Patent classifications
G01J3/2823
INSPECTION SYSTEM INCLUDING REFERENCE SPECIMEN AND METHOD OF FORMING SEMICONDUCTOR DEVICE
An inspection system includes a main support die configured to receive a target specimen; an auxiliary support die adjacent to the main support die and configured to receive a reference specimen; a cleaning device configured to remove contaminants from the reference specimen; an objective lens unit configured to direct light to main support die from a light source adjacent to the objective lens unit; a spectroscope between the objective lens unit and the light source; a detector adjacent to the objective lens unit; an imaging device between the objective lens unit and the detector; and a computer system in communication with the detector.
Optical system capable of improving spatial resolution of hyperspectral imaging and optical alignment method using the same
Provided are an optical system capable of improving the spatial resolution of hyperspectral imaging and an optical alignment method using the same. The optical system includes a digital micromirror device (DMD) having a rectangular shape, a first cylindrical lens curved to focus and form an image on an axis corresponding to a shorter side of the DMD, and a second cylindrical lens curved in the same axial direction as the axis to collimate light reflected from the DMD.
SYSTEMS AND METHODS FOR COMPOUND CONCENTRATION SENSING IN FLUIDS
A non-contact system for the sensing the concentration of a compound includes a hyperspectral imaging device configured to capture a hyperspectral image of a fluid, a flow cell configured to enable the capturing of a hyperspectral image of a fluid, a process, and a memory. The memory includes instructions stored thereon which, when executed by the processor, cause the system to generate a hyperspectral image of the fluid in the flow cell, generate several spectral signals based on the hyperspectral image, provide the spectral signal as an input to a machine learning network, and predict by the machine learning network the concentration of a compound in a fluid.
IMAGING DEVICE WITH SPECTROMETER AND METHODS FOR USE THEREWITH
A user device for imaging a scene includes a first plurality of optical sensors coupled to a substrate for collecting an image of a scene and a second plurality of optical sensors coupled to the substrate for collecting spectral information from the image. A plurality of sets of interference filters are associated with the second plurality of optical sensors, where each interference filter of a set of interference filters is configured to pass light in one of a plurality of wavelength ranges to one or more optical sensors of the second plurality of optical sensors and each optical sensor of the plurality of optical sensors is associated with a spatial area of the image. A processor is adapted to receive an output from the first plurality of optical sensors and the second plurality of optical sensors and determine, based on the spectral information, a target area within the scene. The processor is further adapted to retrieve focus data for the scene, determine a focus distance for the target area and output user-perceptible information to an output display.
APPARATUS FOR DETECTING MATTER
An apparatus for detecting matter including: a light source arrangement adapted to emit a first and a second set of light beams towards a first detection zone through which the matter is provided. A spectroscopy system adapted to receive and analyse light which is reflected and/or scattered by matter in the first detection zone. A laser triangulation system including, a laser arrangement adapted to emit a line of laser light towards a second detection zone. A camera-based sensor arrangement configured to receive and analyse light which is reflected and/or scattered by matter in the second detection zone. The received light of the spectroscopy system completely or partially intersects the received light of the camera-based sensor arrangement and/or the line of laser light.
PROCESSING APPARATUS, METHOD, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
A processing apparatus is connected to one or more terminals including a hyperspectral sensor that generates compressed image data which is hyperspectral information of a target compressed as two-dimensional image information over a network. The processing apparatus includes a storage device that stores data sets of samples and a first reconstruction table for generating hyperspectral data from the compressed image data, the data set of each sample includes hyperspectral data of the sample and data indicative of a property value of the sample; and a processing circuit that generates a statistical model for estimating the property value from the hyperspectral data on the basis of the data sets of the samples and generates a second reconstruction table by editing the first reconstruction table in accordance with the statistical model thus generated.
Hyperspectral camera
An optical system for a hyperspectral camera and a hyperspectral camera comprising such an optical system are disclosed. The optical system comprises fore optics (1000), an image sensor (1800), a slit (1500), relay optics (1200), a first optical element (2000) positioned before the slit (1500), where the first optical element (2000) is defocusing light in a direction parallel to the slit (1500) while keeping focus in a direction perpendicular to the slit (1500); and a second optical element (2100) positioned after the slit (1500), where the second optical element (2100) is compensating the defocus of the depicted scene introduced by the first element (2000).
Imaging apparatus
An imaging apparatus includes an image sensor, a filter array disposed on an optical path from a target object to the image sensor and including two-dimensionally-arranged optical filters, and a processing circuit that generates at least four pieces of spectral image data based on an image acquired by the image sensor. The optical filters include various types of optical filters with different spectral transmittance. Each of the at least four pieces of spectral image data indicates an image corresponding to one of at least four wavelength bands. The filter array includes at least one characteristic section. The processing circuit detects a relative position between the filter array and the image sensor based on the at least one characteristic section in the image acquired by the image sensor, and compensates for deviation between the relative position and a preliminarily-set relative position when the processing circuit detects the deviation.
Peak alignment for the wavelength calibration of a spectrometer
Aspects of the present disclosure provide a method for wavelength calibration of a spectrometer. The method can include receiving a calibration light signal having first spectral components of different first wavelengths; separating and projecting the first spectral components onto pixels of a detector of the spectrometer; establishing a relation between the first wavelengths and pixel numbers of first pixels on which the first spectral components are projected; calculating first residual errors between the first wavelengths and estimated wavelengths that are associated by the relation to the pixel numbers of the first pixels; receiving an optical signal having a second spectral component of a second wavelength; projecting the optical signal onto a second pixel; and calibrating the second wavelength based on a second residual error calculated based on one of the first residual errors that corresponds to a pair of the first pixels between which the second pixel is located.
Spectral camera control device, spectral camera control system, storage medium storing spectral camera control program, and network system for distributing spectral camera control program
A spectral camera control device, being installed, along with a spectral camera provided with a liquid crystal tunable filter, in an aircraft capable of stationary flight. The spectral camera control device causes the spectral camera to capture a spectral image in a snapshot mode each time a transmission wavelength of the liquid crystal tunable filter is switched while the aircraft is in stationary flight, and the spectral camera control device causes a plurality of spectral images to be captured in succession at a same transmission wavelength when an SN ratio of the captured spectral image is less than a predetermined threshold.