A method of measuring a surface of an optical element and an interferometric measuring device for measuring a surface or profile of the optical element. The optical element having a first surface and a second surface opposite the first surface. The method includes defining at least a first measurement point, a second measurement point and a third measurement point on a measurement surface of the optical element being one of the first surface and the second surface, measuring a first position of the first measurement point by directing a measurement beam from a measurement head onto the first measurement point and by detecting a measurement beam portion reflected at the first measurement point, subsequently measuring at least a second position of the second measurement point and a third position of the third measurement point by directing the measurement beam onto the second measurement point and onto the third measurement point and by detecting a measurement beam portion reflected at the second measurement point and the third measurement point, respectively, and determining at least one of a decenter and a tilt of the measurement surface relative to a reference axis on the basis of at least the first position, the second position and the third position.

An illuminated sensor target includes a light source. Actuating the light source illuminates the sensor target. The illuminated sensor target is recognized by one or more sensors of a vehicle during a calibration process, and is used to calibrate the one or more sensors of the vehicle during the calibration process. The illuminated sensor target is illuminated during at least part of the calibration process, which may involve rotation of the vehicle about a turntable, with the illuminated sensor target positioned within a range of the turntable along with other sensors targets, which may also be illuminated.

A method including: determining recipe consistencies between one substrate measurement recipe of a plurality of substrate measurement recipes and each other substrate measurement recipe of the plurality of substrate measurement recipes; calculating a function of the recipe consistencies; eliminating the one substrate measurement recipe from the plurality of substrate measurement recipes if the function meets a criterion; and reiterating the determining, calculating and eliminating until a termination condition is met. Also disclosed herein is a substrate measurement apparatus, including a storage configured to store a plurality of substrate measurement recipes, and a processor configured to select one or more substrate measurement recipes from the plurality of substrate measurement recipes based on recipe consistencies among the plurality of substrate measurement recipes.

A device and a method for aligning substrates. The method includes the steps of detecting alignment marks and aligning substrates with respect to one another in dependence on the detection of the alignment marks. At least two alignment marks are arranged parallel to a direction of a linear movement of the substrates, wherein the alignment of the substrates takes place along a single alignment axis, the alignment axis running parallel to the loading and unloading direction of the substrates.

Aspects for active alignment for assembling optical imaging systems are described herein. As an example, the aspects may include aligning an optical detector with an optical component. The optical component is configured to alter a direction of one or more light beams emitted from an image displayed by an optical engine. The aspects may further include detecting, by the optical detector, a virtual image generated by the one or more light beams emitted by the optical engine; and adjusting, by a multi-axis controller, an optical path of the one or more light beams based on one or more parameters of the virtual image collected by the optical detector.

A target alignment system for calibrating a safety sensor mounted on a vehicle with front and rear wheels by locating an optimum target position upon a horizontal surface for accurate calibration of the sensor. The target alignment system comprises a plurality of visual guide projectors and a pair of target assemblies which project a visible guide line perimeter around the vehicle, the perimeter including parallel longitudinal lines on either side of the vehicle, a lateral alignment guide line crossing the longitudinal lines in front of the vehicle, and a center guide line colinear with the vehicle center line. The front and rear wheels of the vehicle are longitudinally aligned causing the vehicle thrust line to match the vehicle center line. One of the visual guide projectors projects a transverse line across the center guide line, creating an intersection point which marks the optimum target position.

A target alignment system for calibrating a safety sensor mounted on a vehicle with front and rear wheels by locating an optimum target position upon a horizontal surface for accurate calibration of the sensor. The target alignment system comprises a plurality of visual guide projectors and a pair of target assemblies which project a visible guide line perimeter around the vehicle, the perimeter including parallel longitudinal lines on either side of the vehicle, a lateral alignment guide line crossing the longitudinal lines in front of the vehicle, and a center guide line colinear with the vehicle center line. The front and rear wheels of the vehicle are longitudinally aligned causing the vehicle thrust line to match the vehicle center line. One of the visual guide projectors projects a transverse line across the center guide line, creating an intersection point which marks the optimum target position.

A metrology system includes a radiation source, first, second, and third optical systems, and a processor. The first optical system splits the radiation into first and second beams of radiation and impart one or more phase differences between the first and second beams. The second optical system directs the first and second beams toward a target structure to produce first and second scattered beams of radiation. The third optical system interferes the first and second scattered beams at an imaging detector. The imaging detector generates a detection signal based on the interfered first and second scattered beams. The metrology system modulates one or more phase differences of the first and second scattered beams based on the imparted one or more phase differences. The processor analyzes the detection signal to determine a property of the target structure based on at least the modulated one or more phase differences.

A dynamic misregistration measurement amelioration method including taking at least one misregistration measurement at multiple sites on a first semiconductor device wafer, which is selected from a batch of semiconductor device wafers intended to be identical, analyzing each of the misregistration measurements, using data from the analysis of each of the misregistration measurements to determine ameliorated misregistration measurement parameters at each one of the multiple sites, thereafter ameliorating misregistration metrology tool setup for ameliorated misregistration measurement at the each one of the multiple sites, thereby generating an ameliorated misregistration metrology tool setup and thereafter measuring misregistration at multiple sites on a second semiconductor device wafer, which is selected from the batch of semiconductor device wafers intended to be identical, using the ameliorated misregistration metrology tool setup.

A support structure having a vertical element supporting a set of cameras associated with a vehicle measurement or inspection system together with at least one target structure required for realignment or recalibration of onboard vehicle safety system sensors. A camera crossbeam carried by the support structure locates the set of cameras as required to view a vehicle undergoing measurement or inspection. The target structure is affixed to the vertical element of the support structure, at an elevation suitable for observation by at least one vehicle onboard sensors during a realignment or recalibration procedure. A set of rollers facilitates positioning of the target structure on a supporting floor surface during a realignment or recalibration procedure.