A device for measuring the speed or flow of a gas at a temperature different from an ambient temperature is provided, which includes: a first platform suspended by first arms above a support designed to be kept at an ambient temperature, the first arms comprising thermoelectric strips designed to supply a first voltage based on the difference between the temperatures of the first platform and the support; and a processing unit designed to supply the speed or flow measurement on the basis of the first voltage, the gas temperature and the ambient temperature.

Safety monitoring systems and methods include a mesh communications network and an EVC (Electronic Volume Corrector) installed in one or more gas distribution components and/or industrial metering components in a gas distribution station and/or an industrial metering station. A group of sensors can be configured, which includes, for example, a gas leak sensor, a pressure transducer, a temperature transducer, an intrusion sensor and/or other types of sensors. Such sensors can be located within the gas distribution station and/or industrial metering station. The sensors communicate wirelessly with the EVC and the gas distribution and/or industrial metering components through the mesh communications network.

A method of obtaining the output flow rate of the flow rate controller according to an aspect is provided. The method including a first step of outputting gas whose flow rate is adjusted according to a designated set flow rate from the flow rate controller, in a state where the diaphragm mechanism is opened; a second step of adjusting the diaphragm mechanism so that the pressure in the second pipe is the target pressure value, in a state where the output of gas from the flow rate controller is continued in the first step; and a third step of obtaining the output flow rate of the flow rate controller by using a pressure value and a temperature value in the tank, after the pressure in the second pipe is set to the target pressure value in the second step.

In a method of determining a flow rate of a flow of a fluid of interest in a fluidic system, a raw flow rate signal (Q.sub.sensor) is determined using a flow rate sensor. The raw flow rate signal is corrected using a flow rate correction function (Δ) to obtain a corrected flow rate signal (Q.sub.sensor,corr). The flow rate correction compensates for a flow rate signal error that is caused by integration of the flow rate sensor into the fluidic system. It is based on a reference correction function (δ) that is indicative of a flow rate signal error for a flow of a reference fluid due to the integration of the flow rate sensor into the fluidic system.

The invention relates to a method for verifying a calibration of an ultrasonic spirometer, the method comprising determining an actual value of a distance between a first ultrasonic transducer and a second ultrasonic transducer of a spirometer, determining a difference between the actual value of the distance and a nominal value of the distance that is assigned to the spirometer, and accepting an actual calibration of the spirometer if an absolute value of the difference is smaller than or equal to a first threshold value, or refusing the actual calibration of the spirometer if the absolute value of the difference is bigger than the first threshold value, wherein the first threshold value is 5% of the nominal value of the distance. The invention further relates to a spirometer that is adapted to carry out this method as well as to a method for calibrating a spirometer.

Devices and methods for mass flow verification are provided. A mass flow verifier includes a chamber configured to receive a fluid, a critical flow nozzle upstream of the chamber, a chamber valve, a downstream valve, and a bypass valve. The chamber valve is configured to selectively enable fluid flow from the critical flow nozzle to the chamber. The downstream valve is configured to selectively enable fluid flow from the chamber to a downstream location. The bypass valve is configured to selectively enable fluid flow from the critical flow nozzle to a dump location. The mass flow verifier further includes a controller configured to verify flow rate of the fluid based on a rate of rise in pressure of the fluid as detected by a pressure sensor in the chamber.

A gases humidification system includes a measuring chamber and a mixing chamber. The mixing chamber has one or more mixing elements that improve a mixing of gases before reaching the measuring chamber. Ultrasonic sensing is used to measure gases properties or characteristics within the measuring chamber. A baffle or a vane may be used to control and direct the gases flow through the mixing chamber as the gases flow moves into the measuring chamber.

Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

A sensor device and method to determine an amount of gas in the environment. The sensor device comprises at least one transducer. A sensing material (e.g., a metal-organic framework or a polymer film) is disposed on the transducer, and the sensing material captures an amount of the gas that depends on a temperature of the sensing material and a concentration or partial pressure of the gas. At least one detector or readout circuit is arranged to detect responses of the transducer as it captures gas in the sensing material and to output transducer measurement signals indicative of the responses of the transducer. At least one processor is arranged to process (e.g., demodulate) the transducer measurement signals according to the frequency of the temperature modulation. The processor determines the amount of gas according to the demodulated signals.

The embodiments of the present disclosure provide a method and an Internet of Things (IoT) system for determining a gas meter measurement failure of a smart gas, the method including: by the smart gas data center, obtaining, based on the smart gas sensing network platform, gas flow information of pipelines of each level from at least one flow monitoring device, the at least one flow monitoring device being configured in the smart gas object platform; by the indoor smart gas device management sub-platform, determining a candidate area based on the gas flow information; determining a target gas meter based on gas meter reading information of the candidate area, and then determining a maintenance plan for the target gas meter; and sending the maintenance plan to the smart gas data center, and sending the maintenance plan to the smart gas user platform based on the smart gas service platform.