G01B9/021

Methods and systems of holographic interferometry
11719531 · 2023-08-08 · ·

A holographic interferometer, comprising: an imaging device capturing an interference pattern created by at least two polarized light beams; a structured phase retardation element located in an optical path of at least one polarized light beam of the at least two polarized light beams; and a polarizer located between the imaging device and the structured phase retardation element, the polarizer projects each polarization of each of the at least two polarized light beams on a single axis to create the interference pattern on the imaging device.

Methods and systems of holographic interferometry
11719531 · 2023-08-08 · ·

A holographic interferometer, comprising: an imaging device capturing an interference pattern created by at least two polarized light beams; a structured phase retardation element located in an optical path of at least one polarized light beam of the at least two polarized light beams; and a polarizer located between the imaging device and the structured phase retardation element, the polarizer projects each polarization of each of the at least two polarized light beams on a single axis to create the interference pattern on the imaging device.

Method for generating three-dimensional shape information of object to be measured, defect detection method, and defect detection device

A method of generating three-dimensional (3D) shape information of an object to be measured from an image including intensity information of an object hologram generated by interference between a reference light reflected from an optical mirror and an object light affected by the object includes checking at least one frequency component included in the image and extracting real image components corresponding to a real image from the frequency component. The method also includes generating a correction light and a real image hologram based on the real image components, generating an intermediate hologram based on the correction light, and generating curvature aberration correction information from the intermediate hologram. The method further includes generating a correction hologram based on the curvature aberration correction information and generating the 3D shape information of the object from the correction hologram.

Method And Device For Measuring Apex Radius Of Optical Element Based On Computer-Generated Hologram
20210364278 · 2021-11-25 ·

The disclosure relates to a measuring method and a measuring device for measuring a radius of an optical element based on a computer-generated hologram, and belongs to the field of photoelectric technology detection. The present disclosure is characterized in that two conjugated wave surfaces, i.e. a confocal wavefront and a cat's eye wavefront, are simultaneously generated by one piece of computer-generated hologram, and at the same time, interferograms at the cat's eye position and at the confocal position are obtained and surface shape parameters are measured, and the radius of an optical element is solved according to the measurement result.

SYSTEMS AND METHODS FOR MEASUREMENT OF OPTICAL WAVEFRONTS
20210361159 · 2021-11-25 ·

An analytic tool for supporting alignment of an optical component in preparation for an interferometric test and performance of such a test. Apparatus and methods involve employment of the datum features on the optical component and/or metrology frame supporting such component. The metrology frame may include a secondary set of holograms (provided for use with a conventional system already employing a primary hologram that forms the testing optical wavefront). The conventional primary hologram is preferably substituted with a set of primary holograms (contained in the same, unitary or spatially-complementary housing sets) that perform different but complementary functions and that facilitate the alignment of the metrology frame with or without the tested optical component.

SYSTEMS AND METHODS FOR MEASUREMENT OF OPTICAL WAVEFRONTS
20210361159 · 2021-11-25 ·

An analytic tool for supporting alignment of an optical component in preparation for an interferometric test and performance of such a test. Apparatus and methods involve employment of the datum features on the optical component and/or metrology frame supporting such component. The metrology frame may include a secondary set of holograms (provided for use with a conventional system already employing a primary hologram that forms the testing optical wavefront). The conventional primary hologram is preferably substituted with a set of primary holograms (contained in the same, unitary or spatially-complementary housing sets) that perform different but complementary functions and that facilitate the alignment of the metrology frame with or without the tested optical component.

METHODS AND SYSTEMS OF HOLOGRAPHIC INTERFEROMETRY
20220018649 · 2022-01-20 · ·

A holographic interferometer, comprising: an imaging device capturing an interference pattern created by at least two polarized light beams; a structured phase retardation element located in an optical path of at least one polarized light beam of the at least two polarized light beams; and a polarizer located between the imaging device and the structured phase retardation element, the polarizer projects each polarization of each of the at least two polarized light beams on a single axis to create the interference pattern on the imaging device.

METHODS AND SYSTEMS OF HOLOGRAPHIC INTERFEROMETRY
20220018649 · 2022-01-20 · ·

A holographic interferometer, comprising: an imaging device capturing an interference pattern created by at least two polarized light beams; a structured phase retardation element located in an optical path of at least one polarized light beam of the at least two polarized light beams; and a polarizer located between the imaging device and the structured phase retardation element, the polarizer projects each polarization of each of the at least two polarized light beams on a single axis to create the interference pattern on the imaging device.

GEOMETRIC PHASE IN-LINE SCANNING HOLOGRAPHY SYSTEM FOR TRANSMISSIVE OBJECT
20230297027 · 2023-09-21 · ·

A geometric phase in-line scanning holography system for a transmissive object, includes: a polarization sensitive lens, which receives a linear polarization beam to generate a first spherical wave of right-sided circularly polarized light and a second spherical wave of left-sided circularly polarized light; a scan means for scanning the transmissive object by using an interference beam generated between the generated first and second spherical waves; a first beam splitter, which receives a beam having been transmitted through the transmissive object, so as to split the received beam into first and second output beams; first and second polarizers for polarizing the first and second output beams, respectively; and first and second photodetectors for detecting output beams having passed through the first and second polarizers.

GEOMETRIC PHASE IN-LINE SCANNING HOLOGRAPHY SYSTEM FOR TRANSMISSIVE OBJECT
20230297027 · 2023-09-21 · ·

A geometric phase in-line scanning holography system for a transmissive object, includes: a polarization sensitive lens, which receives a linear polarization beam to generate a first spherical wave of right-sided circularly polarized light and a second spherical wave of left-sided circularly polarized light; a scan means for scanning the transmissive object by using an interference beam generated between the generated first and second spherical waves; a first beam splitter, which receives a beam having been transmitted through the transmissive object, so as to split the received beam into first and second output beams; first and second polarizers for polarizing the first and second output beams, respectively; and first and second photodetectors for detecting output beams having passed through the first and second polarizers.