Disclosed are process control systems and methods incorporating a crystal microbalance (CM) (e.g., a quartz crystal microbalance (QCM)) into gas flow line(s) entering and/or exiting a processing chamber. A CM measures the resonance of a quartz crystal sensor contained therein as gas flows over that crystal sensor and can, thereby be used to accurately monitor, in real time, the mass flow rate of the gas. The mass flow rate may indicate that gas contamination has occurred and, in response, a controller can cause the gas flow to stop. Additionally, the mass flow rate may indicate the desired result will not be achieved within the processing chamber and, in response, advanced process control (APC) can be performed (e.g., the controller can adjust the gas flow). CM(s) incorporated into gas flow lines entering and/or exiting a processing chamber can provide precise measurements for process monitoring at minimal cost.

Disclosed are process control systems and methods incorporating a crystal microbalance (CM) (e.g., a quartz crystal microbalance (QCM)) into gas flow line(s) entering and/or exiting a processing chamber. A CM measures the resonance of a quartz crystal sensor contained therein as gas flows over that crystal sensor and can, thereby be used to accurately monitor, in real time, the mass flow rate of the gas. The mass flow rate may indicate that gas contamination has occurred and, in response, a controller can cause the gas flow to stop. Additionally, the mass flow rate may indicate the desired result will not be achieved within the processing chamber and, in response, advanced process control (APC) can be performed (e.g., the controller can adjust the gas flow). CM(s) incorporated into gas flow lines entering and/or exiting a processing chamber can provide precise measurements for process monitoring at minimal cost.

A grain mass flow sensor assembly of an agricultural harvester has a continuously curved sensor plate positioned to receive a grain flow from an exit of the grain elevator. The continuously curved sensor plate is configured to change the direction of the grain flow in order to generate a reaction force for measuring the grain mass flow rate of the grain flow. The continuously curved sensor plate is attached to a sensor plate to load cell mounting bracket. The sensor plate to load cell mounting bracket is attached to a single point load cell torque or moment compensated force transducer at a single mounting point. The single point load cell torque or moment compensated force transducer produces a mass flow sensor signal that is proportionate to the grain mass flow rate.

A grain mass flow sensor assembly of an agricultural harvester has a continuously curved sensor plate positioned to receive a grain flow from an exit of the grain elevator. The continuously curved sensor plate is configured to change the direction of the grain flow in order to generate a reaction force for measuring the grain mass flow rate of the grain flow. The continuously curved sensor plate is attached to a sensor plate to load cell mounting bracket. The sensor plate to load cell mounting bracket is attached to a single point load cell torque or moment compensated force transducer at a single mounting point. The single point load cell torque or moment compensated force transducer produces a mass flow sensor signal that is proportionate to the grain mass flow rate.

An electronic utility gas meter using MEMS thermal mass flow sensor to measure gas custody transfer data in city gas metering application is disclosed in the present invention. The meter is designed to have its mechanical connectors identical to those of the current diaphragm gas meters while the insertion metrology unit guided channel is placed coaxially in the main flow channel inside the meter body with gas flow conditioning apparatus. The mechanical installation of the electronic utility gas meter then can be fully compatible with the current mechanical utility gas meters, which allows a seamless replacement. The electronic utility gas meter provides gas metrology that significantly improves the accuracy of the city gas metering, and provides additional benefits for data safety, enhanced gas chemical safety, billing alternatives and full data management either locally or remotely.

An electronic utility gas meter using MEMS thermal mass flow sensor to measure gas custody transfer data in city gas metering application is disclosed in the present invention. The meter is designed to have its mechanical connectors identical to those of the current diaphragm gas meters while the insertion metrology unit guided channel is placed coaxially in the main flow channel inside the meter body with gas flow conditioning apparatus. The mechanical installation of the electronic utility gas meter then can be fully compatible with the current mechanical utility gas meters, which allows a seamless replacement. The electronic utility gas meter provides gas metrology that significantly improves the accuracy of the city gas metering, and provides additional benefits for data safety, enhanced gas chemical safety, billing alternatives and full data management either locally or remotely.

A method of calibrating a mass flow sensor while harvesting grain includes sensing an accumulated mass of a portion of grain within the grain tank with a first sensor. A mass flow rate sensor is calibrated based at least in part on a signal of the first sensor.

A method of calibrating a mass flow sensor while harvesting grain includes sensing an accumulated mass of a portion of grain within the grain tank with a first sensor. A mass flow rate sensor is calibrated based at least in part on a signal of the first sensor.

A small and light-weight flowmeter realizes the compensation of a zero point drift. A mass flowmeter includes: a centrifugal force/centripetal force detection strain gauge adhered to a part acted upon by a centrifugal force or a centripetal force of fluid in a pipe line in which the fluid flows and a flow rate zero point drift compensation strain gauge adhered to a position different from that of the centrifugal force/centripetal force detection strain gauge. A pulse wave propagation time between the two points is used to compensate a zero point drift of a flow rate.

A small and light-weight flowmeter realizes the compensation of a zero point drift. A mass flowmeter includes: a centrifugal force/centripetal force detection strain gauge adhered to a part acted upon by a centrifugal force or a centripetal force of fluid in a pipe line in which the fluid flows and a flow rate zero point drift compensation strain gauge adhered to a position different from that of the centrifugal force/centripetal force detection strain gauge. A pulse wave propagation time between the two points is used to compensate a zero point drift of a flow rate.