According to one embodiment, a sensor includes a housing, a sensor section, and a plurality of first fixing members. The housing includes a housing base. The sensor section is surrounded by the housing. The sensor section includes a sensor base, a support portion fixed to the sensor base, a movable portion supported by the support portion, and a plurality of fixed electrodes fixed to the sensor base and facing the movable portion. A first gap is provided between the sensor base and the movable portion. The fixed electrodes are provided in n-rotational symmetry in a first plane perpendicular to a first direction from the sensor base to the support portion. The n is an integer of 2 or more. The plurality of first fixing members fix the sensor base to the housing base. The first fixing members are provided in the n-rotational symmetry in the first plane.

A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

A vibration element includes a detection signal electrode provided in a detection vibrating arm, a detection signal terminal which is provided in a support portion and electrically connected to the detection signal electrode, and a detection ground terminal provided in the support portion, and the detection ground terminal is disposed between a first connection portion which is a connection portion with a beam portion of the support portion and a second connection portion which is a connection portion with a beam portion, and is provided to extend to the outside of the first connection portion, and the detection signal terminal is provided between the detection ground terminal and an end portion of the support portion.

A physical quantity sensor includes a substrate, a pair of first elements detecting acceleration in a first direction, and a pair of second elements detecting an acceleration in a second direction. The first element portion includes a first movable portion displaceable in the first direction, first and second movable electrode fingers disposed in the first movable portion, first and second fixing electrode fingers disposed to face the first and second movable electrode fingers, and first and second support portions supporting the first and second fixing electrode fingers. The second element includes a second movable portion displaceable in the second direction, third and fourth movable electrode fingers disposed in the second movable portion, third and fourth fixing electrode fingers disposed to face the third and fourth movable electrode fingers, and third and fourth support portions supporting the third and fourth fixing electrode fingers.

A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extending parallel to the principal extension plane, in such a way that the structure is excitable to oscillate at a first frequency with a motion component substantially in a direction parallel to the first axis, the rotation rate sensor encompassing a second excitation unit for deflecting the structure out of an idle position substantially parallel to a second axis extending parallel to the principal extension plane and extending perpendicularly to the first axis, in such a way that the structure is excitable to oscillate at a second frequency with a motion component substantially in a direction parallel to the second axis.

A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extending parallel to the principal extension plane, in such a way that the structure is excitable to oscillate at a first frequency with a motion component substantially in a direction parallel to the first axis, the rotation rate sensor encompassing a second excitation unit for deflecting the structure out of an idle position substantially parallel to a second axis extending parallel to the principal extension plane and extending perpendicularly to the first axis, in such a way that the structure is excitable to oscillate at a second frequency with a motion component substantially in a direction parallel to the second axis.

An example method may include determining a requested yaw for a body of a robot, where the biped robot comprises a foot coupled to the body via a leg. The robot may then detect, via one or more sensors, a yaw rotation of the body with respect to a ground surface, where the foot is in contact with the ground surface. Based on the detected yaw rotation of the body, the robot may determine a measured yaw for the body. The robot may also determine a target yaw for the body, where the target yaw for the body is between the measured yaw for the body and the requested yaw for the body. The robot may then cause the foot to rotate the body to the target yaw for the body.

An example method may include determining a requested yaw for a body of a robot, where the biped robot comprises a foot coupled to the body via a leg. The robot may then detect, via one or more sensors, a yaw rotation of the body with respect to a ground surface, where the foot is in contact with the ground surface. Based on the detected yaw rotation of the body, the robot may determine a measured yaw for the body. The robot may also determine a target yaw for the body, where the target yaw for the body is between the measured yaw for the body and the requested yaw for the body. The robot may then cause the foot to rotate the body to the target yaw for the body.

In a physical quantity sensor, wirings provided on a projection and a bonding pad form a silicide layer and are electrically connected. The wirings are multilayered films. A noble metal layer covers the projection and contacts the bonding pad to form the silicide layer. A metal layer extends between the noble metal layer and a base substrate. The metal layer, the noble metal layer, an adhesion layer, and an insulating layer are stacked in this order from the base substrate in all areas except for atop the projection.

A physical quantity sensor includes a movable body that includes a beam portion, a coupling portion that is connected with the beam portion at connection positions and is provided in a direction intersecting with the beam portion, and a first and second mass portions that are connected with the coupling portion; a first and second fixed electrodes that are provided on a support substrate and are opposed to the first and second mass portions; and a protrusion is provided and protrude from the support substrate toward the first and second mass portions. In the intersecting direction, in a case where a distance from connection positions to end portions opposite to the beam portion is L, and a distance from the protrusions to end portions opposite to the beam portion is L1, the distance L1 is 0.18 L or longer and 0.88 L or shorter.