The present invention discloses a multichannel broadband high-resolution spectrograph, comprising a plurality of light source incident slits, a multichannel integrated grating, a multichannel shared two-dimensional focus imaging mirror and a two-dimensional area array detector which are sequentially disposed along a light source incident or reflection line, wherein the multichannel integrated grating consists of a plurality of sub-gratings, incident light enters the corresponding integrated gratings along the light source incident slits and then is focused by the shared two-dimensional focus imaging mirror after diffraction of the integrated grating, and diffraction light in a full-spectrum region is incident onto a focal plane of the two-dimensional area array detector for detection. No any mechanical displacement part is disposed, multichannel, full-spectrum and high-speed detection and analysis is achieved, and the present disclosure has high spectrum resolution and working reliability.

Embodiments disclosed herein include an optical sensor system. In an embodiment, the optical sensor system comprises a processing chamber and a sensor. In an embodiment, the sensor comprises a first diffraction grating oriented in a first direction, a second diffraction grating oriented in a second direction, and a detector for detecting electromagnetic radiation diffracted from the first grating and the second grating. In an embodiment, the optical sensor system further comprises an optical coupling element, where the optical coupling element optically couples an interior of the processing chamber to the sensor.

Disclosed is a resonant wavelength measurement apparatus, including a light source and a measurement unit. The measurement unit has a guided-mode resonance filter and a photosensitive element. The guided-mode resonance filter has a plurality of resonant areas, and each resonant area has a different filtering characteristic, to receive first light in the light source transmitted by a sensor or receive second light in the light source reflected by the sensor. The first light has a first corresponding pixel on the photosensitive element, the second light has a second corresponding pixel on the photosensitive element, and the first corresponding pixel and the second corresponding pixel correspond to a same resonant wavelength.

A multi-stage parallel spectroscopy system has a plurality of dispersion stages, with the output of one dispersion stage serving as input to the next dispersion stage. Each dispersion stage separates input radiation into respective spectral components along a respective dispersion axis. In embodiments, the dispersion axes for the dispersion stages are substantially parallel to each other. Thus, the disclosed systems may be considered single-axis parallel spectroscopy configurations, in contrast to cross-axis parallel spectroscopy configurations. An optical system disposed in an optical path between dispersion stages can spatially filter a set of wavelengths from the input to the next dispersion stage to increase spectral extinction without sacrificing throughput or parallel operation. In some embodiments, the same dispersive element provides the spectral separation for multiple dispersion stages, by way of a recirculating optical system that redirects the spectral output from the dispersive element back to its input.

A method and apparatus is provided for implementing a parametric down-conversion (PDC)-based calibration comprising calibrating a measuring instrument; disposing a pinhole at a position of a light-emitting sample for which the measuring instrument needs to be calibrated; irradiating a nonlinear crystal with a light source; setting the nonlinear crystal by ensuring a phase-matching wavelength of the nonlinear crystal is set at one boundary of a desired bandwidth; acquiring one or more PDC spectrums by the measuring instrument; obtaining peak values and their corresponding wavelengths from each acquired spectrum; and obtaining a response function based on the peak values and corresponding wavelengths.

An optical splitter includes a housing, a diffraction grating, and an optical filter. An incidence unit and an emission unit are provided in the housing. The optical filter is disposed between the emission unit and the diffraction grating in the housing. An anti-reflection coating is formed on a surface of a filter main body of the optical filter on the emission unit side. Therefore, from light dispersed by the diffraction grating and having passed through the optical filter, light reflected at a back surface of the emission unit passes through the optical filter without being reflected by a back surface of the optical filter and is directed toward the inside of the housing. As a result, light having passed through the optical filter and having a wavelength other than a target wavelength is inhibited from being emitted from an emission slit of the emission unit.

A subject identification device includes: an illuminator configured to generate illumination light including components at a plurality of wavelength bands, each of the components having a characteristic in accordance with a respective one of settings; an imager configured to generate an image signal by capturing light from a subject under the illumination light having the illumination characteristic; and a processor including hardware. The processor is configured to: define an illumination characteristic of the illumination light; analyze the image signal to acquire spectral information of the subject; and cross check the spectral information of the subject with subject identification information in order to identify the subject. When the subject is not identified, the processor is configured to define another illumination characteristic that causes spectral information of potentials for the subject to be identified, and subsequently each of the imager and the processor performs a process.

An optical instrument of very high resolution is provided that can be used for monitoring semiconductor processes. Very high resolution may be considered in this application space to be resolutions sufficient to permit resolving of individual molecular rovibrational emission lines. In one example an optical instrument is provided that includes: (1) an optical interface that receives an optical fiber, (2) a narrow band pass filter that filters out a portion of an optical signal received via the optical fiber, (3) optical components that are selectively combined to process at least a portion of the unfiltered optical signal, wherein the optical components include a sensor that receives the unfiltered optical signal, and (4) one or more processors that process electrical signals from the sensor. The optical instrument can be a spectrometer suitable for a process control instrument.

A field spectral radiometer includes a support structure and a remote sensing head disposed on the support structure. The remote sensing head includes a central axis, a first optical element disposed on a first side of the central axis and defining a first optical path for a first optical channel, and a second optical element disposed on a second side of the central axis and defining second optical path for a second optical channel. An instrumentation assembly disposed on the support structure. the instrumentation assembly includes a first detection path associated with the first optical channel and a second detection path associated with the second optical channel, the first and second detection path include optical indexers for manipulating the first and second optical channels. The field spectral radiometer may include a calibration assembly disposed on the base. The calibration assembly may include a calibrating light source for calibrating the remote sensing head.

A spectrophotometer is provided, which comprises a receiving part diffusing an incident light, a first broadband filter group, and a detector detecting the light having passed through the first broadband filter group, in order to easily select and detect a plurality of lights having specific wavelengths, wherein the first broadband filter group comprises a first broadband filter arranged to have a first angle with respect to an incident direction of light to enable the incident light to pass through a first wavelength band, a second broadband filter arranged to have a second angle, which is different from the first angle, with respect to an incident direction of light to enable the light having passed through the first broadband filter to pass through a second wavelength band, and a first path compensation means for adjusting a path of the light having passed through the second broadband filter to be identical to a path of the light having passed through the first broadband filter, wherein the first broadband filter, the second broadband filter and the first path compensation means are arranged in series with respect to the incident direction of light. Accordingly, it is possible to increase the efficiency of the outputted light compared to the incident light, and to detect a plurality of lights having the desired specific wavelengths at the same time.