A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.

Inertial measurement units with gyroscopic sensors are standard in mobile computers. The present invention shows that these sensors can be co-opted for vibroacoustic data reception. The present invention illustrates a new capability for an old sensor utilizing the commodity gyroscope sensor found in most average smartphones and a low-cost transducer to the present invention can transmit error-corrected data at 2028 bits per sec with the expectation that 95% of packets will be successfully received.

Inertial measurement units with gyroscopic sensors are standard in mobile computers. The present invention shows that these sensors can be co-opted for vibroacoustic data reception. The present invention illustrates a new capability for an old sensor utilizing the commodity gyroscope sensor found in most average smartphones and a low-cost transducer to the present invention can transmit error-corrected data at 2028 bits per sec with the expectation that 95% of packets will be successfully received.

A vibrating structure angular rate sensor comprises a MEMS structure includes a mount, a plurality of supporting structures fixed to the mount, and a vibrating planar ring structure flexibly supported by the plurality of supporting structures to move elastically relative to the mount. At least one primary drive transducer is arranged to cause the ring structure to oscillate in a primary mode at the resonant frequency of the primary mode. At least one primary pick-off transducer arranged to detect oscillation of the ring structure in the primary mode. At least three secondary pick-off transducers are arranged to detect oscillation of the ring structure in a secondary mode induced by Coriolis force when an angular rate is applied around an axis substantially perpendicular to the ring structure. At least one secondary drive transducer is arranged to null the induced oscillation in the secondary mode.

A vibrating structure angular rate sensor comprises a MEMS structure includes a mount, a plurality of supporting structures fixed to the mount, and a vibrating planar ring structure flexibly supported by the plurality of supporting structures to move elastically relative to the mount. At least one primary drive transducer is arranged to cause the ring structure to oscillate in a primary mode at the resonant frequency of the primary mode. At least one primary pick-off transducer arranged to detect oscillation of the ring structure in the primary mode. At least three secondary pick-off transducers are arranged to detect oscillation of the ring structure in a secondary mode induced by Coriolis force when an angular rate is applied around an axis substantially perpendicular to the ring structure. At least one secondary drive transducer is arranged to null the induced oscillation in the secondary mode.

A self-calibration method and system of a solid-state resonator gyroscope, which can realize the separation of the bias error from the angular rate, and fundamentally solve the problem of repeatability errors; this calibration method acquires steady-state signals of key monitoring points in a gyroscope in different working modes in real time by externally feeding excitation signals, and realizes the separation of the bias error from the input angular rate by an algorithm, thus calibrating the repeatability error of the gyroscope. The excitation signals include first and second excitation signals; the first and second excitation signals are respectively combined with demodulated primary mode detection signal D.sub.−x and demodulated secondary mode detection signal D.sub.+y to realize feeding; the key monitoring points include output points of an antinode controller and output points of a node controller, and realize the separation of the bias error from the input angular rate according to the excitation signals and acquired signals of monitoring points. The technical solution provided can be applied to a measurement while drilling system or a navigation system.

The invention concerns a resonator 1 configured to be integrated into an inertial angular sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5, a number N of pairs P.sub.i (2≤i≤N) of electrostatic springs 50, said resonator 1 defining at least four axes of symmetry S.sub.1, S.sub.2, S.sub.3 and S.sub.4, characterized in that: each pair P.sub.i consists of two electrostatic springs 50 each having a privileged axis of action, these electrostatic springs 50 being positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.

The invention concerns a resonator 1 configured to be integrated into an inertial angular sensor, said resonator 1 comprising at least one mass suspended by mechanical springs 5, a number N of pairs P.sub.i (2≤i≤N) of electrostatic springs 50, said resonator 1 defining at least four axes of symmetry S.sub.1, S.sub.2, S.sub.3 and S.sub.4, characterized in that: each pair P.sub.i consists of two electrostatic springs 50 each having a privileged axis of action, these electrostatic springs 50 being positioned so that their respective axes form a right angle; for at least one spring of one of the pairs and one spring of another pair, the angle formed by these two springs is equal to a predefined angle.