An integrated polarization interferometer includes a polarization beam splitter for separating incident complex waves, a first mirror attached to a first surface of the polarization beam splitter, for reflecting a first polarization transmitted through the polarization beam splitter to the polarization beam splitter, and a second mirror attached to a second surface of the polarization beam splitter, for reflecting a second polarization transmitted through the polarization beam splitter to the polarization beam splitter. Accordingly, it is possible to measure dynamic spectroscopic polarization phenomenon with extremely high robustness disturbances due to an external vibration and the like by using the integrated polarization interferometer, thereby improving measurement repeatability and accuracy of measurement.

An integrated polarization interferometer includes a polarization beam splitter for separating incident complex waves, a first mirror attached to a first surface of the polarization beam splitter, for reflecting a first polarization transmitted through the polarization beam splitter to the polarization beam splitter, and a second mirror attached to a second surface of the polarization beam splitter, for reflecting a second polarization transmitted through the polarization beam splitter to the polarization beam splitter. Accordingly, it is possible to measure dynamic spectroscopic polarization phenomenon with extremely high robustness disturbances due to an external vibration and the like by using the integrated polarization interferometer, thereby improving measurement repeatability and accuracy of measurement.

An optical emission spectroscopy (OES) calibration system includes a chamber, an adapter, an OES device, a calibration device, and a spectrometer. The chamber includes a viewport. The adapter is fastened to the viewport, and includes a first beam splitter and a second beam splitter. The OES device detects plasma light generated in the chamber and transmitted through the adapter and generates OES data based on the detected plasma light. The calibration device includes a light source, and generates correction data for compensating for deviations in the OES data. The spectrometer detects light emitted from the light source and split by the first beam splitter or the second beam splitter. Each of the OES device, the calibration device, and the spectrometer is fastened to the adapter through an optical cable, and the calibration device generates the correction data using an intensity of light detected by the spectrometer.

The present disclosure relates to a spectrometer arrangement for analyzing optical radiation from a light source comprising an echelle grating for dispersion of the radiation entering the spectrometer arrangement in a main dispersion direction, a dispersion element for dispersing the radiation in a cross-dispersion direction, the main dispersion direction and the cross-dispersion direction having a predeterminable angle to each other, and a detector unit for acquiring a first spectrum of a first part of the radiation comprising a first predeterminable wavelength range. According to the present disclosure, the spectrometer arrangement comprises a first optical element, which is arranged or configured in such a way that a second spectrum of a second part of the radiation comprising a second predeterminable wavelength range differing from the first can be acquired by means of the detector unit.

A spectrum measurement system includes a laser light source system, an optical signal receiving system and a beam splitting system. The laser light source system is configured to emit a laser output light beam to the object. The laser output light beam includes at least one of a first and a second peak-wavelength laser. After the object is radiated by the laser output light beam, the object generates a conversion beam. The conversion beam includes at least one of a first and a second spectral signals. The optical signal receiving system includes at least a first and a second signal receivers being respectively configured to receive the first and the second spectral signals. The beam splitting system provides a plurality of light exiting paths being configured to respectively transmit the first and the second spectral signals to the first and the second signal receivers.

A spectroscopic system may include: a probe having a probe tip and an optical coupler, the optical coupler including an emitting fiber group and first and second receiving fiber groups, each fiber group having a first end and a second end, wherein the first ends of the fiber groups are formed into a bundle and optically exposed through the probe tip; a light source optically coupled to the second end of the emitting fiber group, the light source emitting light in at least a first waveband and a second waveband, the second waveband being different from the first waveband; a first spectrometer optically coupled to the second end of the first receiving fiber group and configured to process light in the first waveband; and a second spectrometer optically coupled to the second end of the second receiving fiber group and configured to process light in the second waveband.

A spectroscopic system may include: a probe having a probe tip and an optical coupler, the optical coupler including an emitting fiber group and first and second receiving fiber groups, each fiber group having a first end and a second end, wherein the first ends of the fiber groups are formed into a bundle and optically exposed through the probe tip; a light source optically coupled to the second end of the emitting fiber group, the light source emitting light in at least a first waveband and a second waveband, the second waveband being different from the first waveband; a first spectrometer optically coupled to the second end of the first receiving fiber group and configured to process light in the first waveband; and a second spectrometer optically coupled to the second end of the second receiving fiber group and configured to process light in the second waveband.

Embodiments disclosed herein include an optical sensor system. In an embodiment, the optical sensor system comprises a processing chamber and a sensor. In an embodiment, the sensor comprises a first diffraction grating oriented in a first direction, a second diffraction grating oriented in a second direction, and a detector for detecting electromagnetic radiation diffracted from the first grating and the second grating. In an embodiment, the optical sensor system further comprises an optical coupling element, where the optical coupling element optically couples an interior of the processing chamber to the sensor.

An optical emission spectroscopy (OES) calibration system includes a chamber, an adapter, an OES device, a calibration device, and a spectrometer. The chamber includes a viewport. The adapter is fastened to the viewport, and includes a first beam splitter and a second beam splitter. The OES device detects plasma light generated in the chamber and transmitted through the adapter and generates OES data based on the detected plasma light. The calibration device includes a light source, and generates correction data for compensating for deviations in the OES data. The spectrometer detects light emitted from the light source and split by the first beam splitter or the second beam splitter. Each of the OES device, the calibration device, and the spectrometer is fastened to the adapter through an optical cable, and the calibration device generates the correction data using an intensity of light detected by the spectrometer.

Aspects of the disclosure relate to a multi-pass gas cell that includes a set of two or more reflectors, an input collimating optical component, and an output focusing optical component. The input and output optical components are integrated with at least one of the two or more reflectors. For example, the input and output optical components may be integrated on opposite ends of a single one of the reflectors or may be integrated on the same end of a single reflector. The input and output optical components may further be integrated with different reflectors. In some examples, the set of reflectors and optical components may be fabricated within the same substrate.