A rotation sensor, including: (i) a substrate having a top surface and an interior bottom surface; (ii) an electrode module positioned on the top surface of the substrate and including a first set of electrodes configured to generate a bulk acoustic wave directly into the substrate, wherein at least a portion of the bulk acoustic wave is transduced into a shear wave upon reflection on the interior bottom surface of the substrate without use of a reflector, and a second set of electrodes configured to detect the shear wave; and (iii) a controller in communication with the first set and second set of electrodes and configured to determine, based on the detected shear wave, an effect of Coriolis force on the sensor.

A manufacturing process to form a positioning control tool, such as a gyroscope, by using a three-dimensional (3D) printer printing a polymer material mixed with powdered graphene (12a) components (410) on a piezoelectric substrate (205), the components (410) include: a resonator (411) transducer configured to create a first surface acoustic wave (215); a pair of reflectors (412a, 412b) configured to reflect the first surface acoustic wave (215); a structure (413) which, when subjected to a Coriolis force, creates a second surface acoustic wave (230); a first sensor transducer (414) configured to sense the second surface acoustic wave (230); and a second sensor transducer (415) configured to sense a residual surface acoustic wave from a second region of the surface (210) of the piezoelectric substrate free of the structures that respond to the Coriolis force.

A manufacturing process to form a positioning control tool, such as a gyroscope, by using a three-dimensional (3D) printer printing a polymer material mixed with powdered graphene (12a) components (410) on a piezoelectric substrate (205), the components (410) include: a resonator (411) transducer configured to create a first surface acoustic wave (215); a pair of reflectors (412a, 412b) configured to reflect the first surface acoustic wave (215); a structure (413) which, when subjected to a Coriolis force, creates a second surface acoustic wave (230); a first sensor transducer (414) configured to sense the second surface acoustic wave (230); and a second sensor transducer (415) configured to sense a residual surface acoustic wave from a second region of the surface (210) of the piezoelectric substrate free of the structures that respond to the Coriolis force.

A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed.

A bulk acoustic wave resonator apparatus includes a resonator member having an annulus shape, and at least one anchor structure coupling the resonator member to a substrate. A perimeter of the resonator member is at least partially defined by respective sidewalls that are slanted at an angle relative to a plane defined by a surface of the resonator member. The surface of the resonator member may be defined by a (100) crystal plane, and the angle of the respective sidewalls may be defined by a (111) crystal plane. Related fabrication methods are also discussed.

A phononic travelling wave gyroscope. The gyroscope includes a phononic waveguide including at least one loop. The phase change incurred by phonons propagating around the loop is compared to a reference phase, and utilized to form an estimate of the rotational rate of the gyroscope.

A phononic travelling wave gyroscope. The gyroscope includes a phononic waveguide including at least one loop. The phase change incurred by phonons propagating around the loop is compared to a reference phase, and utilized to form an estimate of the rotational rate of the gyroscope.

An Acousto-Optic Gyroscope (AOG) consisting of a photonic integrated device embedded into two inherently matched piezoelectric surface acoustic wave (SAW) resonators sharing the same acoustic cavity is disclosed. The micromachined strain-based AOG uses the effective index of the optical waveguide due to the acousto-optic effect rather than conventional displacement sensing.

An Acousto-Optic Gyroscope (AOG) consisting of a photonic integrated device embedded into two inherently matched piezoelectric surface acoustic wave (SAW) resonators sharing the same acoustic cavity is disclosed. The micromachined strain-based AOG uses the effective index of the optical waveguide due to the acousto-optic effect rather than conventional displacement sensing.

A BAW gyroscope is configured to operate with two pairs of orthogonal modes instead of a single pair in order to mitigate the impact of changes in gaps (e.g., introduced from external stresses such as thermal gradients, external shocks, mechanical stress/torque, etc.). Specifically, the BAW gyroscope resonator is configured to be simultaneously driven to resonate with a two disparate resonant modes (referred to herein as the fundamental mode and the compound mode), with the same set of drive electrodes used to drive both resonant modes (i.e., all of the drive electrodes are used to drive the two drive modes). When the sensor experiences external rotation, energy couples from the driven modes of vibration to two corresponding orthogonal sense modes via the Coriolis force. The same set of sense electrodes is used to sense both sense modes (i.e., all of the sense electrodes are used to sense the two sense modes). The fundamental mode is differential with respect to the electrodes, while the compound mode is seen as common-mode with respect to the electrodes. Thus, differential gap change will impact offset of rate measured with the fundamental mode only, while common-mode gap change will impact offset of rate measured with the compound mode only.