A spectral filter module includes a spectral filter that splits light having a wavelength corresponding to an input drive voltage from incident light and outputs the light, a drive unit that outputs the drive voltage based on an input wavelength command value, and a drive controller that outputs the wavelength command value and changes the wavelength command value every time a trigger signal is input from the outside.

An actuator drive apparatus according to a first aspect includes a first member, a second member that faces the first member via a gap, a gap sensor that detects a dimension of the gap, a first actuator that changes the dimension of the gap through input of a first voltage signal, and a second actuator that changes the dimension of the gap through input of a second voltage signal, in which the first voltage signal is a voltage signal that becomes a constant bias voltage after a lapse of a predetermined time, and includes an overshoot signal larger than the bias voltage before the lapse of the predetermined time, and the second voltage signal is a voltage signal that is feedback-controlled so that a detection value detected by the gap sensor approaches a target value.

The present application relates to a system for performing time-resolved interferometric spectroscopy of incoming light. In some embodiments, the system includes one or more optical elements, a photo-detector, a capacitance detector, and one or more processors. Upon application of a varying input signal to the one or more optical elements, a change to an optical characteristic is caused resulting in a changing interference pattern produced by the incoming light incident on the one or more optical elements. During the application of the varying input signal, the photo-detector may detect an intensity of light output from the one or more optical elements and the capacitance detector may detect a capacitance of the one or more optical elements.

An autofocusing method includes causing light having n wavelengths different from one another to sequentially pass through a spectral filter and acquiring n image frames corresponding to the n wavelengths, n being an integer greater than or equal to two, selecting a wavelength corresponding to the image frame having the largest statistical value from the n image frames, the statistical value being one of the average, median, and mode of class values of pixels contained in a first region out of entire measurement pixels in each of the image frames, and determining a focusing point in a second region wider than the first region out of the entire measurement pixels while causing the light having the selected wavelength to pass through the spectral filter.

System and method for narrowing the transmission curves obtained using a spectral imager in which spectral images are acquired using a MEMS Fabri-Perot (FP) tunable filter. A method includes acquiring a first plurality of broad-band spectral images associated with respective MEMS FP etalon states and processing the first plurality of broad-band spectral images into a second plurality of narrow-band spectral images.

System and method for narrowing the transmission curves obtained using a spectral imager in which spectral images are acquired using a MEMS Fabri-Perot (FP) tunable filter. A method includes acquiring a first plurality of broad-band spectral images associated with respective MEMS FP etalon states and processing the first plurality of broad-band spectral images into a second plurality of narrow-band spectral images.

A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.

A sensor degradation evaluation method according to an aspect of the present disclosure includes an evaluation step of evaluating degradation of at least one of a sensor for coarse measurement that receives interference fringes produced by a spectrometer for coarse measurement and a sensor for fine measurement that receives interference fringes produced by a spectrometer for fine measurement, and the evaluation step includes causing a plurality of kinds of laser light having wavelengths different from one another to be sequentially incident on the spectrometer for coarse measurement and the spectrometer for fine measurement and acquiring a coarse-measurement wavelength and a fine-measurement wavelength on a wavelength basis from a plurality of the received interference fringes, acquiring a degradation parameter on a wavelength basis from the coarse-measurement wavelength and the fine-measurement wavelength on a wavelength basis, and comparing the degradation parameter on a wavelength basis with a threshold.

A colorimetric system includes: a communication section that receives the color value of a color for which colorimetry has been performed by a colorimetric device that performs colorimetry; and a comparison processing section that performs comparison processing between the received color value and the color value of a reference color. The comparison processing section decides whether a line colorimetry error occurred on a line under colorimetry. When the comparison processing section decides that a line colorimetry error occurred, the communication section transmits information about the line colorimetry error to the colorimetric device.

An apparatus for measuring time-resolved optical spectrum includes a light source, a sensor for collecting, forming, manipulating and measuring the intensity of the optical radiation, and a controller coupled to the light source and sensor. The sensor includes at least one optical delay element to provide a time delay to a first portion of the optical radiation. The sensor arrangement further includes an optical spectral disperser to split the delayed first portion and the second portion of the optical radiation into dispersed radiation having a plurality of wavelengths, and a sensor element configured to receive each wavelength of the dispersed radiation on a different spatial region, and measure the light intensity associated with each wavelength of the dispersed radiation. The controller collects the light intensity associated with each wavelength of the dispersed radiation measured by the sensor element to form a time-resolved optical spectrum.