A drive circuitry for a vibration gyroscope is described. The drive circuitry comprises a digital phase shifter, a variable gain amplifier and a pulse signal generator arranged to generate a digital pulse signal having a frequency substantially equal to a drive frequency of the vibration gyroscope. A controller is arranged to connect drive actuation units of the vibration gyroscope to outputs of the pulse signal generator during a first start-up time period, to outputs of the digital phase shifter during a second start-up time period, and to outputs of the variable gain amplifier during a measurement time period. Furthermore, a vibration gyroscope device and a method of driving a vibration gyroscope are described.

A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.

A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.

A frequency delta-sigma modulation signal output circuit includes: a phase modulation circuit configured to generate n delay signals obtained by delaying a measurement target signal, n being an integer of 2 or more, and generate a phase modulation signal by randomly selecting one of the n delay signals in synchronization with the measurement target signal; and a frequency ratio digital conversion circuit configured to generate a frequency delta-sigma modulation signal using a reference signal and the phase modulation signal.

A drive circuit for a MEMS resonator can include closed loop means for detecting and amplifying a signal of the MEMS resonator, and means for feeding the detected and amplified signal as a feedback signal back to the MEMS resonator. The circuitry also comprises DC bias voltage means for generating for the MEMS resonator a first DC bias voltage, and a second DC bias voltage that is controlled according to measured amplitudes of the MEMS resonator, one of the DC bias voltages being summed into the feedback signal. The circuitry comprises also a start-up circuitry adapted to detect a start-up state, and in response to a detected start-up state change at last one of the DC bias voltages to a predefined level. The state of constant oscillation is achieved reliably and in short time.

A drive circuit for a MEMS resonator can include closed loop means for detecting and amplifying a signal of the MEMS resonator, and means for feeding the detected and amplified signal as a feedback signal back to the MEMS resonator. The circuitry also comprises DC bias voltage means for generating for the MEMS resonator a first DC bias voltage, and a second DC bias voltage that is controlled according to measured amplitudes of the MEMS resonator, one of the DC bias voltages being summed into the feedback signal. The circuitry comprises also a start-up circuitry adapted to detect a start-up state, and in response to a detected start-up state change at last one of the DC bias voltages to a predefined level. The state of constant oscillation is achieved reliably and in short time.

A detection device includes: a drive circuit which receives a feedback signal from a physical quantity transducer and drives the physical quantity transducer; a detection circuit which receives a detection signal from the physical quantity transducer and detects a desired signal; and a control unit which controls switching on/off of an AGC loop in the drive circuit. The drive circuit outputs a drive signal based on a control voltage that is set by the AGC loop in an on-period of the AGC loop to the physical quantity transducer and thus drives the physical quantity transducer in an off-period of the AGC loop.

A digital control circuitry for a MEMS gyroscope is provided. The digital control circuitry comprises a digital primary loop circuitry configured to process a digitized primary signal, a digital secondary loop circuitry configured to process a digitized secondary signal and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the digitized primary signal. The digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.

A system is provided that includes a mechanical resonator, and an analog circuit coupled to the mechanical resonator. The analog circuit is arranged to receive a mechanical resonator measurement signal having a quadrature error from the mechanical resonator, and to extract a quadrature error signal from the mechanical resonator measurement signal using a quadrature clock. A digital quadrature controller is coupled to the analog circuit and is arranged to generate a quadrature error compensation signal from the extracted quadrature error signal and apply the quadrature error compensation signal to the mechanical resonator or the mechanical resonator measurement signal to reduce quadrature error in the mechanical resonator measurement signal error.

A microelectromechanical gyroscope device has: a detection structure, provided with a mobile mass; and an integrated electronic circuit, coupled to the detection structure and which provides a bias signal to the detection structure to cause its oscillation at a resonance frequency and acquires a detection signal from the detection structure indicative of a detected angular velocity. When the gyroscope device is powered, the integrated electronic circuit implements a start-up phase, following a previous power-down, wherein the mobile mass is biased to have an increase in the oscillation up to a target oscillation amplitude, followed by a maintenance phase at the target oscillation amplitude. The integrated electronic circuit is provided with a time counter stage for measuring a duration of a time interval from the previous power-down and adjusts the bias of the mobile mass during the start-up phase as a function of the measured duration of the time interval.