A physical quantity detection circuit includes a signal conversion circuit configured to output a first differential signal based on an output signal of a physical quantity detection element, an active filter to which a second differential signal based on the first differential signal is input, and an analog/digital conversion circuit configured to sample a third differential signal based on an output signal of the active filter to convert the third differential signal into a digital signal, wherein the active filter includes an operational amplifier, a first chopping circuit disposed in a signal path between the signal conversion circuit and the operational amplifier, and a second chopping circuit disposed in a signal path between the operational amplifier and the analog/digital conversion circuit, and fch<fs/2, the sampling frequency is fs, and the chopping frequency is fch.

A physical quantity detection circuit includes a signal conversion circuit configured to output a first differential signal based on an output signal of a physical quantity detection element, an active filter to which a second differential signal based on the first differential signal is input, and an analog/digital conversion circuit configured to sample a third differential signal based on an output signal of the active filter to convert the third differential signal into a digital signal, wherein the active filter includes an operational amplifier, a first chopping circuit disposed in a signal path between the signal conversion circuit and the operational amplifier, and a second chopping circuit disposed in a signal path between the operational amplifier and the analog/digital conversion circuit, and fch<fs/2, the sampling frequency is fs, and the chopping frequency is fch.

The sensor module includes a plurality of inertial measurement units having an angular velocity sensor device, an acceleration sensor device, and a signal processing circuit configured to process an output signal from the angular velocity sensor device and the acceleration sensor device, and an oscillation circuit configured to generate a synchronizing clock which synchronizes the plurality of inertial measurement units. Further, the oscillation circuit is provided to one of the inertial measurement units.

According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.

According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.

A MEMS device may output a signal during operation that may include an in-phase component and a quadrature component. An external signal having a phase that corresponds to the quadrature component may be applied to the MEMS device, such that the MEMS device outputs a signal having a modified in-phase component and a modified quadrature component. A phase error for the MEMS device may be determined based on the modified in-phase component and the modified quadrature component.

A MEMS device may output a signal during operation that may include an in-phase component and a quadrature component. An external signal having a phase that corresponds to the quadrature component may be applied to the MEMS device, such that the MEMS device outputs a signal having a modified in-phase component and a modified quadrature component. A phase error for the MEMS device may be determined based on the modified in-phase component and the modified quadrature component.

A MEMS gyroscope and a method for compensating drift of sensitivity of a MEMS gyroscope are disclosed. The method comprises demodulating an angular rate signal with an in-phase carrier signal for producing a raw rate signal, and obtaining a DC test signal The DC test signal is filtered for obtaining a raw test signal, and zeroing offset of the raw test signal is performed by comparing each sample of the raw test signal to a test signal normalization value for producing an offset zeroed test signal that represents a deviation of the sample of the raw test signal from the test signal normalization value. A sensitivity compensation multiplier is determined based upon the offset zeroed test signal and a predefined gain coefficient, and drift of sensitivity is compensated by multiplying the raw rate signal with the sensitivity compensation multiplier for providing a sensitivity compensated rate signal.

A MEMS gyroscope and a method for compensating drift of sensitivity of a MEMS gyroscope are disclosed. The method comprises demodulating an angular rate signal with an in-phase carrier signal for producing a raw rate signal, and obtaining a DC test signal The DC test signal is filtered for obtaining a raw test signal, and zeroing offset of the raw test signal is performed by comparing each sample of the raw test signal to a test signal normalization value for producing an offset zeroed test signal that represents a deviation of the sample of the raw test signal from the test signal normalization value. A sensitivity compensation multiplier is determined based upon the offset zeroed test signal and a predefined gain coefficient, and drift of sensitivity is compensated by multiplying the raw rate signal with the sensitivity compensation multiplier for providing a sensitivity compensated rate signal.

A vibration-type angular velocity sensor (100) includes a first angular velocity sensor unit (101) and a second angular velocity sensor unit (102). In a predetermined period, the second angular velocity sensor unit performs a process of detecting an angular velocity based on secondary vibration of a vibrator (11) by a secondary side control circuit (17) and a process of detecting the angular velocity based on the secondary vibration of the vibrator by the primary side control circuit (16) by interchanging functions. The first angular velocity sensor unit detects the angular velocity in the predetermined period. The bias component of the first angular velocity sensor unit is calculated based on a first detection result detected by the first angular velocity sensor unit in the predetermined period and a second detection result detected by the second angular velocity sensor unit in the predetermined period.