Disclosed embodiments include a two-dimensional scale with a simple arrangement capable of omitting setting of an origin mark in the Y-axis direction. In a linear scale, a reference origin mark array and a tilting origin mark array that is a tilting marker array are provided in an origin mark region. Since the reference origin mark array is parallel to X-coordinates, an X-direction origin signal is correctly generated. On the other hand, for the Y direction in which no origin mark is provided, the distance between a reference origin mark and a tilting origin mark is detected. A Y-direction absolute position is decided in accordance with the distance.

New platform technologies to actuate and sense force propagation in real-time for large sheets of cells are provided. In certain embodiments the platform comprises a device for the measurement of mechanical properties of cells or other moieties, where device comprises a transparent elastic or viscoelastic polymer substrate disposed on a rigid transparent surface; and a plurality of micromirrors disposed on or in said polymer substrate, wherein the reflective surfaces of the micromirrors are oriented substantially parallel to the surface of said polymer substrate. In certain embodiments the device comprises more than about 1,000,000, or more than about 10,000,000 micromirrors. In certain embodiments the micromirrors comprise a magnetic layer and/or a diffraction grating.

A rotary encoder includes: a rotary disk with an angle code; a light source; a detector reading the angle code; and a processing unit acquiring a reading value. The light source includes at least two light-emitting elements spaced from each other. Every time the rotary disk is rotated by a predetermined angle, where an arbitrary angle from a rotation angle within a reading range on the detector is provided as , the processing unit acquires reading values f.sub.I(+) and f.sub.I() with a first light-emitting element and a reading value f.sub.II(+) with a second light-emitting element, to calculate a reading value error due to deflection at an angle + based on the difference between the reading values f.sub.II(+) and f.sub.I(+), to obtain a difference g.sub.I(, ) between the reading values f.sub.I(+) and f.sub.I() such that the error is reflected, and to self-calibrate based on a change in the difference g.sub.I(, ).

A grating measuring device includes: a light source module (300) for generating two light beams having different frequencies, one of which serves as a measuring beam and the other as a reference beam; a grating (200); and a grating measuring probe (100) including a dual-frequency light reception module, a vertical measurement module, a vertical detection module and a reference detection module. The dual-frequency light reception module is configured to receive the measuring and reference beams, and the vertical measurement module is adapted to project the measuring beam onto the grating (200), collect a zeroth-order diffracted beam resulting from double diffraction occurring at the grating, and feed the zeroth-order diffracted beam to the vertical detection module. The zeroth-order diffracted beam interferes with the reference beam in the vertical detection module, resulting in a vertical interference signal. In addition, the measuring and reference beams interfere with each other also in the reference detection module to result in a reference interference signal. The vertical and reference interference signals are received by a signal processing module and serve as a basis for calculating a vertical displacement of the grating (200). This grating measuring device allows a great vertical displacement measurement range at any working distance.

A method of interferometric optical sensing via spatial demodulation includes emitting a laser beam; splitting the laser beam into a reference beam and an interrogation beam; converting a desired signal into a change in the optical path of the interrogation beam via an optical sensor; and capturing the reference beam and the interrogation beam via a camera, wherein the interrogation beam is incident to the camera at a first angle and the reference beam is incident to the camera at a second angle different from the first angle, thereby causing an interference pattern at the camera.

Provided is a position detection method including splitting detection light into first and second light, the first light being incident on a returning optical path, a portion of the first light being transmitted through a beam splitter and a remaining portion of the first light being reflected by the beam splitter to reach the beam splitter through a movable mirror every time the first light reaches the beam splitter through the movable mirror, combining the first light transmitted though the beam splitter and the second light to generate multiple interference light, extracting a second interference light signal having a wavelength of 1/p (p is a natural number) of a wavelength of detection light from a first interference light signal of the multiple interference light, and calculating a position of the movable portion in a predetermined direction based on the second interference light signal.

An example method injects a source light into a sensor cavity body, configured with an optical path including first and second reflecting surfaces, and structured to change the optical path distance between the first and second surface in response to subject condition. Sensor reflection optical signals are received from the senor cavity body, with first reflection signals from the first reflecting surface and se second reflection signals from the second reflecting surface and routed to an interferometer with a first optical path to a first reflector and a second optical path to a second reflector. Interferometer reflector signals, including reflections of the sensor reflection signals from the first reflector and the second reflector are received and phase shift coupled into separate channel signals, including first channel signals, second channel signals, and third channel signals, mutually spaced with respect to phase. A computerized dynamic obtains dynamic measurement of the subject condition, through detecting changes in the optical path distance based on the first, second, and third channel signals.

Embodiments disclosed herein include a substrate support having a sensor assembly, and processing chamber having the same. In one embodiment, a substrate support assembly has a puck having a workpiece support surface, a gas hole formed through the workpiece support surface, and a sensor assembly disposed in the gas hole. The substrate support assembly further has a transition conduit fluidly coupled to the gas hole, and a connection coupled to the transition conduit. The connection has a first opening fluidly coupled to the transition conduit and a second opening coupled to a control system, where the control system is coupled to the sensor assembly.

A detection device includes an illumination optical system and a detection optical system. The illumination optical system is configured to illuminate a first diffraction grating having a first period in a first direction and a second diffraction grating having a second period different from the first period. The detection optical system is configured to detect light diffracted by the first and second diffraction gratings. The illumination optical system includes an optical member configured to form, on a pupil plane, a first pole and a second pole opposite to the first pole. The illumination optical system causes lights from the first and second poles to obliquely enter the first and second diffraction gratings from the first direction to illuminate the first and second diffraction gratings. The detection optical system detects diffracted light diffracted by one of the first and second diffraction gratings and by an other diffraction grating.

A sensor apparatus and system for measuring pressure, temperature or both with a single interrogator includes a sensor having a cavity, a diaphragm and an optical element or base for conducting energy to and from the cavity and diaphragm. The two surfaces of the diaphragm and a surface of optical element and either surface of the diaphragm are partially reflecting surfaces and respectively define two optical path distances (OPDs) that produce preferential reflections and interference patterns at different optical frequencies or wavelengths that are respectively affected by pressure or temperature. Arranging the OPDs such that the fundamental frequency and harmonics of preferential reflections one OPD do not coincide with the fundamental frequency or harmonics of another OPD provides for both temperature and pressure measurement with a single interrogator and without complex spectral analysis.