Systems and methods for measuring the angular position of a laser beam emitter using only distance measurements. What is physically measured is a feature that is affixed to the laser beam emitter and moves with it. Respective distances which are respective functions of the azimuth and zenith angles are measured using respective position encoders. In accordance with some embodiments, the respective distances are measured using linear encoders (optical or magnetic); in accordance with other embodiments, the respective distances are measured using laser interferometer-based encoders.

An optical sensor arrangement for measuring an observable, the arrangement including an optical resonance circuit including at least a first and a second optical resonator, each of the optical resonators including an entry port for coupling light into the optical resonator and a drop port for decoupling light from the optical resonator. The first and second resonator are configured such that only a portion of the first and second resonator detects the presence of the observable, a size of the portion of the first resonator being different from a size of the portion of the second resonator. The optical resonance circuit further configured to be coupled to a light generation circuit and to a detector unit for detecting light.

Aspects of the present disclosure relate generally to systems and methods for use in the implementation and/or operation of quantum information processing (QIP) systems, and more particularly, to the implementation and operation of a non-contact displacement measurement technique for cryogenic stabilization in QIP systems.

Embodiments disclosed herein include a substrate support having a sensor assembly, and processing chamber having the same. In one embodiment, a substrate support has a puck. The puck has a workpiece support surface and a gas hole exiting the workpiece support surface. A sensor assembly is disposed in the gas hole and configured to detect a metric indicative of a deflection of a workpiece disposed on the workpiece support surface, wherein the sensor assembly is configured to provide the benefit of allowing gas to flow past the sensor assembly when positioned in the gas hole.

An electronic device is described. The electronic device may include a housing, a rotatable crown, and a self-mixing interferometry (SMI) sensor positioned within the housing. The rotatable crown may include an array of retroreflective surface features that reflect incident light back to a light source. Each retroreflective surface feature of the array of retroreflective surface features may be formed as a corner-cube with three perpendicular faces. The SMI sensor or associated processing electronics may compare originally emitted light with reflected light to identify a movement or distance of the rotatable crown with respect to the SMI sensor.

A method for determining a length of a span of electrically conductive material, comprising a first voltage measurement across the entire span, and a second voltage measurement across a constant-length segment of the span. The dual measurements allow the calculation of the span length in a manner that is robust to many disturbances including ambient temperature, material temperature, and material stress and fatigue.

A sensor for measuring pressure, temperature or both may be provided. The sensor may include a diaphragm that may respond to a change in temperature or pressure, a base connected to the diaphragm, a cavity, and an optical fiber that may conduct light reflected off of a surface of the diaphragm. The diaphragm and base may be sapphire elements. An interrogator may be provided for detecting a deflection of the diaphragm.

A rotation angle measurement device includes: relative angle detection means including a reference support whose rotation is regulated in a fixed range in an arbitrary direction of a rotation axis, and a driving rotating body which is coupled to the reference support and is axially supported so as to be all-round rotatable with respect to the reference support, the relative angle detection means which detects a relative rotation angle of the rotating body with respect to the reference support; and non-contact angle detection means which detects a rotation angle of the reference support with reference to a position that does not contact with the rotating body and the reference support. This provides improved accuracy in indexing the rotation angle of a rotating moving shaft and easy installation onto the rotating moving shaft.

An encoder head includes one or more components arranged to: i) direct a first incident beam to the diffractive encoder scale at a first incident angle with respect to the encoder scale; ii) receive a first return beam from the encoder scale at a first return angle, the first return angle being different from the first incident angle; iii) redirect the first return beam to the encoder scale as a second incident beam at a second incident angle; and iv) receive a second return beam back from the encoder scale at a second return angle, the second return angle being different from the second incident angle, in which a difference between the first incident angle and second incident angle is less than a difference between the first incident angle and the first return angle and less than a difference between the second incident angle and the second return angle.

A precision optical encoder that utilizes interferometric measurements of displacement to provide angle measurements using a laser which is injection locked to a reference laser having a secondary optical frequency which has been verified with respect to a primary optical frequency standard. The encoder shape encodes distance to rotation angle. By utilizing a laser source locked to a reference laser having a standardized (i.e., verified) secondary optical frequency for fundamental measurements of the encoder surface and real-time interferometer measurements, the encoder reports rotation angle measurements that are directly traceable to a primary optical frequency standard through the injected secondary optical frequency.