A polarized Raman Spectrometric system for defining parameters of a polycrystaline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line-shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.

The invention discloses a Trace Microanalysis Microscope System for high throughput screening. A multimodal imaging sensor arrangement acquires color, multispectral, hyperspectral and multi-directional polarized imaging, independently and in combinations thereof. In one aspect of this disclosure, the multimodal acquisition is combined with a plurality of sample illumination modes, further expanding the dimensionality of the generated data. In another aspect of this invention, machine learning-based methods combining and comparing a- priori data with the acquired multimodal data space, provide unique identifiers for the composition of the analyzed target objects. In yet another aspect of this invention, projection mapping of the identified compositional features navigates secondary sampling for subsequent analyses.

A microscope device includes an opening (31) that includes a first slit and a second slit through which a plurality of pieces of light from an observation target resulting from a plurality of pieces of irradiation light emitted to the observation target and having different wavelengths pass, a dispersion element that wavelength-disperses the plurality of pieces of light passing through the opening (31), and an imaging element (32) that receives the plurality of pieces of light wavelength-dispersed by the dispersion element. The imaging element (32) performs light reception so that, as for the plurality of pieces of light wavelength-dispersed, zeroth-order light of light passing through the second slit and first-order light of light passing through the first slit do not overlap with each other.

Improved imaging and spectrographic devices and systems, and in particular hyperspectral systems and devices suitable for use in analysis of soils and other geological substances, as well as other types of samples. The hyperspectral systems comprise diffraction gratings and a linear image sensor, and optionally one or more of light sources, lenses, slits, and digital light processors, and corresponding control processors and memory. Among other advantages, the hyperspectral systems and devices enable detailed spectrographic analysis of specific points, regions, and/or areas in analytical samples such as core samples and other types of soil blocks, using visible, infrared, and/or ultraviolet electromagnetic radiation.

A signal processing method according to one aspect of the present disclosure includes obtaining compressed image data including two-dimensional image information that is obtained by compressing hyperspectral information corresponding to wavelength bands included in a target wavelength range, obtaining setting data including information designating one or more sub-wavelength ranges that are parts of the target wavelength range, and generating, based on the compressed image data, two-dimensional images corresponding to wavelength bands included in the one or more sub-wavelength ranges.

Provided is an inductively coupled plasma spectrometric system for measuring an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric system including: a spectrometer configured to resolve light emitted in a measurement region set in the plasma into a plurality of wavelength components; a detection device configured to detect a spatial distribution of the resolved light; and a measuring device configured to measure the detected spatial distribution at every measurement unit time, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region.

Disclosed are embodiments of an improved apparatus and system, and associated methods for optically diagnosing a semiconductor manufacturing process. A hyperspectral imaging system is used to acquire spectrally-resolved images of emissions from the plasma, in a plasma processing system. Acquired hyperspectral images may be used to determine the chemical composition of the plasma and the plasma process endpoint. Alternatively, a hyperspectral imaging system is used to acquire spectrally-resolved images of a substrate before, during, or after processing, to determine properties of the substrate or layers and features formed on the substrate, including whether a process endpoint has been reached; or before or after processing, for inspecting the substrate condition.

Optical spectrometers may be used to determine the spectral components of electromagnetic waves. Spectrometers may be large, bulky devices and may require waves to enter at a nearly direct angle of incidence in order to record a measurement. What is disclosed is an ultra-compact spectrometer with nanophotonic components as light dispersion technology. Nanophotonic components may contain metasurfaces and Bragg filters. Each metasurface may contain light scattering nanostructures that may be randomized to create a large input angle, and the Bragg filter may result in the light dispersion independent of the input angle. The spectrometer may be capable of handling about 200 nm bandwidth. The ultra-compact spectrometer may be able to read image data in the visible (400-600 nm) and to read spectral data in the near-infrared (700-900 nm) wavelength range. The surface area of the spectrometer may be about 1 mm.sup.2, allowing it to fit on mobile devices.

The present invention relates to a hazardous material measuring apparatus capable of analyzing concentration and components of various hazardous materials. The hazardous material measuring apparatus analyzes an optical spectrum obtained by a spectrometer or a hyperspectral image obtained by a hyperspectral camera, thereby analyzing concentration and components of the hazardous materials to be measured.

Disclosed are a system and techniques to determine a color of an optical fiber in a fiber optic cable. A spectrophotometer camera may obtain a color value of the optical fiber. A fiber adaptor is operable to hold a single optical fiber of a fiber optic cable in a field of view of the spectrophotometer camera. A memory storing instructions that, when executed by a processor, enable identifying a color of the optical fiber. The color value may be compared to a color value of a number of reference colors. A color match score value may be generated for the color value with respect to each reference color. A confidence value may be obtained for a pair of color match scores that are closest in score value. Based on the confidence value, one of the reference colors is identified as a color of the optical fiber.