A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.

An optomechanical device for producing and detecting optical signals comprising a proof mass assembly, one or more laser devices, and a circuit. The one or more laser devices are configured to generate a first optical signal and a second optical signal. The circuit is configured to modulate, with an electro-optic modulator (EOM), the second optical signal, output the first optical signal and the second optical signal to the proof mass assembly, generate a filtered optical signal corresponding to a response by the proof mass assembly to the first optical signal without the second optical signal, and generate an electrical signal based on the filtered optical signal, wherein the EOM modulates the second optical signal based on the electrical signal.

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

Piezoresistive detection resonant device comprising a substrate, a mobile par configured to move with respect the substrate, suspension elements suspending the mobile part to the substrate, a piezoresistive detection device to detect the motions of the mobile part, said piezoresistive detection device comprising at least one strain gauge, wherein the piezoresistive detection resonant device also comprises a folded spring with at least two spring arms, connected to the mobile part and configured to be deformed by the motion of the mobile part, the at least one gauge being suspended between the substrate and the folded spring in such manner that the deformation of the gauge is reduced compared to the motion of the mobile part.

In a piezoelectric body of a sensor element, two first arms extend alongside each other from a base part to a +y side. Two second arms extend alongside each other from the base part to a −y side. A holding part extends between the two second arms from the base part to the −y side and extends out beyond front ends of the two second arms to the −y side. A mounting part on which a plurality of element terminals are located is connected to an end part of the holding part on the −y side. The holding part includes a main portion and a connection portion. Where the length in an x-direction is the width, the main portion extends from a position between the front ends of the two second arms to a side where the base part is located, while maintaining a width not less than a width of a portion located between the front ends of the two second arms. The connection portion which is connected to the main portion and the base part and is broader in width than the main portion.

In a piezoelectric body of a sensor element, a pair of driving arms extend alongside each other from a base part to a +y side in a y-direction. A pair of detecting arms extend alongside each other from the base part to a −y side in the y-direction. A holding part extends between the pair of detecting arms from the base part to the −y side and extends out beyond front ends of the pair of detecting arms to the −y side. A mounting part is connected to an end part of the holding part on the −y side and includes a detection side extending portion and two lateral side extending portions. The detection side extending portion extends from a position connected with the holding part to a +x side and −x side. The two lateral side extending portions extend toward the +y side from positions on the +x side and −x side other than both of the two detecting arms. At least one of the plurality of element terminals is located beyond the detection side extending portion on the further +y side.

In a piezoelectric body of a sensor element, a pair of driving arms extend alongside each other from a base part to a +y side in a y-direction. A pair of detecting arms extend alongside each other from the base part to a −y side in the y-direction. A holding part extends between the pair of detecting arms from the base part to the −y side and extends out beyond front ends of the pair of detecting arms to the −y side. A mounting part is connected to an end part of the holding part on the −y side and includes a detection side extending portion and two lateral side extending portions. The detection side extending portion extends from a position connected with the holding part to a +x side and −x side. The two lateral side extending portions extend toward the +y side from positions on the +x side and −x side other than both of the two detecting arms. At least one of the plurality of element terminals is located beyond the detection side extending portion on the further +y side.

A physical quantity detection circuit includes an analog/digital conversion circuit having an input capacitance and sampling an analog signal in the input capacitance to convert the analog signal into a digital signal, a precharge circuit for precharging the input capacitance before the analog/digital conversion circuit sample the analog signal in the input capacitance, a digital arithmetic circuit for performing arithmetic processing to the digital signal, and a reference voltage circuit for supplying a power supply voltage to the precharge circuit and the digital arithmetic circuit, wherein the arithmetic processing start timing and the arithmetic processing end timing of the digital arithmetic circuit are set to the timings avoiding the precharge period in which the precharge circuit precharges the input capacitance.