Methods and apparatus for obtaining a vibrational circular dichroism (VCD) image using a discrete frequency infrared (DFIR) microscope are disclosed. The method includes generating a pulsed laser beam comprising a spectral frequency, which may be tunable; modulating the laser beam to generate circularly polarized light; illuminating a sample and collecting, and detecting an optical signal transmitted or transflected from the location of the sample. The detected signal is demodulated at, for example, both the pulse frequency and the sum or difference of the pulse frequency and the modulating frequency to obtain an intensity value that correspond to the absorbance, and a polarization-dependent value that corresponds to the VCD. Other configurations of the apparatus may be employed to measure VCB and VLD.

Methods and apparatus for obtaining a vibrational circular dichroism (VCD) image using a discrete frequency infrared (DFIR) microscope are disclosed. The method includes generating a pulsed laser beam comprising a spectral frequency, which may be tunable; modulating the laser beam to generate circularly polarized light; illuminating a sample and collecting, and detecting an optical signal transmitted or transflected from the location of the sample. The detected signal is demodulated at, for example, both the pulse frequency and the sum or difference of the pulse frequency and the modulating frequency to obtain an intensity value that correspond to the absorbance, and a polarization-dependent value that corresponds to the VCD. Other configurations of the apparatus may be employed to measure VCB and VLD.

A photo-thermal speckle spectroscopy device having an infrared laser, a visible laser, a foam, and a camera. The infrared and visible lasers are focused on the foam, which causes the visible laser to scatter. A camera records the speckle pattern, which shifts when the IR laser is turned on. The related method of photo-thermal speckle spectroscopy is also disclosed.

A photo-thermal speckle spectroscopy device having an infrared laser, a visible laser, a foam, and a camera. The infrared and visible lasers are focused on the foam, which causes the visible laser to scatter. A camera records the speckle pattern, which shifts when the IR laser is turned on. The related method of photo-thermal speckle spectroscopy is also disclosed.

A method for phase contrasting-correlation spectroscopy: converting an incident linearly polarized light into two polarized components (polarized divergent and convergent components, wherein the polarized divergent component is orthogonal to the polarized convergent component), focusing each of the polarized divergent component and the polarized convergent component into a focal plane, thereby producing two focus planes constituting a reference focus (RF) plane and a sample focus (SF) plane; placing a sample at the SF plane and ambient conditions of the sample at the RF plane, resulting in a phase shift between the two polarized components; reconstituting the two phase-shifted polarized components into a phase-shifted linearly polarized light; detecting the phase-shifted linearly polarized light; calculating phase and intensity of the sample from the phase-shifted linearly polarized light; establishing an autocorrelation of phase and intensity of the phase-shifted linearly polarized light; and generating correlograms of intensity and phase of the phase-shifted linearly polarized light.

A method for phase contrasting-correlation spectroscopy: converting an incident linearly polarized light into two polarized components (polarized divergent and convergent components, wherein the polarized divergent component is orthogonal to the polarized convergent component), focusing each of the polarized divergent component and the polarized convergent component into a focal plane, thereby producing two focus planes constituting a reference focus (RF) plane and a sample focus (SF) plane; placing a sample at the SF plane and ambient conditions of the sample at the RF plane, resulting in a phase shift between the two polarized components; reconstituting the two phase-shifted polarized components into a phase-shifted linearly polarized light; detecting the phase-shifted linearly polarized light; calculating phase and intensity of the sample from the phase-shifted linearly polarized light; establishing an autocorrelation of phase and intensity of the phase-shifted linearly polarized light; and generating correlograms of intensity and phase of the phase-shifted linearly polarized light.

Reflected light detecting device and method with surface reflected light components collectively be extracted/removed when detecting reflected light arising in casting light onto target-object range having non-planar surface. The device includes: a first illuminating device causing first-measurement light in predetermined polarization direction to enter target-object first region from first direction; polarization optical system position part of first-surface reflected light enters the polarization optical system, the first-surface reflected light being the first-measurement in the first region surface; a second illuminating device causing second-measurement light in the same first-measurement light polarization direction to enter second region from second direction, the second region being on the target-object surface, different from the first region; adjusting direction of the second-measurement light optical axis so part of second-surface reflected light enters the polarization optical system, the second-surface reflected light being the second-measurement in second region surface; and detecting light having passed through the polarization optical system.

Reflected light detecting device and method with surface reflected light components collectively be extracted/removed when detecting reflected light arising in casting light onto target-object range having non-planar surface. The device includes: a first illuminating device causing first-measurement light in predetermined polarization direction to enter target-object first region from first direction; polarization optical system position part of first-surface reflected light enters the polarization optical system, the first-surface reflected light being the first-measurement in the first region surface; a second illuminating device causing second-measurement light in the same first-measurement light polarization direction to enter second region from second direction, the second region being on the target-object surface, different from the first region; adjusting direction of the second-measurement light optical axis so part of second-surface reflected light enters the polarization optical system, the second-surface reflected light being the second-measurement in second region surface; and detecting light having passed through the polarization optical system.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.

A spectroscopic ellipsometry system and method for thin film measurement with high spatial resolution. The system includes a rotating compensator so that spectroscopic ellipsometric and imaging ellipsometric data are collected simultaneously with the same measurement beam. Collecting both ellipsometric data sets simultaneously increases the information content for analysis and affords a substantial increase in measurement performance.