A thin film forming method includes: a first operation of supplying a source gas at a first flow rate into a reactor; a second operation of purging the source gas in the reactor to an exhaust unit; a third operation of supplying a reactive gas at a second flow rate into the reactor; a fourth operation of supplying plasma into the reactor; and a fifth operation of purging the reactive gas in the reactor to the exhaust unit, wherein, during the second to fifth operations, the source gas is bypassed to the exhaust unit, and a flow rate of the source gas bypassed to the exhaust unit is less than the first flow rate. According to the thin film forming method, the consumption of the source gas and the reactive gas may be reduced, and the generation of reaction by-products in the exhaust unit may be minimized.

A method of assessing flow from an individual well in a set of oil and gas wells includes flowing output from a first subset of the wells collectively to a first flow measurement system through a first conduit while flowing output from a second subset of the wells collectively to a second flow measurement system through a second conduit different from the first conduit. Total flow through the first flow measurement system and total flow through the second measurement system are measured. Output from said individual well is rerouted from one of said first and second measurement systems to the other of said first and second measurement systems. Total flow through at least one of the first and second measurement systems is measured after the re-routing. A difference between the total flow rate before the re-routing and after the re-routing is used to assess flow rate from said individual well.

A method of assessing flow from an individual well in a set of oil and gas wells includes flowing output from a first subset of the wells collectively to a first flow measurement system through a first conduit while flowing output from a second subset of the wells collectively to a second flow measurement system through a second conduit different from the first conduit. Total flow through the first flow measurement system and total flow through the second measurement system are measured. Output from said individual well is rerouted from one of said first and second measurement systems to the other of said first and second measurement systems. Total flow through at least one of the first and second measurement systems is measured after the re-routing. A difference between the total flow rate before the re-routing and after the re-routing is used to assess flow rate from said individual well.

Disclosed are process control systems and methods incorporating a crystal microbalance (CM) (e.g., a quartz crystal microbalance (QCM)) into gas flow line(s) entering and/or exiting a processing chamber. A CM measures the resonance of a quartz crystal sensor contained therein as gas flows over that crystal sensor and can, thereby be used to accurately monitor, in real time, the mass flow rate of the gas. The mass flow rate may indicate that gas contamination has occurred and, in response, a controller can cause the gas flow to stop. Additionally, the mass flow rate may indicate the desired result will not be achieved within the processing chamber and, in response, advanced process control (APC) can be performed (e.g., the controller can adjust the gas flow). CM(s) incorporated into gas flow lines entering and/or exiting a processing chamber can provide precise measurements for process monitoring at minimal cost.

The disclosed embodiments include systems and methods to dynamically configure data values stored on a mass flow controller (MFC). In one embodiment, the MFC includes an inlet for receiving fluid, a flow path, a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path, and a valve for regulating a flow of the fluid out of an outlet of the MFC. The MFC also includes a storage medium having a fluid model of the fluid and a file system for configuring the fluid model. The MFC further includes a processor operable to perform operations including receiving instructions to configure the fluid model, obtaining MFC data indicative of a change to the fluid model, and utilizing the file system to dynamically update the fluid model with MFC data indicative of the change in the fluid model.

The present invention provides a new and unique apparatus featuring a signal processor or processing module configured to: receive signaling containing information about a fluid flow passing through a pipe that is channelized causing flow variations in the fluid flow; and determine corresponding signaling containing information about a fluid flow characteristic of the fluid flow that depends on the flow variations caused in the fluid flow channelized, based upon the signaling received. The signal processor or processing module may be configured to provide the corresponding signaling, including where the corresponding signaling contains information about the fluid flow characteristic of the fluid flow channelized.

An assembly for measuring metal powder material mass flow rate during direct metal deposition. A detection strip is placed in the gas-blown metal powder material flow path. The detection strip is fixed in one end and suspended at the other end. The flowing metal powder material particles induce displacement to the detection strip. A displacement measurement sensor measures the amount of displacement of the detection strip. The amount of displacement of the detection strip gives relationship to the amount of the metal powder material flowing in the metal powder material flow path. The detection strip and the sensor are connected to a housing with a metal powder material inlet port and metal powder material outlet port and includes internal features for smooth travel of metal powder material particles.

An assembly for measuring metal powder material mass flow rate during direct metal deposition. A detection strip is placed in the gas-blown metal powder material flow path. The detection strip is fixed in one end and suspended at the other end. The flowing metal powder material particles induce displacement to the detection strip. A displacement measurement sensor measures the amount of displacement of the detection strip. The amount of displacement of the detection strip gives relationship to the amount of the metal powder material flowing in the metal powder material flow path. The detection strip and the sensor are connected to a housing with a metal powder material inlet port and metal powder material outlet port and includes internal features for smooth travel of metal powder material particles.

A yield measurement system for a cold planer having a conveyor is disclosed. The yield measurement system may include a hydraulic motor configured to propel the conveyor, a first sensor configured to generate a first signal indicative of a force acting on the conveyor by material being moved by the conveyor, and a second sensor configured to generate a second signal indicative of a pressure differential across the hydraulic motor. The yield measurement system may also include a controller in communication with the first and second sensors. The controller may be configured to determine when the conveyor is not transferring material based on the second signal, and automatically recalibrate the yield measurement system based on the first signal when the conveyor is not transferring material.

A yield measurement system for a cold planer having a conveyor is disclosed. The yield measurement system may include a hydraulic motor configured to propel the conveyor, a first sensor configured to generate a first signal indicative of a force acting on the conveyor by material being moved by the conveyor, and a second sensor configured to generate a second signal indicative of a pressure differential across the hydraulic motor. The yield measurement system may also include a controller in communication with the first and second sensors. The controller may be configured to determine when the conveyor is not transferring material based on the second signal, and automatically recalibrate the yield measurement system based on the first signal when the conveyor is not transferring material.