An improved fluid level verification apparatus with an integral, internal source of illumination that is powered by an integral, internal energy source and is activated by a motion sensor or any other sensor commonly known In the art to detect the presence of a person in dark or dimly lit environments. The preferred light source is a light emitting diode (LED). A second embodiment of the integral, internal source of illumination that is powered by an integral, internal energy source and is activated by a motion sensor or any other sensor commonly known in the art to detect the presence of a person in dark or dimly lit environments is applied to a fluid reservoir tank.

A method is for calibrating a peristaltic pump, and for dispensing a quantity of liquid by a peristaltic pump. A device for producing sterile preparations that can execute the methods.

A gas flow metrology system for a substrate processing system includes N primary valves selectively flowing gas from N gas sources, respectively, where N is an integer. N mass flow controllers are connected to the N primary valves, respectively, to flow N gases from the N gas sources, respectively. N secondary valves selectively flow gas from the N mass flow controllers, respectively. A gas flow path connects the N secondary valves to a flow metrology system located remote from the N secondary valves, wherein the gas flow path includes a plurality of gas lines. A controller is configured to perform a hybrid flow metrology by selectively using a first flow metrology and a second flow metrology that is different from the first flow metrology to determine an actual flow rate for a selected gas at a desired flow rate from one of the N mass flow controllers.

An improved fluid level verification apparatus with an integral, internal source of illumination that is powered by an integral, internal energy source and is activated by a motion sensor or any other sensor commonly known in the art to detect the presence of a person in dark or dimly lit environments. The preferred light source is a light emitting diode (LED). A second embodiment of the integral, internal source of illumination that is powered by an integral, internal energy source and is activated by a motion sensor or any other sensor commonly known in the art to detect the presence of a person in dark or dimly lit environments is applied to a fluid reservoir tank.

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of calibrating an apparatus for controlling gas flow is disclosed. Specifically, the apparatus may be calibrated on installation using a two-step process of measuring the volume of gas box downstream from the apparatus by flowing nitrogen gas into the gas box and measuring the resulting temperature and rate of pressure rise. Using the computed volume of the gas box, a sweep of several mass flow rates may be performed using the process gas and the gas map for the process gas. The apparatus is calibrated based on the measured temperature and pressure values, which allow calculation of the actual mass flow rate for the process gas as compared with the commanded mass flow rates.

A calibration system for calibrating a pressure output of a fluid injector having a housing configured for connecting to the fluid injector; a drive member engagement portion configured for contacting a drive member of the fluid injector; a compressible member, which may have a known modulus of compression, connected at its proximal end to the drive member engagement portion, wherein the compressible member is compressed with movement of the drive member of the fluid injector between a first, uncompressed position and a second, at least partially compressed position of the fluid injector in a distal direction; and a sensor connected to the compressible member is described. The sensor is configured for measuring at least one of a force imparted by the drive member and a displacement of the drive member when the compressible member is in the second, at least partially compressed position. The system may generate a calibration curve for the drive member of the fluid injector and allow the generation of a fault condition. Methods for calibrating a fluid injector are also described.

An automated liquid inventory monitoring and inventory reconciliation system. The system uses a liquid densitometer to precisely measure the density of liquid being dispensed. This allows the system to account for the significant temperature-induced volume variations existing in common liquids such as gasoline. In the preferred embodiments, a fuel inventory processor tracks the quantity of fuel loaded into the tank and the quantity of fuel dispensed to maintain an ongoing computation of the quantity of fuel that should be present in the tank. An accurate tank depth measurement device is also employed. The processor compares the tank depth measurement to the computed quantity of fuel in the tank and uses the values to create an updated tank strapping chart.

A system and method including a weighing scale configured to measure a starting weight at a start time of a vaporizer chamber with a vaporizable liquid, the weighing scale configured to measure an ending weight at an end time and a controller configured to determine a vapor flow rate out of the vaporizer chamber based on a difference between the start time and the end time.

A gas flow metrology system for a substrate processing system includes N primary valves selectively flowing gas from N gas sources, respectively, where N is an integer. N mass flow controllers are connected to the N primary valves, respectively, to flow N gases from the N gas sources, respectively. N secondary valves selectively flow gas from the N mass flow controllers, respectively. A gas flow path connects the N secondary valves to a flow metrology system located remote from the N secondary valves, wherein the gas flow path includes a plurality of gas lines. A controller is configured to perform a hybrid flow metrology by selectively using a first flow metrology and a second flow metrology that is different from the first flow metrology to determine an actual flow rate for a selected gas at a desired flow rate from one of the N mass flow controllers.

A mass flow control apparatus and methods for calibrating and tuning the mass flow apparatus are provided. The mass flow apparatus can be calibrated by receiving a calibration input signal that provides one or more properties of a gas that is flowing through a main fluid flow path and performing one or more measurements, using one or more sensors, on the gas. The calibration includes determining a calibration parameter based on the results of the one or more measurements and the calibration input signal and adjusting a proportional valve, based on the calibration parameter, to adjust a flow rate, of the gas through the apparatus, to match a setpoint flow rate.