A method is presented for determining path length fluctuations in an interferometer using a reference laser with an arbitrary frequency with respect to the measured light. The method includes: injecting reference light along signal paths of the interferometer; measuring interference between the reference light at an output of the interferometer; determining an optical phase difference between the reference light in the two signal paths of the interferometer by measuring intensity modulation of the interference between the reference light and subtracting an intended frequency modulation from the measured intensity modulation; accumulating an unwrapped phase difference between the reference light in the two signal paths of the interferometer, where the unwrapped phase difference is defined in relation to a reference; and determining path length fluctuation of light in the interferometer using the unwrapped phase difference.

A method is presented for determining path length fluctuations in an interferometer using a reference laser with an arbitrary frequency with respect to the measured light. The method includes: injecting reference light along signal paths of the interferometer; measuring interference between the reference light at an output of the interferometer; determining an optical phase difference between the reference light in the two signal paths of the interferometer by measuring intensity modulation of the interference between the reference light and subtracting an intended frequency modulation from the measured intensity modulation; accumulating an unwrapped phase difference between the reference light in the two signal paths of the interferometer, where the unwrapped phase difference is defined in relation to a reference; and determining path length fluctuation of light in the interferometer using the unwrapped phase difference.

A spectrometer comprises a plurality of isolated optical channels comprising a plurality of isolated optical paths. The isolated optical paths decrease cross-talk among the optical paths and allow the spectrometer to have a decreased length with increased resolution. In many embodiments, the isolated optical paths comprise isolated parallel optical paths that allow the length of the device to be decreased substantially. In many embodiments, each isolated optical path extends from a filter of a filter array, through a lens of a lens array, through a channel of a support array, to a region of a sensor array. Each region of the sensor array comprises a plurality of sensor elements in which a location of the sensor element corresponds to the wavelength of light received based on an angle of light received at the location, the focal length of the lens and the central wavelength of the filter.

A spectrometer comprises a plurality of isolated optical channels comprising a plurality of isolated optical paths. The isolated optical paths decrease cross-talk among the optical paths and allow the spectrometer to have a decreased length with increased resolution. In many embodiments, the isolated optical paths comprise isolated parallel optical paths that allow the length of the device to be decreased substantially. In many embodiments, each isolated optical path extends from a filter of a filter array, through a lens of a lens array, through a channel of a support array, to a region of a sensor array. Each region of the sensor array comprises a plurality of sensor elements in which a location of the sensor element corresponds to the wavelength of light received based on an angle of light received at the location, the focal length of the lens and the central wavelength of the filter.

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a part of an optical path between the beam splitter unit 3 and the fixed mirror 16. The light transmitting portion 14 is a portion that corrects an optical path difference that occurs between an optical path between the beam splitter unit 3 and the movable mirror 22 and the optical path between the beam splitter unit 3 and the fixed mirror 16. The second surface 21b of the base 21 and the third surface 13a of the optical function member 13 are joined to each other.

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a part of an optical path between the beam splitter unit 3 and the fixed mirror 16. The light transmitting portion 14 is a portion that corrects an optical path difference that occurs between an optical path between the beam splitter unit 3 and the movable mirror 22 and the optical path between the beam splitter unit 3 and the fixed mirror 16. The second surface 21b of the base 21 and the third surface 13a of the optical function member 13 are joined to each other.

A device that uses two intensity modulated frequency combs to measure distances with high precision and high data acquisition rate without any moving parts and without length ambiguity that is inherent conventional ranging based on two frequency combs. A modulation signal having a repetition rate identical to the repetition rate difference between the two combs is used to do a direct time-of-flight length measurement, hence avoiding the given length ambiguity while harvesting the increased precision of the dual-comb approach.

A device that uses two intensity modulated frequency combs to measure distances with high precision and high data acquisition rate without any moving parts and without length ambiguity that is inherent conventional ranging based on two frequency combs. A modulation signal having a repetition rate identical to the repetition rate difference between the two combs is used to do a direct time-of-flight length measurement, hence avoiding the given length ambiguity while harvesting the increased precision of the dual-comb approach.

Systems and methods for measuring a surface topography of a semiconductor chip are disclosed. A disclosed system comprises a light source configured to provide low coherent light to a first beam splitter, a scanner configured to use the low coherent light reflected from the first beam splitter to scan positions on a surface of a semiconductor chip, a second beam splitter configured to receive reflected signals from the positions on the surface of the semiconductor chip, a detector configured to detect interference signals from a first output of the second beam splitter, wherein each of the interference signals corresponds to a respective one of the positions, and a spectrometer configured to detect spectrum signals from a second output of the second beam splitter, wherein each of the spectrum signals corresponds to the respective one of the positions.

The present disclosure provides a radio frequency tagging optical spectrometer, comprising: a dynamic dispersion device, the dynamic dispersion device receiving a beam comprising more than two wavelength components and being driven by driving radio frequency signals, and the dynamic dispersion device encoding the intensity of each wavelength component into the amplitude of a different beat radio frequency signal based on different driving radio frequency signals, wherein the beat frequency of the different beat radio frequency signal is equal to the frequency of the corresponding driving radio frequency signal; a single-channel photodetector for detecting the sum of beat radio frequency signals formed by adding all the beat radio frequency signals; and a processing unit for performing Fourier transform on the sum of the beat radio frequency signals to obtain a spectrum or an associated radio frequency spectrum by which the optical spectrum is obtained.