Upstream process equipment transmits a predetermined fluid to downstream process equipment. A valve fluidly couples the upstream process equipment to the downstream process equipment. A first pressure sensor and a first temperature sensor are coupled to the upstream process equipment and upstream from the valve. A second pressure sensor and a second temperature sensor are coupled to the downstream process equipment and downstream from the valve. A control system is coupled to the first pressure sensor, the first temperature sensor, the second pressure sensor, and the second temperature sensor. The control system determines a first fluid flowrate of the predetermined fluid using a fluid flow model based on pressure data from the first pressure sensor and the second pressure sensor, temperature data from the first temperature sensor and the second temperature sensor, a size of the valve, at least one fluid parameter regarding the predetermined fluid, and a valve flow coefficient of the valve.

The invention comprises a thermal flow sensor for determining the temperature and the flow velocity of a flowing measuring medium, comprising: a functional element which is configured to determine the temperature of the measuring medium and to influence the temperature of the measuring medium; and a control and evaluation unit which is configured to determine the temperature of the measuring medium in a first interval of time by means of the functional element and to determine the flow velocity of the measuring medium in a second interval of time following the first interval of time, and a method for determining the temperature and the flow velocity of the measuring medium by means of the thermal flow sensor according to the invention, and a sensor system comprising such a thermal flow sensor and a further sensor type.

The invention comprises a thermal flow sensor for determining the temperature and the flow velocity of a flowing measuring medium, comprising: a functional element which is configured to determine the temperature of the measuring medium and to influence the temperature of the measuring medium; and a control and evaluation unit which is configured to determine the temperature of the measuring medium in a first interval of time by means of the functional element and to determine the flow velocity of the measuring medium in a second interval of time following the first interval of time, and a method for determining the temperature and the flow velocity of the measuring medium by means of the thermal flow sensor according to the invention, and a sensor system comprising such a thermal flow sensor and a further sensor type.

A flow control module with a thermal mass flow meter is provided. The thermal mass flow meter facilitates measuring both a flow rate and a temperature of a fluid passing through the flow control module. Fluids may experience different flow characteristics at different temperature ranges. The flow control module includes a proportional control valve for selectively adjusting the flow rate of the fluid passing through the flow control module. Upon detecting that the temperature of the fluid is outside of a temperature range for the fluid, a controller is configured to load a different set of calibration parameters for controlling the operation of the proportional control valve to accommodate the different flow characteristics of the fluid at that temperature. Additionally, the controller is configured to detect bubbles using the thermal mass flow meter based upon the difference in thermal conductivity of gasses and liquids.

A flow control module with a thermal mass flow meter is provided. The thermal mass flow meter facilitates measuring both a flow rate and a temperature of a fluid passing through the flow control module. Fluids may experience different flow characteristics at different temperature ranges. The flow control module includes a proportional control valve for selectively adjusting the flow rate of the fluid passing through the flow control module. Upon detecting that the temperature of the fluid is outside of a temperature range for the fluid, a controller is configured to load a different set of calibration parameters for controlling the operation of the proportional control valve to accommodate the different flow characteristics of the fluid at that temperature. Additionally, the controller is configured to detect bubbles using the thermal mass flow meter based upon the difference in thermal conductivity of gasses and liquids.

An air sensor system including a pressure or airflow sensor, a filter housing that defines an air flow path to the air pressure sensor, and a filter in the air flow path. The filter includes a micro filter and a hydrophobic membrane. The hydrophobic membrane is downstream of the micro filter in the air flow path to the pressure or airflow sensor.

A thermal type sensor molded from a mold resin having an opening has a problem in that the residual stress of the mold resin in the opening causes peeling at the interface having poor adhesion. A physical quantity sensor has a construction having a semiconductor chip having a detector unit 3, a frame 8a on which the semiconductor chip is mounted, a mold resin portion 10 which encapsulates the semiconductor chip and the frame and has an opening through which the detector unit is exposed to the outside, and a stress absorbing layer 6 which is formed between an end of the opening in the mold resin portion and a wiring layer formed in the detector unit, and which is formed from a metal material that absorbs a stress from the end.

A thermal type sensor molded from a mold resin having an opening has a problem in that the residual stress of the mold resin in the opening causes peeling at the interface having poor adhesion. A physical quantity sensor has a construction having a semiconductor chip having a detector unit 3, a frame 8a on which the semiconductor chip is mounted, a mold resin portion 10 which encapsulates the semiconductor chip and the frame and has an opening through which the detector unit is exposed to the outside, and a stress absorbing layer 6 which is formed between an end of the opening in the mold resin portion and a wiring layer formed in the detector unit, and which is formed from a metal material that absorbs a stress from the end.

A physical quantity measuring device includes a chip package and a casing. The casing fixedly stores the chip package. The casing includes a first bypass passage allowing a gas to be measured taken from a main passage, to flow in a first measuring unit, and a second bypass passage allowing the gas to be measured taken from the main passage, to flow in a second measuring unit. The chip package is configured to dispose a signal processing unit between the first and second measuring units. The casing has a cooling unit that allows the gas to be measured from the main passage to flow between the first measuring unit and the second measuring unit, and cooling the signal processing unit.

A physical quantity measuring device includes a chip package and a casing. The casing fixedly stores the chip package. The casing includes a first bypass passage allowing a gas to be measured taken from a main passage, to flow in a first measuring unit, and a second bypass passage allowing the gas to be measured taken from the main passage, to flow in a second measuring unit. The chip package is configured to dispose a signal processing unit between the first and second measuring units. The casing has a cooling unit that allows the gas to be measured from the main passage to flow between the first measuring unit and the second measuring unit, and cooling the signal processing unit.