A vibration gyroscope includes: a mass part supported to be displaceable in a first direction and a second direction; an exciter vibrating the mass part in the first direction; and a detector detecting a displacement amount of the mass part in the second direction. The first direction and the second direction are orthogonal to each other. A resonance frequency of the mass part in the first direction coincides with a resonance frequency of the mass part in the second direction. A Q-factor of vibration of the mass part in the second direction is smaller than a Q-factor of vibration of the mass part in the first direction.

A vibration gyroscope includes: a mass part supported to be displaceable in a first direction and a second direction; an exciter vibrating the mass part in the first direction; and a detector detecting a displacement amount of the mass part in the second direction. The first direction and the second direction are orthogonal to each other. A resonance frequency of the mass part in the first direction coincides with a resonance frequency of the mass part in the second direction. A Q-factor of vibration of the mass part in the second direction is smaller than a Q-factor of vibration of the mass part in the first direction.

A physical quantity sensor includes a movable body that includes a beam portion, a coupling portion that is connected with the beam portion at connection positions and is provided in a direction intersecting with the beam portion, and a first and second mass portions that are connected with the coupling portion; a first and second fixed electrodes that are provided on a support substrate and are opposed to the first and second mass portions; and a protrusion is provided and protrude from the support substrate toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions opposite to the beam portion is L, and a distance from the protrusions to end portions opposite to the beam portion is L1, the distance L1 is 0.18 L or longer and 0.88 L or shorter.

A physical quantity sensor includes a movable body that includes a beam portion, a coupling portion that is connected with the beam portion at connection positions and is provided in a direction intersecting with the beam portion, and a first and second mass portions that are connected with the coupling portion; a first and second fixed electrodes that are provided on a support substrate and are opposed to the first and second mass portions; and a protrusion is provided and protrude from the support substrate toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions opposite to the beam portion is L, and a distance from the protrusions to end portions opposite to the beam portion is L1, the distance L1 is 0.18 L or longer and 0.88 L or shorter.

A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis X.sub.1 parallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X.sub.1, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis X.sub.2 parallel to the excitation direction, and mounted with the ability to slide on the substrate along the second axis X.sub.2.

A gyrometer including a first dual-mass gyrometer including a planar substrate, first left and right inertial masses including a first left and right frames, respectively, aligned along a first excitation axis X.sub.1 parallel to an excitation direction, and mounted with the ability to slide on the substrate along the first excitation axis X.sub.1, and first left and right central masses, respectively, mounted with the ability to slide in the first left and right frames, respectively, parallel to a first detection direction perpendicular to the excitation direction; a first coupling spring interposed between the first left and right frames; a first rocker mounted with the ability to rotate on the substrate about a first rocker pivot, first left and right ends of the first rocker being connected to the first left and right central masses, respectively; second left and right inertial masses aligned along a second axis X.sub.2 parallel to the excitation direction, and mounted with the ability to slide on the substrate along the second axis X.sub.2.

Angular sensor with vibrating resonator includes a supporting structure, a first mass and a second mass which are concentric, and mechanical springs arranged symmetrically in pairs, the pairs themselves being arranged symmetrically with respect to one another. Each spring comprises a first elastic leaf and a second elastic leaf which are connected to one another by one end, the first elastic leaf of one of the springs of each pair being parallel to the second elastic leaf of the other of the springs of the same pair. The four elastic leaves of at least one pair comprise two adjacent pairs of leaves making an angle of approximately 45° between them. The sensor is not provided with electrostatic springs.

An acceleration sensor includes a substrate, a first movable body that includes a first movable portion and a second movable portion having a rotational moment around a first swinging axis smaller than that of the first movable portion, a second movable body that includes a third movable portion and a fourth movable portion having a rotational moment around a second swinging axis smaller than that of the third movable portion, a first fixed electrode that is disposed on the substrate and faces the first movable portion, a second fixed electrode that faces the second movable portion, a third fixed electrode that faces the third movable portion, a fourth fixed electrode that faces the fourth movable portion, and a coupling portion that couples the first movable body and the second movable body.

An acceleration sensor includes a substrate, a first movable body that includes a first movable portion and a second movable portion having a rotational moment around a first swinging axis smaller than that of the first movable portion, a second movable body that includes a third movable portion and a fourth movable portion having a rotational moment around a second swinging axis smaller than that of the third movable portion, a first fixed electrode that is disposed on the substrate and faces the first movable portion, a second fixed electrode that faces the second movable portion, a third fixed electrode that faces the third movable portion, a fourth fixed electrode that faces the fourth movable portion, and a coupling portion that couples the first movable body and the second movable body.

A rotation measurement system that includes at least two proof masses and at least one pick-off is provided. Each proof mass is driven in a first axis of motion. The at least one pick-off is configured to measure movement of the at least two proof masses in a second axis when the system is rotated about a rotation point and generate Coriolis signals and Euler signals based on the measured movement of the at least two proof masses.