A gyroscope includes a MEMS sensor having a drive signal input terminal, a drive signal output terminal, and a sense signal output terminal. The gyroscope further includes a quadrature demodulator that demodulates a modulated sense signal and offset canceller circuits that cancel a direct current offset component included in an in-phase signal and a quadrature signal of the sense signal. The gyroscope has a quadrature error detector that detects a quadrature error based on the signals input from the offset canceller circuits and outputs an error signal. The gyroscope also has an IQ corrector circuit that receives the in-phase signal and the quadrature signal of the sense signal as inputs, and outputs a phase signal with a phase based on the error signal.

A gyroscope includes a MEMS sensor having a drive signal input terminal, a drive signal output terminal, and a sense signal output terminal. The gyroscope further includes a quadrature demodulator that demodulates a modulated sense signal and offset canceller circuits that cancel a direct current offset component included in an in-phase signal and a quadrature signal of the sense signal. The gyroscope has a quadrature error detector that detects a quadrature error based on the signals input from the offset canceller circuits and outputs an error signal. The gyroscope also has an IQ corrector circuit that receives the in-phase signal and the quadrature signal of the sense signal as inputs, and outputs a phase signal with a phase based on the error signal.

Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

A self-calibration method and system of a solid-state resonator gyroscope, which can realize the separation of the bias error from the angular rate, and fundamentally solve the problem of repeatability errors; this calibration method acquires steady-state signals of key monitoring points in a gyroscope in different working modes in real time by externally feeding excitation signals, and realizes the separation of the bias error from the input angular rate by an algorithm, thus calibrating the repeatability error of the gyroscope. The excitation signals include first and second excitation signals; the first and second excitation signals are respectively combined with demodulated primary mode detection signal D.sub.−x and demodulated secondary mode detection signal D.sub.+y to realize feeding; the key monitoring points include output points of an antinode controller and output points of a node controller, and realize the separation of the bias error from the input angular rate according to the excitation signals and acquired signals of monitoring points. The technical solution provided can be applied to a measurement while drilling system or a navigation system.

A method is proposed for controlling the precession of a gyroscope (1) comprising a support (2) and a resonator (3), the support (2) being mobile in a platform coordinate system and stationary in a measurement coordinate system, the method comprising the generation (101) of a first control signal suitable for rotating the resonator (3) with respect to the support (2) in two opposite directions of rotation during a first period, the method being characterized by the following steps: reception (104) of data (Tpm) on relative positioning between the measurement coordinate system and the platform coordinate system, calculation (105) of a second control signal to be generated during a second period on the basis of the first control signal and the relative-positioning data, the second control signal being chosen in such a way as to minimize an average of accumulated angular errors in the angular measurements acquired by the gyroscope during the entirety of the first and second period, the angular errors being expressed in the platform coordinate system.

A method is proposed for controlling the precession of a gyroscope (1) comprising a support (2) and a resonator (3), the support (2) being mobile in a platform coordinate system and stationary in a measurement coordinate system, the method comprising the generation (101) of a first control signal suitable for rotating the resonator (3) with respect to the support (2) in two opposite directions of rotation during a first period, the method being characterized by the following steps: reception (104) of data (Tpm) on relative positioning between the measurement coordinate system and the platform coordinate system, calculation (105) of a second control signal to be generated during a second period on the basis of the first control signal and the relative-positioning data, the second control signal being chosen in such a way as to minimize an average of accumulated angular errors in the angular measurements acquired by the gyroscope during the entirety of the first and second period, the angular errors being expressed in the platform coordinate system.

Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.

Novel structural features applicable to a variety of inertial sensors. A composite ring composed of concentric subrings is supported by a compliant support structure suspending the composite ring relative to a substrate. The compliant support structure may either be interior or exterior to the composite ring. The compliant support may be composed of multiple substantially concentric rings coupled to neighboring rings by transverse members regularly spaced at intervals that vary with radius relative to a central axis of symmetry. Subrings making up the composite ring may vary in width so as to provide larger displacement amplitudes at intermediate radii, for example. In other embodiments, electrodes are arranged to reduce sensitivity to vibration and temperature, and shock stops are provided to preclude shorting in response to shocks.

An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.