G01C19/5698

Distributed acceleration sensing for robust disturbance rejection

An aerial vehicle comprising an airframe, an aircraft flight controller to provide an output control signal, and a planar printed circuit board positioned on the airframe. The printed circuit board may include coupled thereto a processor, a rate gyroscope, and at least three accelerometers. The processor is configured to generate an actuation signal based at least in part on a feedback signal received from at least one of said rate gyroscope and the at least three accelerometers. The processor communicates the actuation signal to said aircraft flight controller, which is configured to adjust the output control signal based on said actuation signal.

ACOUSTICALLY DECOUPLED MEMS DEVICES
20210028759 · 2021-01-28 ·

Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.

ACOUSTICALLY DECOUPLED MEMS DEVICES
20210028759 · 2021-01-28 ·

Embodiments of the present disclosure relate generally to acoustically decoupled microelectromechanical system devices and, more particularly, to acoustically decoupled microelectromechanical system devices anchored upon phononic crystals. In some embodiments described herein, a device may comprise a resonator, a handle layer, and a pedestal disposed between the resonator and the handle layer, the pedestal connecting the resonator to the handle layer. In the devices described herein, the resonator and the handle layer may be non-coplanar. In some embodiments, the handle layer comprises a phononic crystal to acoustically decouple the resonator from the substrate of the handle layer.

Surface Acoustic Wave (SAW)-based Inertial Sensor, Methods, and Applications
20200408800 · 2020-12-31 · ·

A SAW-based inertial sensor incorporates a curved SAW drive resonator and graphene electrodes to increase the Coriolis force on a pillar array and generate secondary SAW waves that create a strain-induced hyperfine frequency transition in an enclosed alkali atom vapor, in conjunction with an integrated FP resonator to measure very small inertial signals corresponding to 10 g and 0.01/hr, representing a dynamic range of 10 orders of magnitude.

CALIBRATION SYSTEM, AND SENSOR SYSTEM INCLUDING THE SAME

An aspect of the present disclosure concerns a calibration system including a test tone signal generator that produces a test tone; a transimpedance amplifier (TIA) that comprises two input terminals, receives two output signals from an external sensor device, the test tone, and a calibration signal at the two input terminals, and produces a voltage signal; and a calibration circuit that receives the voltage signal and the test tone to produce the calibration signal that causes the TIA to produce the voltage signal such that an error signal included in the voltage signal is canceled. The external sensor device may be a mode-matched vibratory micro-electro-mechanical systems (MEMS) gyroscope.

OSCILLATOR CIRCUIT INCLUDING OSCILLATOR

An aspect of the present disclosure concerns an oscillator circuit including a driver circuit that includes a first amplifier and a current detector where the first amplifier produces an oscillation voltage signal, where the current detector detects an oscillation current signal and produces a drive voltage signal, and where the oscillation current signal corresponds to difference in voltage between the oscillation voltage signal and the drive voltage signal; a feedback circuit that includes a second amplifier receiving the oscillation voltage signal and the drive voltage signal, to produce a feedback voltage signal to the driver circuit; and an oscillator that oscillates at a frequency determined in accordance with the drive voltage signal.

OSCILLATOR CIRCUIT INCLUDING OSCILLATOR

An aspect of the present disclosure concerns an oscillator circuit including a driver circuit that includes a first amplifier and a current detector where the first amplifier produces an oscillation voltage signal, where the current detector detects an oscillation current signal and produces a drive voltage signal, and where the oscillation current signal corresponds to difference in voltage between the oscillation voltage signal and the drive voltage signal; a feedback circuit that includes a second amplifier receiving the oscillation voltage signal and the drive voltage signal, to produce a feedback voltage signal to the driver circuit; and an oscillator that oscillates at a frequency determined in accordance with the drive voltage signal.

FTR LOOP OF A GYRO APPARATUS

A signal processing circuit for a gyroscope apparatus is disclosed. The signal processing circuit includes a first electrode and a second electrode pairing with the first electrode. The signal processing circuit, being a negative feedback loop circuit, is configured to be connected with the first electrode and the second electrode and comprises a demodulator configured to convert a current from the first electrode into a voltage and demodulate the converted voltage to output a demodulated signal, an analog-to-digital converter configured to convert the demodulated signal from the demodulator into a digital signal, a proportional-integral-derivative controller that is connected to the analog-to-digital converter, a digital-to-analog converter configured to convert an output signal from the proportional-integral-derivative controller to an analog signal, and a modulator configured to be electrically connected with the second electrode and to be electrically connected with the digital-to-analog converter.

GYROSCOPE, METHODS OF FORMING AND OPERATING THE SAME
20200173780 · 2020-06-04 ·

Various embodiments may provide a gyroscope. The gyroscope may include a piezoelectric substrate, an excitation transducer configured to generate a surface acoustic wave, and a sensing transducer configured to receive the surface acoustic wave generated by the excitation transducer. The gyroscope may additionally include a mass dot array between the excitation transducer and the sensing transducer, the mass dot array configured to generate a stress on the piezoelectric substrate based on a rotation of said gyroscope upon the surface acoustic wave passing through the mass dot array. The gyroscope may also include a light source, and an optical detector configured to receive one or more light beams generated by the light source to determine the rotation of the gyroscope based on a property of the one or more light beams. The property of the one or more light beams may be variable based on the stress on the piezoelectric substrate.

GYROSCOPE, METHODS OF FORMING AND OPERATING THE SAME
20200173780 · 2020-06-04 ·

Various embodiments may provide a gyroscope. The gyroscope may include a piezoelectric substrate, an excitation transducer configured to generate a surface acoustic wave, and a sensing transducer configured to receive the surface acoustic wave generated by the excitation transducer. The gyroscope may additionally include a mass dot array between the excitation transducer and the sensing transducer, the mass dot array configured to generate a stress on the piezoelectric substrate based on a rotation of said gyroscope upon the surface acoustic wave passing through the mass dot array. The gyroscope may also include a light source, and an optical detector configured to receive one or more light beams generated by the light source to determine the rotation of the gyroscope based on a property of the one or more light beams. The property of the one or more light beams may be variable based on the stress on the piezoelectric substrate.