions of rotation in such a way that each of a plurality of object carriers, as they pass through an inspection area, is imaged onto the inspection device by exactly one of the facets of the facet mirror. A corresponding method for inspection is also provided.

A 3-D imaging system including a computer determining a plurality of coherence factors measuring an intensity contrast between a first intensity of a first region of an interference comprising constructive interference between a sample wavefront and a reference wavefront, and a second intensity of a second region of the interference comprising destructive interference between the sample wavefront and the reference wavefront, wherein the interference between a reference wavefront and a reflection from different locations on a surface of an object. From the coherence factors, the computer determines height data comprising heights of the surface with respect to an x-y plane perpendicular to the heights and as a function of the locations in the x-y plane. The height data is useful for generating a three dimensional topological image of the surface.

A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including: measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards the optical element to pass through the plurality of interfaces, and to detect an interference signal resulting from interferences between the measured measurement beam reflected by the interface and a reference beam; positioning apparatus configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured; digital processor for producing, based on the interference signal, an item of shape information of the interface to be measured according to a field of view.

A measurement method, for measuring the shape of an interface of an optical element having a plurality of interfaces is also provided.

A measurement device, for measuring the shape of an interface to be measured of an optical element having a plurality of interfaces, the device including: measurement apparatus with at least one interferometric sensor illuminated by a low-coherence source, for directing a measurement beam towards the optical element to pass through the plurality of interfaces, and to detect an interference signal resulting from interferences between the measured measurement beam reflected by the interface and a reference beam; positioning apparatus configured for relative positioning of a coherence area of the interferometric sensor at the level of the interface to be measured; digital processor for producing, based on the interference signal, an item of shape information of the interface to be measured according to a field of view.

A measurement method, for measuring the shape of an interface of an optical element having a plurality of interfaces is also provided.

A system includes a first optical unit that emits light to a measurement target object and receives first interference light incident from the measurement target object, a second optical unit that emits the light to a reference object configured to have a constant optical path length with respect to a temperature fluctuation and receives second interference light incident from the reference object, a spectroscope connected to the first optical unit and the second optical unit and receives the first interference light and the second interference light to be incident, and a control unit connected to the spectroscope, and the control unit calculates a fluctuation rate of a measurement optical path length with respect to a reference optical path length under a predetermined temperature environment on the basis of the optical path length of the reference object calculated on the basis of the second interference light incident on the spectroscope under the predetermined temperature environment, and the reference optical path length of the reference object acquired in advance, and corrects, on the basis of the fluctuation rate, the optical path length of the measurement target object calculated on the basis of the first interference light incident on the spectroscope under the predetermined temperature environment.

Apparatus include a polarization state generator situated to provide an interferometer source beam with a region of polarized source light with a polarization state that is in-plane as subsequently incident on a sample and a region of polarized source light with a polarization state that is perpendicular to in-plane as subsequently incident on the sample, and an interferometer unit configured to split the interferometer source beam into test and reference arm beams, to direct the test arm beam to the sample and the reference arm beam to a reference surface, and to recombine the test and reference arm beams to produce an interferometer output beam. Methods use a polarization state generator to produce an interferometer source beam with a region of polarized source light with a polarization state that is in-plane as subsequently incident on a sample and a region of polarized source light with a polarization state that is perpendicular to in-plane as subsequently incident on the sample, and use an interferometer unit which splits the interferometer source beam into test and reference arm beams, directs the test arm beam to the sample and the reference arm beam to a reference surface, and recombines the test and reference arm beams to produce an interferometer output beam.

A white light interferometric fiber-optic gyroscope based on a rhombic optical path difference bias structure includes a laser, a rhombic optical path difference bias structure, a fiber coil and a photodetector. The white light interferometric fiber-optic gyroscope adopts an all-fiber structure to simplify the complexity of a gyroscope system and reduce the overall cost. A white light interferometric demodulation algorithm is used to realize linear output of rotation rate signals.

A white light interferometric fiber-optic gyroscope based on a rhombic optical path difference bias structure includes a laser, a rhombic optical path difference bias structure, a fiber coil and a photodetector. The white light interferometric fiber-optic gyroscope adopts an all-fiber structure to simplify the complexity of a gyroscope system and reduce the overall cost. A white light interferometric demodulation algorithm is used to realize linear output of rotation rate signals.