Described herein is an improved displacement transducer, a closed loop control system incorporating the same, and an improved method of manufacturing of manufacturing a displacement transducer. The improved transducer has several advantages, including improved manufacturability; improved fluid flow within the sensor and reduced cavitation as a result; and the enablement of closed loop control for assisted manual or fully automatic displacement.

A method including ultrasonically scanning a structure with a laser ultrasound testing system where the structure is provided with an array of nanoscopic structures, the nanoscopic structures having a predetermined directional orientation, the nanoscopic structures disposed on a scanned surface of the structure, and determining if the structure meets a predetermined threshold. Aspects of this invention apply certain high emissivity coatings to structures for the purpose of significant improvement laser ultrasound inspection of those structures. The nanotechnology-based material in the coatings rapidly draws heat away, for maximum laser energy absorption while preventing surface heat damage to the composite surface from the laser beam.

A non-acoustic measurement unit is provided to be integrated into an all-optical acoustic antenna, the non-acoustic measurement unit including a portion of an optical fiber, termed non-acoustic, intended to convey non-acoustic measurements, at least one non-acoustic sensor with electrical output able to deliver at least one electrical signal representative of at least one physical quantity, and a passive electro-optical transducer subjected to the electrical signal, the passive electro-optical transducer acting on a mechanical constraint undergone by a first sensitive zone of the optical fiber portion, in such a way that a value of a measurable property of a first optical signal conveyed by the non-acoustic optical fiber is representative of the electrical signal, and at least one photovoltaic cell coupled electrically to the non-acoustic sensor so as to electrically supply the sensor.

Aspects of the present disclosure describe systems, methods and structures employing optical fiber sensing to monitor highway/roadway/street conditions (i.e., potholes, pavement cracks, etc.) in real-time, continuously, and while the highway/roadway/street remains in operation (in-service monitoring). Systems, methods, and structures according to aspects of the present disclosure may employ machine learning (ML) algorithms including neural networks to provide and or report on highway conditions so monitored/sensed. Of further advantage, systems, methods, and structures for optical fiber sensing for highway maintenance may operate in real-time, continuously, long-term, in-service, and may employ existing telecommunications optical cables without additional deployment cost(s) or disruption of telecommunications traffic.

A surface shape determination system includes a surface shape sensor in the form of a flexible and stretchable elastomeric substrate with strain/displacement sensing elements embedded in it. The sensor may be a single-core optical fiber with a series of fiber Bragg Gratings (FBGs) located at predetermined positions along its length. A light source provides an incident light spectrum at one end of the fiber. Each grating of the fiber has index modulation which causes particular wavelengths of the light spectrum that do not satisfy the Bragg condition to be reflected back in the fiber. The refractive index of each grating changes with strain on the substrate due to deflection of it. An interrogator captures the reflected wavelengths and retrieves signal information therefrom. A processor receives the output of the interrogator and performs non-linear regression analysis on the information using a neural network to reconstruct the surface morphology in real-time.

A device comprises a fixed element, a mobile element, a physical measurement sensor secured to the mobile element and a link allowing a transmission of information between the sensor and the fixed element, the sensor generating a primary signal representative of the physical measurement. The device further comprises a converter of the primary signal into a light signal. The converter is secured to the mobile element. The link is an optical path. The light signal is propagated freely between the fixed element and the mobile element along the optical path. The sensor comprises a power supply module receiving energy from the fixed element without contact.

The present disclosure provides a fixed-position defect doping method for a micro-nanostructure based on a self-alignment process, including: S1, sequentially forming a sacrificial layer and a photoresist layer on a surface of a crystal substrate; S2, performing a lithography on the photoresist layer to form a mask hole according to a micro-nano pattern; S3, performing an isotropic etching on the sacrificial layer through the mask hole, and amplifying the micro-nano pattern to the sacrificial layer; S4, performing an ion implantation doping on an exposed crystal surface below the mask hole; S5, removing the photoresist layer, and depositing a mask material; S6, removing the sacrificial layer, and transferring a micro-nano amplified pattern in the sacrificial layer to a mask material pattern; and S7, etching an exposed crystal surface, and removing the mask material on the surface and forming a specific defect by annealing.

Embodiments disclosed herein include a substrate support having a sensor assembly, and processing chamber having the same. In one embodiment, a substrate support assembly has a puck having a workpiece support surface, a gas hole formed through the workpiece support surface, and a sensor assembly disposed in the gas hole. The substrate support assembly further has a transition conduit fluidly coupled to the gas hole, and a connection coupled to the transition conduit. The connection has a first opening fluidly coupled to the transition conduit and a second opening coupled to a control system, where the control system is coupled to the sensor assembly.

A sensor apparatus and system for measuring pressure, temperature or both with a single interrogator includes a sensor having a cavity, a diaphragm and an optical element or base for conducting energy to and from the cavity and diaphragm. The two surfaces of the diaphragm and a surface of optical element and either surface of the diaphragm are partially reflecting surfaces and respectively define two optical path distances (OPDs) that produce preferential reflections and interference patterns at different optical frequencies or wavelengths that are respectively affected by pressure or temperature. Arranging the OPDs such that the fundamental frequency and harmonics of preferential reflections one OPD do not coincide with the fundamental frequency or harmonics of another OPD provides for both temperature and pressure measurement with a single interrogator and without complex spectral analysis.

An apparatus is provided which comprises pressure pass-thru means, which includes: an optic fiber having a first end and a second end; a first connector coupled to the first end; a second connector coupled to the second end; a housing between the first and second ends, wherein the housing covers a portion of the optic fiber, wherein a portion of the optic fiber in the housing is bare; a filing material inside the housing; and a swaged gland fitting on the housing to secure the apparatus to a pressure boundary.