G01F25/15

FLOW RATE VERIFICATION UNIT
20170299420 · 2017-10-19 · ·

A flow rate verification unit that uses the pressure variation value per unit time of a pressure measurement value measured by a pressure gauge and a temperature measurement value measured by a thermometer in a state where a second shut-off valve is closed to calculate the volume between a flow-rate control valve and the second shut-off valve and verifies the flow rates of mass flow controllers one at a time, wherein a first verification side connection part attachably and detachably connected to an integrated gas unit is provided upstream from the pressure gauge and a serially connected verification gas input valve, verification side mass flow controller, and verification side flow rate control valve are provided in parallel with the second shut-off valve.

Systems and methods for analyzing fluid from a separator

A method for analyzing the reliability of a measured volumetric flow rate of a fluid in a gas outlet line of a gas-liquid separator is provided. In one embodiment, analyzing the reliability of the measured volumetric flow rate includes measuring a gas volume fraction of the fluid in the gas outlet line, comparing the measured gas volume fraction of the fluid to a threshold gas volume fraction level, and determining whether the measured volumetric flow rate of the fluid is reliable based on the comparison. Additional systems, devices, and methods are also disclosed.

RATE-OF-CHANGE FLOW MEASUREMENT DEVICE
20220049982 · 2022-02-17 ·

A rate-of-change flow measurement device is provided including first pressure sensor, a position control valve with a valve position sensor, a second sensor position and a chamber comprising a part of the flow path of the device, and an isolation valve, arranged in this order along the flow path of the device. The device receives valve position data from the valve position sensor and pressure data from the pressure sensors, and calculates a volume of the chamber at least in part using the valve position data when a calibration of a device-under-test is performed by decreasing a pressure of the chamber or increasing the pressure of the chamber while opening the position control valve to maintain the pressure reading of the first pressure sensor constant to stay at a pressure set point.

System and method for using a rate of decay measurement for real time measurement and correction of zero offset and zero drift of a mass flow controller or mass flow meter

The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter. For example, in one embodiment, a self-validating mass flow controller is disclosed that does not require any software modification to a tool/tool controller in which the mass flow controller is being utilized. In other embodiments, a self-validating mass flow controller is disclosed that does not require any hardware or mechanical changes to an existing mass flow controller. Still, the disclosed embodiments further include a self-validating mass flow controller that is configured to determine valve leak and sensor offset simultaneously for performing real time in-situ correction of a mass flow controller's output for zero offset or zero drift in the presence of valve leak.

METHOD AND SYSTEM FOR ULTRASONIC AIRFLOW MEASUREMENTS

A system for determining a velocity of air flowing in an air flow direction through an opening. The system includes first and second transducer assemblies with first and second transducers. The first and second transducers are positioned in respective predetermined first and second positions in which the first and second transducers are intervisible. The first and second transducers are disposed at respective selected tilt angles when in the respective predetermined first and second positions. Each of the first and second transducer assemblies includes means for measuring respective measured tilt angles of the first and second transducers. The system also includes a controller configured to compare the measured tilt angles to the selected tilt angles for the first and second transducers respectively, to determine whether there are measured differences therebetween exceeding a predetermined permitted difference. The controller generates a dislocation signal if the measured difference exceeds the permitted difference.

Methods for monitoring a flow controller coupled to a process chamber

Methods and apparatus for in-situ calibration of a flow controller are provided herein. In some embodiments, a method of flowing a gas includes providing a flow controller configured to provide a first gas at a first value of a flow rate based on a calculated first relationship determined by using a standard gas; determining an actual first relationship between the flow rate and the setpoint for the first gas from a plurality of values of the flow rate of the first gas determined at a corresponding plurality of values of the setpoint of the flow controller, wherein each of the plurality of values of the flow rate is determined from flowing the first gas through the flow controller at corresponding ones of the plurality of values for the setpoint; and flowing the first gas at the first value of the flow rate based on the actual first relationship.

Ultrasonic flowmeter and method for measuring flow
09816847 · 2017-11-14 · ·

An ultrasonic flow meter that includes a first ultrasonic transducer for making incident a first ultrasonic signal against a pipe through which a fluid flows; a second ultrasonic transducer, disposed in a position capable of receiving the first ultrasonic signal, for making incident a second ultrasonic signal against pipe; a flow velocity computation component for computing the flow velocity of the fluid within pipe based on a first time period during which the first ultrasonic signal arrives at the second ultrasonic transducer and on a second time period during which the second ultrasonic signal arrives at the first ultrasonic transducer; a logarithmic correction function saving component for saving a logarithmic correction function; and a logarithmic correction component for correction the flow velocity by using the correction coefficient that corresponds to the Reynolds number of the fluid.

METHOD AND SYSTEM OF MONITORING A METER SET USING A SENSOR

By implementing a monitoring system to a fluid meter set, the meter set can be monitored for abnormalities including fluid leaks or other system failures as well as gas blend or gas density. A monitoring system that uses sensors such as vibration sensors can detect fluid leaks or other system failures based on abnormal conditions such as vibrations of the meter set. Sensors may be positioned at various locations along the meter set where leakage of fluids or other system failures may be possible. Sensory information detected by sensors are communicated to processing or control unit which can trigger an alarm signaling unit alerting of a potential fluid leak. Such a system of monitoring the integrity of a fluid meter set can help to quickly identify and respond to a fluid leak without necessarily relying on visual or olfactory cues associated with the fluid being leaked.

FUEL LEAK DETERMINATION VIA PREDICTIVE MODELING
20210404904 · 2021-12-30 ·

Data characterizing a fuel storage facility can be received from one or more of a plurality of sensors disposed in the fuel storage facility. A fuel leak prediction for the fuel storage facility can be determined by a server, based on the received data, and further based on at least one predictive model that predicts whether a fuel leak exists in the fuel storage facility. The fuel leak prediction can be provided by the server. Related apparatus, systems, methods, techniques, and articles are also described.

REAL-TIME DETERMINATION OF METER DRIFT VIA LOSS QUALIFICATION AND QUANTIFICATION
20210403312 · 2021-12-30 ·

In one aspect, data characterizing a fuel storage facility can be received from a sensor in operable communication with the fuel storage facility. An estimate of meter drift of a flow meter of a fuel dispenser in fluid communication with the fuel storage facility can be determined based on the received data. The estimate of meter drift can be determined based on at least one predictive model that predicts whether a calibration parameter characterizing a calibration of the flow meter has deviated from a predetermined flow meter calibration parameter. The estimate of meter drift can be provided.