An optical system comprising: a light source; a photodetector; a first light-receiving system for causing the photodetector to receive first reflected light with a first angle of reflection from a surface; and a second light-receiving system for causing the photodetector to receive second reflected light with a second angle of reflection, different from the first angle of reflection, from the surface is provided. Here, a first light-receiving area of the photodetector with respect to light, of reflected light from the surface, via the first light-receiving system is spaced apart from a second light-receiving area of the photodetector with respect to light, of the reflected light from the surface, via the second light-receiving system.

A device for measuring at least one surface portion of an object has a holder on which a reference body and a distance measuring device are arranged. The distance measuring device is pivotally mounted on the holder relative to a first axis and relative to a second axis. The distance measuring device is operable to determine a distance from a first point located on the surface portion of the object and a second distance from a second point located on the reference body.

A tool for detecting deformation of a nominally straight element includes a first body element having first straight edge, means for biasing the first straight edge against the straight element, and a light source arranged to illuminate any space present between the straight element and the first straight edge of the first body element.

The invention relates to achieve a rapid, reproducible and reliable characterization of the quality of ply-by-ply machining of multilayer materials. This method for inspecting ply-by-ply machining of a part (10) made of multilayer composite material under repair by machining a ply-by-ply staggered or continuously sloped cut out in a stack of plies of various successive orientations includes taking images (IA to ID), under lighting of different orientations (12), of a surface area (10a) of the machined part (10) to be inspected; performing an analysis by comparing the images (IA to ID) pixel by pixel (P0) in order to define the orientation of each pixel (P0) as corresponding to that of the image in which this pixel has a higher brightness; if the pixel has a similar brightness in all the images (IA à ID), this pixel (Pr) is attributed to a resin; constructing a map (5) in units of ply of the surface area to be inspected (10a) by applying the preceding analysis to all of the pixels; estimating a machining quality level from the map (5) produced, and archiving (2m) each map (5) thus produced as a machining result.

The invention relates to a method and arrangement for detecting free fiber ends in a paper surface. The method comprises illuminating a target sample (6) surface, which comprises free fiber ends, from at least two directions one at the time, with at least one light source (1). Original reflectance images are obtained for the target sample (6) surface with an imaging device (4), and a surface normal is estimated for each image pixel of the original reflectance image. Thus it is possible to reconstruct a reconstructed reflectance image from the estimated surface normals, and to compare the reconstructed reflectance image and the corresponding original reflectance image and to construct a difference image, where the differences represent shadow objects of the free fiber ends in a paper surface.

A texture evaluation apparatus includes a projector, an imager, and an evaluator. The projector is configured to project a two-dimensional pattern having an edge element onto an object. The imager is configured to capture an image of a surface of the object. The evaluator is configured to calculate an amount of shape change of a virtual image of the two-dimensional pattern in the image, and evaluate texture of the object based on the amount of shape change and sensory evaluation information obtained in advance.

Disclosed is a metrology apparatus and method for measuring a structure formed on a substrate by a lithographic process. The metrology apparatus comprises an illumination system operable to provide measurement radiation comprising a plurality of wavelengths; and a hyperspectral imager operable to obtain a hyperspectral representation of a measurement scene comprising the structure, or a part thereof, from scattered measurement radiation subsequent to the measurement radiation being scattered by the structure.

An optical measurement device includes a light pulse source, a light separator unit, a wave synthesizer unit, an optical detection unit, and a measurement unit. The light pulse source outputs a plurality of light pulses having different temporal waveforms and different center wavelengths. The light separator unit spatially separates the light pulses and causes the light pulses to be incident on a measurement object. The wave synthesizer unit synthesizes the light pulses reflected by the measurement object or transmitted through the measurement object and emits the synthesized light pulses onto one optical path. The optical detection unit receives the light pulses emitted from the wave synthesizer unit and outputs a temporal waveform signal of the light pulses. The measurement unit measures timings when the light pulses each are received by the optical detection unit or a difference between the timings on a basis of the temporal waveform signal.

An apparatus to detect the topology of a workpiece including surface variations and flaws according to images from several viewpoints includes a frame, a loading member, a robot, an image capturing mechanism, and a controller. The loading member is positioned on the frame and loads a workpiece. The controller controls the robot to drive the image capturing mechanism to move or rotate to different preset positions from each of which the image capturing mechanism can capture images of the workpiece and transmit the images to the controller. The controller further processes the images to obtain an assessment of the components and surface of the workpiece for further processing.

A device for inspecting a surface of an object, in particular a reflective or transparent surface, including an illuminating apparatus with which the surface can be illuminated, a measuring apparatus which senses light reflected at the surface, and a vapor-application apparatus which is designed to apply vapor to the surface. To achieve an efficient application of vapor, it is provided that the vapor-application apparatus includes a nozzle, a vaporization chamber having an enclosure, and a heating apparatus. The nozzle protrudes into the vaporization chamber in order to introduce a liquid into the vaporization chamber, and the vaporization chamber includes a vapor outlet.