An acceleration sensor includes a substrate, a first movable body that includes a first movable portion and a second movable portion having a rotational moment around a first swinging axis smaller than that of the first movable portion, a second movable body that includes a third movable portion and a fourth movable portion having a rotational moment around a second swinging axis smaller than that of the third movable portion, a first fixed electrode that is disposed on the substrate and faces the first movable portion, a second fixed electrode that faces the second movable portion, a third fixed electrode that faces the third movable portion, a fourth fixed electrode that faces the fourth movable portion, and a coupling portion that couples the first movable body and the second movable body.

An acceleration sensor includes a substrate, a first movable body that includes a first movable portion and a second movable portion having a rotational moment around a first swinging axis smaller than that of the first movable portion, a second movable body that includes a third movable portion and a fourth movable portion having a rotational moment around a second swinging axis smaller than that of the third movable portion, a first fixed electrode that is disposed on the substrate and faces the first movable portion, a second fixed electrode that faces the second movable portion, a third fixed electrode that faces the third movable portion, a fourth fixed electrode that faces the fourth movable portion, and a coupling portion that couples the first movable body and the second movable body.

A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.

A vibratory gyroscope sensor (1) comprising: a base (2), a resonator (3) that includes a central foot (30) by which the resonator (3) is attached to said base (2) and a sidewall (31) that rises from said foot (30) up to a free end edge (310) delimiting an opening, characterized in that said sidewall (31) has a proximal portion (311) that rises from and around said foot (30) as well as a distal portion (312), generally cylindrical in shape, that extends in line with said proximal portion (311) up to said free end edge (310), said proximal portion (311) progressively widening from the foot (30) towards the distal portion (312).
Gyroscope sensors

A vibratory gyroscope sensor (1) comprising: a base (2), a resonator (3) that includes a central foot (30) by which the resonator (3) is attached to said base (2) and a sidewall (31) that rises from said foot (30) up to a free end edge (310) delimiting an opening, characterized in that said sidewall (31) has a proximal portion (311) that rises from and around said foot (30) as well as a distal portion (312), generally cylindrical in shape, that extends in line with said proximal portion (311) up to said free end edge (310), said proximal portion (311) progressively widening from the foot (30) towards the distal portion (312).
Gyroscope sensors

A rotation rate sensor includes a first rotationally suspended mass that exhibits a first axis of rotation. The first mass includes a first rotation-rate-measuring element that captures a first rate of rotation about the first axis of rotation and that outputs the first rate of rotation in a first signal. The sensor further includes a second rotationally suspended mass that exhibits a second axis of rotation and is arranged parallel to the first axis of rotation. The second mass includes a second rotation-rate-measuring element that captures a second rate of rotation about the second axis of rotation and that outputs the second rate of rotation in a second signal. The sensor further includes a propulsion device that propels the first and second mass and an evaluating device that outputs a difference of the signals as a third rate of rotation to be measured.

A rotation rate sensor includes a first rotationally suspended mass that exhibits a first axis of rotation. The first mass includes a first rotation-rate-measuring element that captures a first rate of rotation about the first axis of rotation and that outputs the first rate of rotation in a first signal. The sensor further includes a second rotationally suspended mass that exhibits a second axis of rotation and is arranged parallel to the first axis of rotation. The second mass includes a second rotation-rate-measuring element that captures a second rate of rotation about the second axis of rotation and that outputs the second rate of rotation in a second signal. The sensor further includes a propulsion device that propels the first and second mass and an evaluating device that outputs a difference of the signals as a third rate of rotation to be measured.