A fiber-optic sensors for measuring deformation, intended to operate in a harsh environment is provided. The sensor comprises a Fabry-Perot-cavity-based optical measurement head, a linking optical fiber and an expansion reserve case, the case comprising a segment of the linking optical fiber. The inside thickness of the case is comprised between one and several millimeters, the case being flat and of shape referred to as bicorne shape, the shape comprising a convex central portion and two concave symmetric ends, the optical fiber forming, inside the bicorne, one and only one arch, the segment of the optical fiber being, in addition, tangent to the internal surfaces of the reserve case, whatever the temperature conditions.

An optoelectronic system for measuring physical parameters comprising: two narrow band light sources with different peak frequencies coupled together into a combined light using a coupler. The combined light is split into a first Fabry-Pérot interferometer arranged to be exposed to both temperature and physical parameter of interest and a second Fabry-Pérot interferometer arranged to be exposed only to temperature. The system further comprises first and second optical detectors arranged to receive light reflected from the cavities of the first and second Fabry-Pérot interferometers respectively through an optical path comprising a combination of lenses and/or mirrors and a Fizeau interferometer. A processor is arranged to analyze the data received by the first optical detector and second optical detector and calculate a value for temperature and the physical parameter of interest.

Embodiments disclosed herein include a substrate support having a sensor assembly, and processing chamber having the same. In one embodiment, a substrate support has a puck. The puck has a workpiece support surface and a gas hole exiting the workpiece support surface. A sensor assembly is disposed in the gas hole and configured to detect a metric indicative of a deflection of a workpiece disposed on the workpiece support surface, wherein the sensor assembly is configured to allow gas to flow past the sensor assembly when positioned in the gas hole.

An interferometric position sensor for sensing the position of an object is disclosed. The position sensor comprises a light source arranged to emit light, a beam splitter, and a detector array. The beam splitter is arranged to split the light between first and second optical paths, which are configured such that the split light is recombined so as to form an optical interference pattern dependent on the difference between the optical path lengths of the first and second optical paths. The detector array is arranged to measure the intensity of at least a part of the optical interference pattern. At least one of the first and second optical path lengths is arranged to be dependent on the position of the object, such that changes in the optical interference pattern can be related to changes in the position of the object.

In order to provide an optical encoder with high resolution, the optical encoder includes: a rotary scale provided with a grating pattern having a first radial pattern and a plurality of concentric circular patterns disposed at predetermined intervals; and a light receiving element which detects a first interference fringe formed by the first pattern having a first period in the circumferential direction, a second interference fringe which is diffracted in a direction of the first interference fringe by a grating pattern having a second period in the circumferential direction disposed at a different radial position so that the second interference fringe has a period closer to the first period than the second period.

Embodiments disclosed herein include a substrate support having a sensor assembly, and processing chamber having the same. In one embodiment, a substrate support has a puck. The puck has a workpiece support surface and a gas hole exiting the workpiece support surface. A sensor assembly is disposed in the gas hole and configured to detect a metric indicative of a deflection of a workpiece disposed on the workpiece support surface, wherein the sensor assembly is configured to allow gas to flow past the sensor assembly when positioned in the gas hole.

The present disclosure refers to a scale element for an optical measuring device having an incremental encoder and an interferometric sensor system, the scale element having a reflection layer on one of the surfaces of the scale element, which reflection layer is provided to cooperate with the interferometric sensor system, and the scale element further having a material measure, which is arranged in a direction pointing away from and spaced apart from the reflection layer and is provided to cooperate with the incremental sensor system, the reflection layer being configured and designed in such a way that the reflection layer is transmissive for light of certain wavelengths and reflective for other wavelengths.

There are provided devices, systems and methods utilizing interferometric retro-reflection displacement/vibration meter. In particular, there are provided laser interferometer devices, systems and methods for measuring three-axis small angle displacements and vibrations of a body.

A method for simultaneously measuring roll angle, pitch angle and yaw angle of an element. The method includes directing a laser beam into a spiral phase plate resonator (SPPR) device to generate an optical vortex intensity pattern having a centroid and radial light peaks. The method reflects the laser beam off of the element after it has propagated through the SPPR device so that the laser beam is directed onto a camera that generates images of the optical vortex intensity pattern. The method determines a location of the centroid in the images, determines integrated counts along a radial direction from the centroid in the images, and determines a location of the radial light peaks in the images using the integrated counts. The method changes the frequency of the laser beam to rotate the radial light peaks, and estimates the roll angle of the element from the change in frequency.

Particle detection device comprising a support, a platform for receiving particles, four beams suspending the platform from the support, such that the platform can be made to vibrate, means for making said platform vibrate at a resonance frequency, means for detecting the displacement of the platform in a direction of displacement. Each beam has a length l, a width L and a thickness e and the platform has a dimension in the direction of displacement of the platform and in which in a device with out of plane mode l10L and the dimension of each beam in the direction of displacement of the platform is at least 10 times smaller than the dimension of the platform in the direction of displacement.