A measured quantity of gas is introduced into a gas reservoir via a filling station including a flow meter. The quantity of gas transferred by the filling station to the reservoir is measured by the flow meter. The measured quantity of gas is reduced or increased by a predetermined corrective amount to yield a corrected gas quantity.

A method for determining the flow rate of combustible fluid injected into a combustion chamber (120) of a turbine (100) includes determining the cross section of the orifice of the at least one injector (112, 113, 114, 115) through which the combustible fluid is injected into the combustion chamber (120). The pressure of the combustible fluid upstream of the orifice of the injector (112, 113, 114, 115) is determined. The pressure downstream of the orifice of the injector (112, 113, 114, 115) is determined. The flow rate of combustible fluid flowing through the orifice of the at least one injector (112, 113, 114, 115) is determined.

A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.

An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.

A measured quantity of gas is introduced into a gas reservoir via a filling station including a flow meter. The quantity of gas transferred by the filling station to the reservoir is measured by the flow meter. The measured quantity of gas is reduced or increased by a predetermined corrective amount to yield a corrected gas quantity.

Disclosed herein are embodiments of a mass flow control apparatus, systems incorporating the same, and methods using the same. In one embodiment, a mass flow control apparatus comprises a flow modulating valve configured to modulate gas flow in a gas flow channel, a sensor device, such as a micro-electromechanical (MEMS) device, configured to generate a signal responsive to a condition of the gas flow, and a processing device operatively coupled to the flow modulating valve and the sensor device to control the flow modulating valve based on a signal received from the sensor device.

A gas flow control system for delivering a plurality of gas flows. The gas flow control system has a gas flow path extending from a gas inlet to first and second gas outlets. First and second flow restrictors are operably coupled to the gas flow path. First and second valves are operably coupled to the gas flow path such that when both first and second valves are in a fully open state, flows of gas from the first and second gas outlets are split according to the impedances of the first and second flow restrictors.

Devices, methods, and systems for operating gas meters are described herein. The systems may include a gas measuring system connectable to a gas line, where the gas measuring system may include a flow rate sensor, a pressure sensor, and a controller in communication with the flow rate sensor and the pressure sensor. The flow rate sensor and the pressure sensor may be configured to sense measures of a gas passing through the gas line. The controller may repeatedly obtain pressure measurements at set pressure measurement times. Measures from the flow sensor may be monitored and when a measure from the flow sensor measure meets a flow rate criteria, the controller may trigger an extra pressure measurement without waiting for a next pressure measurement time. The controller may initiate closing of a gas valve when a measure from the pressure sensor exceeds a threshold value.

Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

A gas safety device includes flow path, shutoff valve that shuts off flow path, flow rate measurement unit that measures a flow rate of gas, gas-side absolute pressure sensor that measures absolute pressure of the gas, atmosphere-side absolute pressure sensor that measures absolute pressure of atmospheric pressure, and pressure value transition detector that detects a transition state of the absolute pressure measured by gas-side absolute pressure sensor. Further provided are sensor drive controller that controls driving of atmosphere-side absolute pressure sensor in accordance with a value of pressure transition in pressure value transition detector, and gas pressure determination unit that calculates gas supply pressure from a difference between pressure values measured when the two sensors are driven. Control circuit is further provided to shut off flow path with shutoff valve when determining anomaly from a flow rate measured by flow rate measurement unit and gas supply pressure calculated by gas pressure determination unit.