A pixelated color mask is combined with a pixelated polarization mask in dynamic interferometry. The color mask includes a wavelength-selective bandpass filter placed in front of each camera pixel such that each set of contiguous four camera pixels is covered by two green bandpass filters, a red bandpass filter, and a blue bandpass filter. The pixelated phase mask is coupled to the color filters such that one polarization filter covers one set of color filters. At least three polarization filters are used to calculate phase. In addition, the color signals can be used, for example, to encode the motion of the interferometer, to provide very high speed autofocus or tip/tilt feedback, to create a color image of the object being measured, to automatically focus the system at different positions for different measurements conducted with different color sources, and to perform heterodyne interferometry with a single, vibration-immune measurement.

A pixelated color mask is combined with a pixelated polarization mask in dynamic interferometry. The color mask includes a wavelength-selective bandpass filter placed in front of each camera pixel such that each set of contiguous four camera pixels is covered by two green bandpass filters, a red bandpass filter, and a blue bandpass filter. The pixelated phase mask is coupled to the color filters such that one polarization filter covers one set of color filters. At least three polarization filters are used to calculate phase. In addition, the color signals can be used, for example, to encode the motion of the interferometer, to provide very high speed autofocus or tip/tilt feedback, to create a color image of the object being measured, to automatically focus the system at different positions for different measurements conducted with different color sources, and to perform heterodyne interferometry with a single, vibration-immune measurement.

According to one embodiment, a three-dimensional (3D) measuring device is provided. The 3D measuring device includes a processor system that is configured to generate a point cloud representing multiple surfaces. The point cloud includes multiple scan points. Generating the point cloud includes receiving spherical coordinates for a scan point, the spherical coordinates comprising a distance (r), a polar angle (θ), and an azimuth angle (φ). Generating the point cloud further includes homogenizing a scan point density of the surfaces by filtering the scan points. The homogenizing includes computing a value (p) for the scan point based on the spherical coordinates. Based on the value exceeding a predetermined threshold, storing the scan point as part of the point cloud, and based on the value not exceeding the predetermined threshold, discarding the scan point.

According to one embodiment, a three-dimensional (3D) measuring device is provided. The 3D measuring device includes a processor system that is configured to generate a point cloud representing multiple surfaces. The point cloud includes multiple scan points. Generating the point cloud includes receiving spherical coordinates for a scan point, the spherical coordinates comprising a distance (r), a polar angle (θ), and an azimuth angle (φ). Generating the point cloud further includes homogenizing a scan point density of the surfaces by filtering the scan points. The homogenizing includes computing a value (p) for the scan point based on the spherical coordinates. Based on the value exceeding a predetermined threshold, storing the scan point as part of the point cloud, and based on the value not exceeding the predetermined threshold, discarding the scan point.

An integrated fiber interferometry interrogator for generating superimposed waves is disclosed. The system is optimized for efficiency and vibration attenuation. The system comprises an optical light source for generating a first signal, a first signal splitter which splits the first signal into a reference signal and an interrogation signal, optical modulators for modulating the signals, a fiber coupler connected to a fiber under test, an isolator, a circulator with a plurality of connections for directing the signals, a signal mixer for mixing the signals into superimposed waves, and photo diodes for receiving the superimposed waves.

A fast measurement method for micro-nano deep groove structure based on white light interference, including: establishing a white light interference system, using the white light interference system to measure the structure of the groove, the CCD camera collects and obtains multiple groups of groove interferograms and the serial number corresponding to each groove interferogram in each group; processing each group of groove interferograms of the groove sample to obtain the maximum contrast of each group of groove interferograms and the 3D reconstruction diagram of the local structure; extracting the interface reconstruction diagram in the 3D reconstruction diagram of the local structure according to each group of the groove interferograms; after splicing the interface reconstruction diagrams corresponding to all groups of groove interferograms, obtaining a 3D structural reconstruction diagram of the groove sample, and measuring the depth and width of the groove sample according to the 3D structural reconstruction diagram.

A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.

A height detection apparatus successively changes the brightness of white light from a first level to a second level in accordance with a position of a Z stage and captures an image of interference light while moving a two-beam interference objective lens relative to a paste film in an optical axis direction, detects, as a focus position, a position of the Z stage where the intensity of interference light is highest in a period during which the brightness of white light is set to the first or second level, for each pixel of the captured image, and obtains the height of the paste film based on a detection result.

A method for measuring interfaces of an optical element, forming part of a plurality of similar elements including at least one reference optical element, the method implemented by a device, the method including: relative positioning of each reference optical element and the measurement beam, to allow a measurement of interfaces of each reference optical element; acquisition of a reference image, of each reference element; positioning of the measured optical element to allow acquisition of a measurement image, of the optical element to be measured; determining a difference of position in a field of view of the measured element with respect to each reference optical element, based on the reference and measurement images; adjusting the position of the measured optical element in the field of view to cancel the difference of position; and measuring the interfaces of the measured optical element by the measurement beam.

A method for measuring interfaces of an optical element, forming part of a plurality of similar elements including at least one reference optical element, the method implemented by a device, the method including: relative positioning of each reference optical element and the measurement beam, to allow a measurement of interfaces of each reference optical element; acquisition of a reference image, of each reference element; positioning of the measured optical element to allow acquisition of a measurement image, of the optical element to be measured; determining a difference of position in a field of view of the measured element with respect to each reference optical element, based on the reference and measurement images; adjusting the position of the measured optical element in the field of view to cancel the difference of position; and measuring the interfaces of the measured optical element by the measurement beam.