A manufacturing system includes a processing chamber, an gas supply, and a mass flow control apparatus coupled to the gas supply and the processing chamber. The mass flow control apparatus includes a flow restriction element configured to restrict a flow rate of a gas, a bypass flow element configured to control the flow rate of the gas in parallel to the flow restriction element, and a pressure regulator configured to control a pressure of the gas between the pressure regulator and the flow restriction element and/or a pressure of the gas between the pressure regulator and the flow restriction element. The manufacturing system further includes a controller that is configured to flow gas from the gas supply to the processing chamber via the mass flow control apparatus in view of a first pressure setting. The controller further determines to modify the flow of the gas from a first flow rate associated with the first pressure setting to a second flow rate. The controller further determines a second pressure setting associated with the second flow rate and causes the pressure regulator to modify the pressure of the gas between the pressure regulator and the flow restriction element and/or the pressure regulator and the bypass flow element in view of the second pressure setting.

A reference volume for use with pressure change flow rate measurement apparatus has an internal structure comprising elements with cross section and length comparable to the cross section and length of adjacent interstitial fluid regions. The reference volume may have one or more heat conduction elements exterior to and in good thermal contact with a corrosion resistant material that defines the internal fluid holding region.

A mass flow controller assembly includes a housing defining a cavity, a plurality of internal passages, a first inlet, a first outlet, a second inlet, and a second outlet. A valve is connected to the housing, has an inlet fluidly coupled to the second outlet of the housing and an outlet fluidly coupled to the second inlet of the housing. The valve is configured to control fluid flow from the second outlet of the housing to the second inlet of the housing. A microelectromechanical (MEMS) Coriolis flow sensor is arranged in the cavity, includes an inlet fluidly coupled by at least one of the plurality of internal passages to the first inlet of the housing and is configured to measure at least one of a mass flow rate and density of fluid flowing through the MEMS Coriolis flow sensor. An outlet of the MEMS Coriolis flow sensor is fluidly coupled by at least one of the plurality of internal passages to the second outlet of the housing. The second inlet of the housing is fluidly coupled by at least one of the plurality of internal passages to the first outlet of the housing.

Gas meters including a first portion and a second portion are provided. The first portion is separate and distinct from the second portion and a physical barrier is positioned between the first portion and the second portion. The first portion includes at least a motor associated with a shut-off valve for the gas meter and the second portion includes at least an area for a gas stream to flow through. Related gas regulating devices are also provided herein.

A system and a method for accurately testing gas leak detectors by considering multiple operational parameters as per the standard requirements are disclosed. The system comprises one or more gas cylinders, a test execution chamber, mass flow controllers (MFCs), and a control system. The test execution chamber is connected to the gas cylinders via test gas pipelines and a plurality of valves, and the mass flow controllers. The test execution chamber further comprises a first chamber and a second chamber, which are connected to form a closed cycle, thereby saving consumption of the testing gases. The control system in communication with the mechanized system, thereby controlling the operation of the system for accurately testing the gas leak detector test samples. The performance of the one or more gas leak detector test samples is controlled by adjusting the density of the testing gas to a predetermined value and as per the standard requirements.

A gas meter and a center device, including an analyzer, analyze a cause of an abnormality determination. The center device requests analysis-use data necessary to analyze the cause of the abnormality determination from the gas meter, through a communication by a center communication unit, based on the abnormality type data received from the gas meter. The gas meter transmits the analysis-use data requested by the center device to the center device by a meter communication unit, and the analyzer of the center device determines the cause of the abnormality determination based on the received analysis-use data.

Disclosed herein is an apparatus for controlling a flow rate of a gas including a flow restriction element configured to restrict a flow rate of a gas; a pressure regulator coupled to an inlet of the flow restriction element, wherein the pressure regulator is configured to control a pressure of the gas between the pressure regulator and the flow restriction element; a flow meter coupled to an outlet of the flow restriction element, wherein the flow meter is configured to measure the flow rate of the gas at an outlet of the flow restriction element; and a controller operatively coupled to the pressure regulator and the flow meter, wherein the controller is to receive a measurement of the flow rate by the flow meter, determine a pressure setting associated with a target flow rate, and cause the pressure regulator to have the pressure setting.

Disclosed herein is an apparatus for controlling a flow rate of a gas including a flow restriction element configured to restrict a flow rate of a gas; a pressure regulator coupled to an inlet of the flow restriction element, wherein the pressure regulator is configured to control a pressure of the gas between the pressure regulator and the flow restriction element; a flow meter coupled to an outlet of the flow restriction element, wherein the flow meter is configured to measure the flow rate of the gas at an outlet of the flow restriction element; and a controller operatively coupled to the pressure regulator and the flow meter, wherein the controller is to receive a measurement of the flow rate by the flow meter, determine a pressure setting associated with a target flow rate, and cause the pressure regulator to have the pressure setting.

The present invention relates to a gas fuse cock embedded with a flow rate sensor and an automatic gas safety shut-off device having the same, in which a flow rate sensor unit is injection-molded integrally with the gas fuse cock, and the flow rate sensor is mounted to reduce leakage of gas without a separate connecting component, and the present invention provides a gas fuse cock embedded with a flow rate sensor and an automatic gas safety shut-off device having the same, in which the flow rate sensor is directly embedded in a housing of a gas valve without a separate connecting tube, and a connecting portion is eliminated, thereby improving safety against leakage of gas.

A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The third flow component mounting region has a first sensing port fluidly coupled to the gas outlet of the monolithic base.