Provided are systems and methods for line volume calibration, and measurement of fluid samples delivered to an interrogation point. In various embodiments, a known fluid volume comprising a sample line fluid and a secondary fluid is delivered to a fluid boundary sensor. The fluid boundary sensor assists in determining the position of the boundaries between the various fluids, and the positions of these boundaries are used to determine the sample line fluid volume.

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space for treating a substrate therein; a support unit configured to support the substrate at the treating space; a nozzle for supplying a liquid to the substrate placed on the support unit; a liquid supply unit configured to supply the liquid to the nozzle and have a flow meter; and a flow rate measuring unit configured to verify an error of the flow meter; and a controller for controlling the liquid supply unit and the flow rate measuring unit, and wherein the flow rate measuring unit comprises: a cup for accommodating the liquid; a measuring means configured to verify a level of the liquid accommodated in the cup; and a discharge line for discharging the liquid within the cup and having a discharge valve installed thereon, and wherein the controller controls the liquid supply unit to discharge a liquid of a first amount to the cup for a first time in a state at which the discharge valve is closed, and controls the measuring means to determine whether an error has occurred in the flow meter by determining whether the level of the liquid accommodated in the cup is the first amount.

Aspects generally relate to methods, systems, and apparatus for conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system. In one aspect, a corrected flow curve is created for a range of target flow rates across a plurality of setpoints. In one implementation, a method of conducting a calibration operation for a plurality of mass flow controllers (MFCs) of a substrate processing system includes prioritizing the plurality of MFCs for the calibration operation. The prioritizing includes determining an operation time for each MFC of the plurality of MFCs, and ranking the plurality of MFCs in a rank list according to the operation time for each MFC. The method includes conducting the calibration operation for the plurality of MFCs according to the rank list and during an idle time for the substrate processing system.

Methods and systems for determining a base field prover volume of a field prover include connecting together a transfer meter assembly, a master prover, and the field prover in series. A flow of fluid at a first flow rate is provided and a calibration sequence is performed at the flow rate. The calibration sequence includes counting pulses generated by the transfer meter assembly over a duration of each pass of the master prover and a pass of the field prover. An intermediate calibrated field prover volume is determined from a ratio of the field prover pulse count to the average master prover pulse count, multiplied by a base master prover volume. The calibration sequence can be repeated to provide at least three intermediate calibrated field prover volumes at the first flow rate. The calibration sequence can be repeated at different flow rates to arrive at the base field prover volume.

A closed loop system for the calibration of a multiphase meter, such as a multiphase flow meter or water cut meter, and a method of employing the system in calibration of multiphase meters in crude oil production processes. The system includes an oil and water separation vessel, oil and water flow meters, valves, pumps, and a single phase calibration unit. The system employs a two-step calibration process. First internal single phase oil and water meters are calibrated using the single phase calibration unit; subsequently multiphase meter calibration is achieved using the two precalibrated single phase flow meters.

A method of calculating a transient flow rate of a flowed process gas comprises flowing process gas through a mass flow controller into a chamber of known volume and measuring successive data sample points which include pressure data, temperature data, and a time value for each successive data sample point. Groups of successive data sample points are identified wherein each group shares one or more successive data sample points with another group, and ratio values are calculated for each of the successive data sample points wherein each ratio value is a ratio between the pressure data and a product of temperature and gas compressibility data for each respective time value. A line of best fit of the ratio values is determined within at least one group, and then the transient flow rate of the flowed process gas is calculated using a pressure rate of rise technique wherein the pressure rate of rise technique utilizes a ratio value determined from the line of best fit for at least one time value within the at least one group.

Methods and systems for configuring a fluid flow meter include a processor obtaining a measurement signal recorded by the fluid flow meter. The processor can determine a whitening frequency band. The processor can then construct a whitening filter based on the measurement signal and the whitening frequency band. The processor can then generate a reference signal based on the whitening filter and the measurement signal. The processor can provide the whitening filter and the reference signal for use by the fluid flow meter to measure a time shift between the reference signal and another measurement signal.

A volumetric measurement vessel is characterized by a bottom wall having an inverted saddle shape defining a concave trough at its topside, and mounted in a tilted orientation placing the trough at an obliquely inclined angle. An outlet of the vessel is positioned at a lower end of the trough at an angle matching the tilted bottom wall to provide smooth, vortex free draining of the tank body at the outer periphery thereof. The bottom wall is cut as a flat piece of squashed oval shape, and subsequently bent into curved form to create the trough. A circumferential wall of the vessel is cut as a flat piece with a wave-shaped bottom edge, then bent into circular form to align major and minor troughs of the wave shape with opposite ends of the bottom wall's concave trough.

A system and method including a weighing scale configured to measure a starting weight at a start time of a vaporizer chamber with a vaporizable liquid, the weighing scale configured to measure an ending weight at an end time and a controller configured to determine a vapor flow rate out of the vaporizer chamber based on a difference between the start time and the end time.

An inspection device for an ultrasound flow meter is provided that has an inspection chamber having a fluid at a flow velocity of zero and having a first installation station for a first ultrasonic transducer and having a second installation station for a second ultrasonic transducer of the ultrasound flow meter so that the ultrasonic transducers are aligned toward one another in the installed state and span an ultrasound measurement path through the inspection chamber on the connection line. The invention further relates to a method of inspecting and/or calibrating an ultrasound flow meter.