G01J5/04

Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
09823121 · 2017-11-21 · ·

A measurement wafer device for measuring radiation intensity and temperature includes a wafer assembly including one or more cavities. The measurement wafer device further includes a detector assembly. The detector assembly is disposed within the one or more cavities of the wafer assembly. The detector assembly includes one or more light sensors. The detector assembly is further configured to perform a direct or indirect measurement of the intensity of ultraviolet light incident on a surface of the wafer assembly. The detector assembly is further configured to determine a temperature of one or more portions of the wafer assembly based on one or more characteristics of the one or more light sensors.

Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
09823121 · 2017-11-21 · ·

A measurement wafer device for measuring radiation intensity and temperature includes a wafer assembly including one or more cavities. The measurement wafer device further includes a detector assembly. The detector assembly is disposed within the one or more cavities of the wafer assembly. The detector assembly includes one or more light sensors. The detector assembly is further configured to perform a direct or indirect measurement of the intensity of ultraviolet light incident on a surface of the wafer assembly. The detector assembly is further configured to determine a temperature of one or more portions of the wafer assembly based on one or more characteristics of the one or more light sensors.

Burn saver device

A decoupling radiant and convective heat sensing device, and a decoupling radiant and convective heat sensing device with a means for performing calculations and then determining a heat flux and an ambient temperature using formulas or reference tables, and also with a means for alerting a person of hazardous fire conditions based on a calculated heat flux and ambient temperature.

PROCESS FOR MANUFACTURING A MICROBOLOMETER CONTAINING VANADIUM OXIDE-BASED SENSITIVE MATERIAL

A microbolometer may include a sensitive material based on vanadium oxide (VO.sub.x) with an additional chemical element such as boron (B), but excluding nitrogen (N), the sensitive material wherein the sensitive material (i) is amorphous, (ii) has an electrical resistivity at ambient temperature in a range of from 1 to 30 Ω.Math.cm, (ii) has a homogeneous chemical composition, and (iv) has an amount of boron, defined as a ratio of a number of boron to vanadium atoms to that of vanadium, at least equal to 0.086.

Micromechanical sensor device and corresponding production method

A micromechanical sensor device and a corresponding production method include a substrate that has a front and a rear and a plurality of pillars that are formed on the front of the substrate. On each pillar, a respective sensor element is formed, which has a greater lateral extent than the associated pillar. A cavity is provided laterally to the pillars beneath the sensor elements. The sensor elements are laterally spaced apart from each other by respective separating troughs and make electrical contact with a respective associated rear contact via the respective associated pillar.

Techniques for tiling arrays of pixel elements and fabricating hybridized tiles

A first substrate having an array of emitters or detectors may be joined by bump bonding with a second substrate having read-in (RIIC) or read-out (ROIC) circuitry. After the two substrates are joined, the resulting assembly may be singulated to form sub-arrays such as tiles sub-arrays having pixel elements which may be arranged on a routing layer or carrier to form a larger array. Edge features of the tiles may provide for physical alignment, mechanical attachment and chip-to-chip communication. The pixel elements may be thermal emitter elements for IR image projectors, thermal detector elements for microbolometers, LED-based emitters, or quantum photon detectors such as those found in visible, infrared and ultraviolet FPAs (focal plane arrays), and the like.

Infrared thermometer
11428586 · 2022-08-30 · ·

The present invention is related to a non-contact infrared thermometer, which includes at least three infrared sensors, an indicating unit and a microprocessor. The at least three infrared sensors are arranged in serial to receive an infrared ray at a target area. The indicating unit is configured to emit visible light on the target area to indicate a received infrared region. The microprocessor is configured to receive and process the infrared ray measured by the at least three infrared sensors to provide at least three temperature values, thereby determining that the object to be measured is an organism.

Infrared thermometer
11428586 · 2022-08-30 · ·

The present invention is related to a non-contact infrared thermometer, which includes at least three infrared sensors, an indicating unit and a microprocessor. The at least three infrared sensors are arranged in serial to receive an infrared ray at a target area. The indicating unit is configured to emit visible light on the target area to indicate a received infrared region. The microprocessor is configured to receive and process the infrared ray measured by the at least three infrared sensors to provide at least three temperature values, thereby determining that the object to be measured is an organism.

Layered structure for an infrared emitter, infrared emitter device and detector
09733404 · 2017-08-15 · ·

The present publication describes a heat-resistant optical layered structure, a manufacturing method for a layered structure, and the use of a layered structure as a detector, emitter, and reflecting surface. The layered structure comprises a reflecting layer, an optical structure on top of the reflecting layer, and preferably shielding layers for shielding the reflecting layer and the optical structure. According to the invention, the optical structure on top of the reflecting layer comprises at least one partially transparent layer, which is optically fitted at a distance to the reflecting layer.

Sensor array with self-aligned optical cavities
09733128 · 2017-08-15 · ·

A sensing device includes an array of sensing elements. Each sensing element includes a thermal infrared sensor, configured to output an electric signal in response to an intensity of infrared radiation that is incident on the sensor. An individual reflector is formed integrally with the sensor at a location separated from the sensor by one quarter wave at a selected wavelength of the infrared radiation.