Embodiments disclosed herein provide an RTP system for processing a substrate. An RTP chamber has a radiation source configured to deliver radiation to a substrate disposed within a processing volume. One or more pyrometers are coupled to the chamber body opposite the radiation source. In one example, the radiation source is disposed below the substrate and the pyrometers are disposed above the substrate. In another example, the radiation source is disposed above the substrate and the pyrometers are disposed below the substrate. The substrate may be supported in varying manners configured to reduce physical contact between the substrate support and the substrate. An edge ring and shield are disposed within the processing volume and are configured to reduce or eliminate background radiation from interfering with the pyrometers. Additionally, an absorbing surface may be coupled to the chamber body to further reduce background radiation interference.

Embodiments disclosed herein provide an RTP system for processing a substrate. An RTP chamber has a radiation source configured to deliver radiation to a substrate disposed within a processing volume. One or more pyrometers are coupled to the chamber body opposite the radiation source. In one example, the radiation source is disposed below the substrate and the pyrometers are disposed above the substrate. In another example, the radiation source is disposed above the substrate and the pyrometers are disposed below the substrate. The substrate may be supported in varying manners configured to reduce physical contact between the substrate support and the substrate. An edge ring and shield are disposed within the processing volume and are configured to reduce or eliminate background radiation from interfering with the pyrometers. Additionally, an absorbing surface may be coupled to the chamber body to further reduce background radiation interference.

The present invention relates to an arrangement (1) for measuring the temperature of a web. The arrangement (1) comprises a plurality of sensors (3) for contactless measuring of the temperature, an elongated housing (5) intended for extending essentially along a transverse direction (T) which is transverse to the direction of movement of a web. The sensors (3) are arranged in a chamber (6) within the housing (5) and spread along the front side (7a) of the housing (5). Each sensor (3) is connected to a data bus (9) for providing information of the measured temperature to other systems and/or apparatuses. The sensors (3) are attached to a support structure (19) having at least one rotatable shaft (23) in the interior of the housing (7), and wherein the shaft (23) is arranged to rotate the support structure (19) such that the sensors (3) are displaced to a calibration and/or protection position away from the openings (11) for calibration and/or protection of the sensors (3). The invention also relates to a method for measuring the temperature of a web, a computer program, a computer readable medium and a control unit.

Techniques associated with generating or tuning parameters associated with long wave infrared sensor data to improve object detection associated with the captured images are discussed herein. The system may determine a region of interest associated with the sensor data and adjust or tune the parameters to improve detection(s) within the region of interest. Additionally, the system may adjust the parameters based on map data and/or environmental conditions, such as weather and temperature.

Techniques associated with generating or tuning parameters associated with long wave infrared sensor data to improve object detection associated with the captured images are discussed herein. The system may determine a region of interest associated with the sensor data and adjust or tune the parameters to improve detection(s) within the region of interest. Additionally, the system may adjust the parameters based on map data and/or environmental conditions, such as weather and temperature.

Aspects and examples described herein provide a lightweight radiation shielding structure for infrared cameras. In one example, a top radiation shielding element and a bottom radiation shielding element are placed as close as possible to an infrared detector to minimize excess weight added to the infrared camera while providing optimal radiation shielding. Such aspects and examples provide important functionality for numerous weight-sensitive applications in high-radiation environments.

A temperature estimation device (100) is provided with: an acquiring section (131) that acquires a photographed image photographed by a photographing section (110) including an infrared light sensor and a housing; a generating section (132) that corrects the photographed image with use of a correction parameter and a temporarily set temperature of the housing to generate a corrected image of the photographed image, the correction parameter that is calculated by prior temperature calibration with respect to the photographing section (110); and an estimating section (135) that estimates a temperature of the housing on the basis of non-uniformity of luminance values of pixels included in the corrected image.

A temperature estimation device (100) is provided with: an acquiring section (131) that acquires a photographed image photographed by a photographing section (110) including an infrared light sensor and a housing; a generating section (132) that corrects the photographed image with use of a correction parameter and a temporarily set temperature of the housing to generate a corrected image of the photographed image, the correction parameter that is calculated by prior temperature calibration with respect to the photographing section (110); and an estimating section (135) that estimates a temperature of the housing on the basis of non-uniformity of luminance values of pixels included in the corrected image.

A method for processing a raw image characterized by first Pix.sub.1(i,j) and second Pix.sub.2(i,j) raw measurements collected by first Bol.sub.1(i,j) and second Bol.sub.2(i,j) bolometers of a set of bolometers Bol(i,j) of a detector, the first bolometers Bol.sub.1(i,j) being closed off, the method being executed by a computer on the basis of reference measurements Pix.sub.REF(i,j) that include first Pix.sub.1REF(i,j) and second Pix.sub.2REF(i,j) reference measurements associated with the first Bol.sub.1(i,j) and with the second Bol.sub.2(i,j) bolometers, the method including: a) a correlation step between the first raw measurements Pix.sub.1(i,j) and the first reference measurements Pix.sub.1REF(i,j); and b) a step of correcting the raw image, which includes computing corrected measurements Pix.sub.Cor(i,j) of a corrected image for each bolometer Bol(i,j) on the basis of the reference measurements Pix.sub.REF(i,j) and of the result of step a).

A method for processing a raw image characterized by first Pix.sub.1(i,j) and second Pix.sub.2(i,j) raw measurements collected by first Bol.sub.1(i,j) and second Bol.sub.2(i,j) bolometers of a set of bolometers Bol(i,j) of a detector, the first bolometers Bol.sub.1(i,j) being closed off, the method being executed by a computer on the basis of reference measurements Pix.sub.REF(i,j) that include first Pix.sub.1REF(i,j) and second Pix.sub.2REF(i,j) reference measurements associated with the first Bol.sub.1(i,j) and with the second Bol.sub.2(i,j) bolometers, the method including: a) a correlation step between the first raw measurements Pix.sub.1(i,j) and the first reference measurements Pix.sub.1REF(i,j); and b) a step of correcting the raw image, which includes computing corrected measurements Pix.sub.Cor(i,j) of a corrected image for each bolometer Bol(i,j) on the basis of the reference measurements Pix.sub.REF(i,j) and of the result of step a).