Patent classifications
G
PHYSICS
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G01
MEASURING; TESTING
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G01J
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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5/00
Radiation pyrometry, e.g. infrared or optical thermometry
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G01J5/0003
for sensing the radiant heat transfer of samples, e.g. emittance meter
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G01J5/0007
of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
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