A method for evaluating measurement data from a measurement of a plurality of workpieces includes obtaining a set of measurement data. Each workpiece has an associated set of measurement data. The set of measurement data corresponds to measurement points of the workpieces. The set of measurement data has, for each measurement point of the workpieces, at least one measured coordinate and/or, for each measured coordinate, a divergence from a comparison coordinate. The method includes determining a measure of the correlation of the measured coordinates and/or of the divergences is determined for a plurality of the sets of measurement data, in each case in relation to a pair of measurement points that consists of two measurement points of the workpieces.

A method for evaluating measurement data from a measurement of a plurality of workpieces includes obtaining a set of measurement data. Each workpiece has an associated set of measurement data. The set of measurement data corresponds to measurement points of the workpieces. The set of measurement data has, for each measurement point of the workpieces, at least one measured coordinate and/or, for each measured coordinate, a divergence from a comparison coordinate. The method includes determining a measure of the correlation of the measured coordinates and/or of the divergences is determined for a plurality of the sets of measurement data, in each case in relation to a pair of measurement points that consists of two measurement points of the workpieces.

Apparatus (1) for checking the dimensions and/or shape of a complex-shaped body (3), comprising a checking support (5) on which the body to be checked is positioned, a robotic system (8) with an optical assembly (17) and a memory unit (19) for storing reference data relating to a reference shape of the body. A processing and control unit (18) controls movements of the optical assembly so as to obtain dimensional values relating to the body at predetermined measuring points, these dimensional values then being compared with the reference data stored in the memory unit. The apparatus further comprises reference elements (35) defined in the checking support in predetermined positions and a distance sensor (17) for acquiring actual positions of said reference elements. Local compensation parameters for correcting positioning errors of the robotic system are calculated for each of the reference elements on the basis of the predetermined positions and the actual positions acquired. A method for checking the dimensions and/or shape of a complex-shaped body by using the above described apparatus includes a calibration phase of the robotic system to calculate the local compensation parameters, a phase for collecting the reference data related to the predetermined measuring points and a dimensional checking phase of the body. The reference data collecting phase and the dimensional checking phase take into consideration the local compensation parameters.

Apparatus (1) for checking the dimensions and/or shape of a complex-shaped body (3), comprising a checking support (5) on which the body to be checked is positioned, a robotic system (8) with an optical assembly (17) and a memory unit (19) for storing reference data relating to a reference shape of the body. A processing and control unit (18) controls movements of the optical assembly so as to obtain dimensional values relating to the body at predetermined measuring points, these dimensional values then being compared with the reference data stored in the memory unit. The apparatus further comprises reference elements (35) defined in the checking support in predetermined positions and a distance sensor (17) for acquiring actual positions of said reference elements. Local compensation parameters for correcting positioning errors of the robotic system are calculated for each of the reference elements on the basis of the predetermined positions and the actual positions acquired. A method for checking the dimensions and/or shape of a complex-shaped body by using the above described apparatus includes a calibration phase of the robotic system to calculate the local compensation parameters, a phase for collecting the reference data related to the predetermined measuring points and a dimensional checking phase of the body. The reference data collecting phase and the dimensional checking phase take into consideration the local compensation parameters.

There is provided a test indicator 100 capable of replacing a stylus 210 with another stylus 210 having a different length to increase a reaching range of the stylus 210, and of increasing a rotation angle of the stylus 210 to display an accurate measurement value in a wide measurement range.

A calculation unit 400 of the test indicator 100 includes a stylus-length storage unit 420 that sets and stores a length of the stylus 210, and a stylus-length correction calculation unit 400 that changes, according to the length of the stylus 210, a conversion ratio for converting a detection value by an encoder 340 into a measurement value to correct the measurement value. The calculation unit 400 further includes a rotation-angle calculation unit 410 that calculates a rotation angle αs[rad] of the stylus 210 based on the detection value by the encoder 340 and an arc-chord error correction calculation unit 400 that multiplies a sine value using the rotation angle αs calculated by the rotation-angle calculation unit 410 as an argument to correct the measurement value.

An uncertainty estimation method including: acquiring first variable values, which are a plurality of variable values included in a function indicating a relationship between a measurement dimension and a maximum permissible length measurement error when a predetermined measurement condition value of a coordinate measuring machine is a first value, and second variable values, which are the plurality of variable values occurring when the measurement condition value is a second value; calculating a maximum permissible length measurement error corresponding to a third value by calculating the variable values occurring when the measurement condition value is the third value on the basis of the plurality of first variable values and the plurality of second variable values; and estimating the measurement uncertainty of the coordinate measuring machine on the basis of the calculated maximum permissible length measurement error.

A cross laser calibration device used to calibrate a tool center point is provided. The calibration device includes a coordinate orifice plate, a set of cross laser sensors and a rotational and translational movement mechanism. The coordinate orifice plate has an orifice center point. The set of cross laser sensors is arranged on the coordinate orifice plate to generate cross laser lines intersecting at the orifice center point. The set of cross laser sensors is driven by the second motor to rotate around the center point of the second motor, wherein the orifice center point has an off-axis setting relative to the center point of the second motor.

According to one implementation, a feeding device of a hole inspection device having a probe includes an attaching jig, a movement mechanism, and a positioning jig. The probe is inserted into a hole to be inspected of an object in a central axis direction of the hole, for inspecting the hole. The attaching jig attaches the hole inspection device to the feeding device. The movement mechanism linearly reciprocates the hole inspection device together with the attaching jig. The positioning jig positions the movement mechanism to the object. A moving direction of the attaching jig and the hole inspection device is made parallel to the central axis direction of the hole by positioning the movement mechanism.

The invention discloses a toric mirror surface shape measurement method. The measurement method is as follows: first, according to the parameter information of the toric mirror to be measured, using three-dimensional modeling software, establish a CAD model of the toric mirror to be measured and then import the CAD model into the three-coordinate machine software, based on the three-coordinate machine to measure and construct the geometric characteristics of the solid toric mirror, establish the workpiece coordinate system, which is consistent with the CAD model coordinate system. Finally, use the three-coordinate machine to perform scanning measurements to the solid toric mirror and compare the scanning result with the theoretical value to obtain the measurement result data. The measurement method of the present invention is based on the three-coordinate measurement technology and has the advantages of strong operability and high measurement accuracy.

A system and method for generating an angular calibration factor (ACF) for a metrology tool useful in a fabrication process, the method including providing the metrology tool, the metrology tool including a stage and a housing, measuring a rotational orientation of the stage relative to the housing and generating the ACF for the stage based at least partially on the rotational orientation.